Abstract: A seed holder for use in a crystal growth reactor. The seed holder has a drool and a washer of outer diameter substantially the same as the drool inner diameter. A main body is disposed over the washer and drool, forming an enclosure above the washer and drool, the enclosure forming a cavity above the washer and drool.
Type:
Grant
Filed:
July 27, 2007
Date of Patent:
October 29, 2013
Assignee:
Pronomic Industry AB
Inventors:
Olof Claes Erik Kordina, Shailaja Rao, Joshua R. Christie
Abstract: A system for crystal growth having rapid heating and cooling. A fluid-cooling jacket having a reflective shield contained therein is disposed around a heating cylinder in which crystal growth takes place. A heating coil is disposed round the cooling jacket. The invention also includes a method of crystal growth and semiconductor devices formed using the inventive methods and systems.
Abstract: A crystal growth process comprising providing a reactor having a crucible with an injector apparatus and a seed holder. The injector apparatus has an inner gas conduit and an outer gas conduit wherein an inert gas is introduced into the outer conduit. The injector apparatus has an upper injector and a lower injector and a gap therebetween. The upper injector temperature is maintained at a higher temperature than the lower injector.