Patents Assigned to ProMos Technology, Inc
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Patent number: 8305425Abstract: A panoramic camera system is disclosed that includes an unified optical system, an image capture device, and a processing unit. The unified optical system may include a first set of lenses that guide images received from horizontal directions of a target scene that surrounds the unified optical system. The unified optical system may also include a deflecting device that deflects the images guided through the first set of lenses and a second set of lenses that projects the images deflected by the deflecting device. The image capture device collects the projected images into a determined pattern based on the second set of lenses. Moreover, the processing unit processes the collected images from the image capture device to generate at least one of image signals and video signals representing a panoramic rendition of the target scene.Type: GrantFiled: August 21, 2009Date of Patent: November 6, 2012Assignee: Promos Technologies, Inc.Inventors: Mei Len, Chin-Hai Chang
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Patent number: 8216877Abstract: A phase-change memory is provided. The phase-change memory comprises a substrate. A first electrode is formed on the substrate. A circular or linear phase-change layer is electrically connected to the first electrode. A second electrode formed on the phase-change layer and electrically connected to the phase-change layer, wherein at least one of the first electrode and the second electrode comprises phase-change material.Type: GrantFiled: April 5, 2011Date of Patent: July 10, 2012Assignee: Promos Technologies Inc.Inventors: Yen Chuo, Hong-Hui Hsu
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Patent number: 7932565Abstract: An integrated circuit structure comprises a semiconductor substrate, a device region positioned in the semiconductor substrate, an insulating region adjacent to the device region, an isolation structure positioned in the insulating region and including a bottle portion and a neck portion filled with a dielectric material, and a dielectric layer sandwiched between the device region and the insulation region.Type: GrantFiled: August 18, 2008Date of Patent: April 26, 2011Assignee: Promos Technologies Inc.Inventors: Hsiao Che Wu, Wen Li Tsai
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Patent number: 7902631Abstract: A contact plug structure for a checkerboard dynamic random access memory comprises a body portion, two leg portions connected to the body portion and a dielectric block positioned between the two leg portions. Each leg portion is electrically connected to a deep trench capacitor arranged in an S-shape manner with respect to the contact plug structure via a doped region isolated by a shallow trench isolation structure. Preferably, the body portion and the two leg portions can be made of the same conductive material selected from the group consisting of polysilicon, doped polysilicon, tungsten, copper and aluminum, while the dielectric block can be made of material selected from the group consisting of borophosphosilicate glass. Particularly, the contact plug can be prepared by dual-damascene technique. Since the overlapped area between the contact plug structure and a word line can be dramatically decreased, the bit line coupling (BLC) can be effectively reduced.Type: GrantFiled: June 30, 2008Date of Patent: March 8, 2011Assignee: Promos Technologies, Inc.Inventor: Hsueh Yi Che
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Patent number: 7897431Abstract: A method of stacking wafers includes: providing a first wafer including a first metal connection layer; forming a first passivation layer over the first metal connection layer; forming a first bondpad in the first passivation layer to form a first bondpad layer; providing a second wafer including second metal connection layer; forming a second passivation layer over the second metal connection layer; forming a second bondpad in the second passivation layer to form a second bondpad layer; forming at least one of a first conductive adhesive layer over the first bondpad layer and a second conductive adhesive layer over the second bondpad layer; and stacking the second wafer on the first wafer by bonding respective faces of the second bondpad layer with the first bondpad layer via the at least one of the first conductive adhesive layer and the second conductive adhesive layer.Type: GrantFiled: January 5, 2009Date of Patent: March 1, 2011Assignee: Promos Technologies, Inc.Inventors: Min-Liang Chen, Hai-Jun Zhao
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Patent number: 7851253Abstract: A phase change memory device is provided. The phase change memory device includes a substrate with a first electrode layer formed thereon. A first phase change memory structure is on the first electrode layer and electrically connected to the first electrode layer. A second phase change memory structure is on the first phase change memory structure and electrically connected to the first phase change memory structure, wherein the first or second phase change memory structure includes a cup-shaped heating electrode. A first insulating layer covers a portion of the cup-shaped heating electrode along a first direction. A first electrode structure covers a portion of the first insulating layer and the cup-shaped heating electrode along a second direction. The first electrode structure includes a pair of phase change material sidewalls on a pair of sidewalls of the first electrode structure and covering a portion of the cup-shaped heating electrode.Type: GrantFiled: November 20, 2008Date of Patent: December 14, 2010Assignee: Promos Technologies Inc.Inventor: Wei-Su Chen
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Patent number: 7781303Abstract: A method for preparing a shallow trench isolation comprising the steps of forming at least one trench in a semiconductor substrate, performing an implanting process to implant nitrogen-containing dopants into an upper sidewall of the trench such that the concentration of the nitrogen-containing dopants in the upper sidewall is higher than that in the bottom sidewall of the trench, forming a spin-on dielectric layer filling the trench and covering the surface of the semiconductor substrate, performing a thermal oxidation process to form a silicon oxide layer covering the inner sidewall. Since the nitrogen-containing dopants can inhibit the oxidation rate and the concentration of the nitrogen-containing dopants in the upper inner sidewall is higher than that in the bottom inner sidewall of the trench, the thickness of the silicon oxide layer formed by the thermal oxidation process is larger at the bottom portion than at the upper portion of the trench.Type: GrantFiled: July 9, 2007Date of Patent: August 24, 2010Assignee: Promos Technologies Inc.Inventor: Hai Jun Zhao
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Patent number: 7781830Abstract: A recessed channel transistor comprises a semiconductor substrate having a trench isolation structure, a gate structure having a lower block in the semiconductor substrate and an upper block on the semiconductor substrate, two doped regions positioned at two sides of the upper block and above the lower block, and an insulation spacer positioned at a sidewall of the upper block and having a bottom end sandwiched between the upper block and the doped regions. In particular, the two doped regions serves as the source and drain regions, respectively, and the lower block of the gate structure serves as the recessed gate of the recessed channel transistor.Type: GrantFiled: July 16, 2008Date of Patent: August 24, 2010Assignee: Promos Technologies Inc.Inventors: Hsiao Che Wu, Ming Yen Li, Wen Li Tsai, Bin Siang Tsai
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Patent number: 7759252Abstract: The present invention is related to a method of two-step backside-etching. First, a substrate with a plurality of hard masks is provided. Next, the back and the edge of the substrate are backside-etched to remove parts of the hard masks on the back and the edge of the substrate. Then, the hard masks and the substrate are patterned in sequence to form a plurality of trenches in the substrate. Finally, before performing a wet bath step, the edge of the substrate is backside-etched to remove needle structures on the edge of the substrate.Type: GrantFiled: July 10, 2007Date of Patent: July 20, 2010Assignee: Promos Technologies Inc.Inventor: Yeng-Peng Wang
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Patent number: 7732801Abstract: A phase change memory device is provided. The phase change memory device includes a substrate with a first electrode layer formed thereon. A first phase change memory structure is on the first electrode layer and electrically connected to the first electrode layer. A second phase change memory structure is on the first phase change memory structure and electrically connected to the first phase change memory structure, wherein the first or second phase change memory structure includes a cup-shaped heating electrode. A first insulating layer covers a portion of the cup-shaped heating electrode along a first direction. A first electrode structure covers a portion of the first insulating layer and the cup-shaped heating electrode along a second direction. The first electrode structure includes a pair of phase change material sidewalls on a pair of sidewalls of the first electrode structure and covering a portion of the cup-shaped heating electrode.Type: GrantFiled: May 7, 2007Date of Patent: June 8, 2010Assignee: Promos Technologies Inc.Inventor: Wei-Su Chen
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Patent number: 7729183Abstract: A data sensing method for a dynamic random access memory including a storage capacitor configured to store data, a bit line, a transistor connecting the storage capacitor and the bit line, a reference bit line, and a sense amplifier connecting the bit line and the reference bit line. The data sensing method comprises the steps of turning off the transistor when the stored data is a predetermined value before enabling the sense amplifier to sense the voltage of the bit line and the reference bit line, and turning on the transistor when the stored data is opposite to the predetermined value such that a charge sharing process occurs between the storage capacitor and a parasitic capacitor of the bit line before enabling the sense amplifier to sense the voltage of the bit line and the reference bit line.Type: GrantFiled: June 26, 2008Date of Patent: June 1, 2010Assignee: Promos Technologies Inc.Inventor: Ling Wen Hsiao
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Patent number: 7672176Abstract: A writing circuit for a phase change memory is provided. The writing circuit comprises a driving current generating circuit, a first switch device, a first memory cell and a second switch device. The driving current generating circuit provides a writing current to the first memory cell. The first switch device is coupled to the driving current generating circuit. The first memory cell is coupled between the first switch device and the second switch device. The second switch device is coupled between the first memory cell and a ground, wherein when the driving current generating circuit outputs the writing current to the first memory cell, the second switch device is turned on after the first switch device has been turned on for a first predetermined time period.Type: GrantFiled: November 30, 2007Date of Patent: March 2, 2010Assignees: Industrial Technology Research Institute, Powerchip Semiconductor Corp., Nanya Technology Corporation, Promos Technologies Inc., Winbond Electronics Corp.Inventors: Pei-Chia Chiang, Shyh-Shyuan Sheu, Lieh-Chiu Lin
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Patent number: 7670869Abstract: A memory device is disclosed. A pillar structure comprises a first electrode layer, a dielectric layer overlying the first electrode layer, and a second electrode layer overlying the dielectric layer. A phase change layer covers a surrounding of the pillar structure. A bottom electrode electrically connects the first electrode layer of the pillar structure. A top electrode electrically connects the second electrode layer of the pillar structure.Type: GrantFiled: October 29, 2007Date of Patent: March 2, 2010Assignees: Industrial Technology Research Institute, Powerchip Semiconductor Corp., Nanya Technology Corporation, Promos Technologies Inc., Windbond Electronics Corp.Inventor: Tu-Hao Yu
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Patent number: 7660147Abstract: A programming method for a phase change memory based on the phase transformations between amorphous and crystalline phases is disclosed. The programming method comprises a current pulse with step waveform providing a first crystallization current pulse to the phase change memory and providing a second crystallization current pulse to the phase change memory. The first crystallization current pulse has a first rising edge, a first falling edge and a first peak current held for a first hold time. The second crystallization current pulse has a second peak current. The second peak current follows the first falling edge and is held for a second hold time.Type: GrantFiled: December 18, 2007Date of Patent: February 9, 2010Assignees: Industrial Technology Research Institute, Powerchip Semiconductor Corp., Nany Technology Corporation., Promos Technologies Inc., Winbond Electronics Corp.Inventors: Te-Sheng Chao, Ming-Jung Chen, Philip H. Yeh, Ming-Jinn Tsai
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Patent number: 7635626Abstract: A method of manufacturing a DRAM includes firstly providing a substrate. Many transistors are then formed on the substrate. Next, a first and a second LPCs are formed between the transistors. A first dielectric layer is then formed on the substrate, and a first opening exposing the first LPC is formed in the first dielectric layer. Thereafter, a barrier layer is formed on the first dielectric layer. Afterwards, a BLC is formed in the first opening, and a BL is formed on the first dielectric layer. A liner layer is then formed on a sidewall of the BL. Next, a second dielectric layer having a dry etching rate substantially equal to that of the liner layer and having a wet etching rate larger than that of the liner layer is formed on the substrate. Finally, an SNC is formed in the first and the second dielectric layers.Type: GrantFiled: June 22, 2007Date of Patent: December 22, 2009Assignee: ProMos Technologies Inc.Inventors: Cheng-Che Lee, Tao-Yi Chang, Tsung-De Lin
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Patent number: 7622352Abstract: A multi-step gate structure comprises a semiconductor substrate having a multi-step structure, a gate oxide layer positioned on the multi-step structure and a conductive layer positioned on the gate oxide layer. Preferably, the gate oxide layer has different thicknesses on each step surface of the multi-step structure. In addition, the multi-step gate structure further comprises a plurality of doped regions positioned in the semiconductor substrate under the multi-step structure. The channel length of the multi-step gate structure is the summation of the lateral width and the vertical depth of the multi-step gate structure, which is dramatically increased such that problems originated from the short channel effect can be effectively solved. Further, the plurality of doped regions under the multi-step structure are prepared by implanting processes having different dosages and dopants, which can control the thickness of the gate oxide layer and the threshold voltage of the multi-step gate structure.Type: GrantFiled: May 25, 2006Date of Patent: November 24, 2009Assignee: Promos Technologies Inc.Inventor: Ting Sing Wang
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Patent number: 7595467Abstract: A fault detection system comprises a data server configured to collect parameters incoming from at least one apparatus, at least one fault-sensing module configured to generate an alarm signal if the parameter exceeds a predetermined specification, a monitoring module configured to restart the fault-sensing module if the fault-sensing module operates abnormally, and a remote controller configured to control the data server, the fault-sensing module, and the monitoring module.Type: GrantFiled: December 1, 2005Date of Patent: September 29, 2009Assignee: Promos Technologies Inc.Inventors: Cheng Jer Yang, Wen Ti Lin, Hung Wen Chiou
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Patent number: 7582524Abstract: A method for preparing a memory structure comprises the steps of forming a plurality of line-shaped blocks on a dielectric structure of a substrate, and forming a first etching mask exposing a sidewall of the line-shaped blocks. A portion of the line-shaped blocks is removed incorporating the first etching mask to reduce the width of the line-shaped blocks to form a second etching mask including a plurality of first blocks and second blocks arranged in an interlaced manner. Subsequently, a portion of the dielectric structure not covered by the second etching mask is removed to form a plurality of openings in the dielectric structure, and a conductive plug is formed in each of the openings. The plurality of openings includes first openings positioned between the first blocks and second openings positioned between the second blocks, and the first opening and the second opening extend to opposite sides of an active area.Type: GrantFiled: September 29, 2006Date of Patent: September 1, 2009Assignee: Promos Technologies Inc.Inventors: Jung Wu Chien, Chia Shun Hsiao
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Patent number: 7569460Abstract: A capacitor structure comprises a substrate having a contact plug, a conductive cylinder positioned on the substrate and an electroplating structure covering the conductive cylinder, wherein a bottom electrode of the capacitor structure comprises the conductive cylinder and the electroplating structure. The conductive cylinder can be a hollow conductive cylinder, and the electroplating structure comprises a first conductive layer covering the inner sidewall and bottom surface of the hollow conductive cylinder and a second conductive layer covering the first conductive layer and the outer sidewall of the hollow conductive cylinder. The conductive cylinder and the electroplating structure can be made of different conductive material, and the free end of the conductive cylinder is preferably round. The conductive cylinder can be made of titanium nitride or tantalum nitride, while the electroplating structure can be made of ruthenium or platinum.Type: GrantFiled: October 20, 2006Date of Patent: August 4, 2009Assignee: Promos Technologies Inc.Inventor: Sheng Da Tsai
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Patent number: 7557407Abstract: A recessed gate structure comprises a semiconductor substrate, a recess positioned in the semiconductor substrate, a gate oxide layer positioned in the recess and a conductive layer positioned on the gate oxide layer, wherein the semiconductor substrate has a multi-step structure in the recess. The thickness of the gate oxide layer on one step surface can be different from that on another step surface of the multi-step structure. In addition, the recessed gate structure further comprises a plurality of doped regions positioned in the semiconductor substrate under the multi-step structure, and these doped regions may use different dosages and different types of dopants. There is a carrier channel in the semiconductor substrate under the recessed gate structure and the overall channel length of the carrier channel is substantially the summation of the lateral width and twice of the vertical depth of the recessed gate structure.Type: GrantFiled: May 18, 2006Date of Patent: July 7, 2009Assignee: Promos Technologies Inc.Inventor: Ting Sing Wang