Abstract: The present invention discloses a turbo molecular pump with improved blade structures. The turbo molecular pump comprises a rotor and a stator, wherein the rotor includes five rotor blade assemblies and the stator includes five stator blade assemblies, and wherein the blade number and the blade angle of each rotor blade assembly and stator blade assembly are adjusted to optimization, so as to enhance the pumping speed and the stability of the turbo molecular pump as well as to reduce the difficulty for manufacturing the turbo molecular pump.

Abstract: The present invention discloses an improved stator structure of a turbo molecular pump and a method for manufacturing the same. The stator comprises a plurality of stator blade assemblies, and each stator blade assembly comprising an inner shroud ring, an outer shroud ring and a plurality of stator blades, wherein the inner shroud ring, the outer shroud ring and the plurality of stator blades are integrated so that the rigidity of the stator is increased and the stator is not easily to be deformed; the method for manufacturing the stator comprises the steps of: laying a raw material on a computer numerical control (CNC) lathe; proceeding an outline treatment to a shape of each stator blade assembly by a turnery process; and shaping the plurality of stator blades of each stator blade assembly with a five-axis processing machine.