Patents Assigned to PSK HOLDINGS INC.
  • Plasma detecting device
    Patent number: 11854774
    Abstract: Disclosed is a detection device which includes a measurement unit including an illumination sensor that measures an amount of light in an interior of a chamber, and a detection unit that detects whether plasma is generated in the interior of the chamber, through analysis of the amount of the light.
    Type: Grant
    Filed: August 17, 2021
    Date of Patent: December 26, 2023
    Assignee: PSK Holdings Inc.
    Inventors: Nam Young Kim, Hyeong Mo Yoo
  • PLASMA DETECTING DEVICE
    Publication number: 20220301836
    Abstract: Disclosed is a detection device which includes a measurement unit including an illumination sensor that measures an amount of light in an interior of a chamber, and a detection unit that detects whether plasma is generated in the interior of the chamber, through analysis of the amount of the light.
    Type: Application
    Filed: August 17, 2021
    Publication date: September 22, 2022
    Applicant: PSK Holdings Inc.
    Inventors: Nam Young KIM, Hyeong Mo YOO
  • Substrate processing apparatus and method
    Patent number: 10964565
    Abstract: Disclosed is a substrate processing apparatus that includes an interference member for minimizing a collision between a descending flow of gas supplied by a fan unit and a gas flow directed toward a transfer space from the inside of a container.
    Type: Grant
    Filed: August 30, 2019
    Date of Patent: March 30, 2021
    Assignees: PSK INC., PSK HOLDINGS INC.
    Inventors: Je Hyeok Ryu, Jae Kyeong Yoo, Jung-Hyun Kang