Abstract: A programmable substrate support including a first substrate support that mates with a second substrate support to enable automatic switching between different types of substrates. The first substrate support is configured to support a first type of substrate and to mount to a substrate positioning system to enable handling of substrates of the first type. The second substrate support is configured to support a second type of substrate, and is further configured to mate with the first substrate support to form a mated configuration. The mated configuration enables the substrate positioning system to handle substrates of the second type. In a semiconductor wafer processing embodiment, the first substrate support is an end effector capable of handling wafers of a first size, such as 200 millimeter (mm) wafers, and the second substrate support is another end effector capable of handling wafers of a second size, such as 300 mm wafers. Of course, any size and type of substrate is contemplated.

Abstract: A substrate support apparatus for supporting one or more substrates in a substrate carrier for achieving a minimum amount of sagging of the substrates. A first support rod is positioned to support one side of each substrate along a first support contact line and a second support rod is positioned to support the other side of the substrate along a second support contact line. The first and second support contact lines are referenced to a centerline of the substrate. In particular, both contact lines are offset by a certain distance on either side of the centerline, where the particular offset of the support lines is determined by finite element analysis of the substrate to achieve as little sag as possible. The rod support member preferably includes two cantilevered beams mounted on either side of each of the support rods. Also, a plurality of support rods and corresponding rod support members are provided for supporting as many substrates as necessary in the carrier.

Abstract: A substrate aligner for a substrate carrier or cassette including an engagement assembly for moving and maintaining one or more substrates into an aligned position when closed, and an actuator assembly for opening and closing the engagement assembly. In one embodiment, the engagement assembly includes front and back engagement assemblies for mounting at opposite corners of the housing to thereby interface opposite comers of the substrates. Each engagement assembly preferably includes a roller for interfacing a corresponding edge of each the substrates, where the front assembly includes two rollers for interfacing front edges and adjacent side edges, and the back engagement assembly includes two rollers for interfacing the back edges and the opposite side edges of the substrates. In this manner, the engagement assembly interfaces all four edges of each substrate to thereby manipulate and maintain the substrates into a substantially aligned position when closed.

Abstract: A modular, transportable housing for storing substrates, such as semi-conductor wafers and masks, and for maintaining such substrates in a substantially clean environment. Substrates are supported within the housing by a plurality of combs which maintain the substrates in spaced relationship relative to each other. Access to the interior of the housing is permitted by a pivotal door assembly. A docking unit permits interface of the housing with a clean environment. Control circuitry provided in the docking unit detects the presence of a housing and loads/unloads the housing as directed by a host computer through a communication link. A memory device is preferably mounted to the housing for storing history and other information about the substrates within the housing. The host computer directs the control circuitry to retrieve the substrate information from the memory and relay the information to the host computer. During or after processing of the substrates, the host computer updates the memory as desired.

Abstract: A substrate support apparatus for supporting one or more substrates in a substrate carrier for achieving a minimum amount of sagging of the substrates. A first support rod is positioned to support one side of each substrate along a first support contact line and a second support rod is positioned to support the other side of the substrate along a second support contact line. The first and second support contact lines are referenced to a centerline of the substrate. In particular, both contact lines are offset by a certain distance on either side of the centerline, where the particular offset of the support lines is determined by finite element analysis of the substrate to achieve as little sag as possible. The rod support member preferably includes two cantilevered beams mounted on either side of each of the support rods. Also, a plurality of support rods and corresponding rod support members are provided for supporting as many substrates as necessary in the carrier.

Abstract: A modular, transportable for storing substrates, such as semi-conductor wafers and masks, and for maintaining such substrates in a substantially clean environment. Substrates are supported within the housing by a plurality of combs which maintain the substrates in spaced relationship relative to each other. Access to the interior of the housing is permitted by a pivotal door assembly. A docking unit permits interface of the housing with a clean environment. Control circuitry provided in the docking unit detects the presence of a housing and loads/unloads the housing as directed by a host computer through a communication link. A memory device is preferably mounted to the housing for storing history and other information about the substrates within the housing. The host computer directs the control circuitry to retrieve the substrate information from the memory and relay the information to the host computer. During or after processing of the substrates, the host computer updates the memory as desired.

Abstract: A stage assembly for a substrate processing system including a cassette support assembly for receiving and supporting a cassette and an actuation and support assembly for supporting and moving the cassette and cassette support assembly between a loading position and a processing position. The processing position provides convenient and efficient access by a central processing system, and the loading position preferably places each cassette closer to, and aligned with, a front panel of the processing system for convenient access by an operator. The actuator and support assembly preferably includes a frame assembly and a rotating plate pivotally mounted to the frame assembly, where the cassette support assembly is mounted to the rotating plate for pivoting relative to the frame assembly. An actuator assembly mounted to the frame assembly flits the cassette support assembly between the loading and processing positions. A shaft assembly pivotally mounts the cassette support assembly to the rotating plate.