Abstract: A cylindrical or flat far ultraviolet-C (UVC) 222 nm excimer lamp and a method for its manufacture are provided. The cylindrical or flat far UVC 222 nm excimer lamp can be used for safely sterilizing microorganisms (bacteria, fungi, or viruses) from the human body or otherwise, which can be used periodically or continuously. It comprises an anode inside of the lamp, a first insulator on the top of the anode, a second insulator above the first insulator with a height or distance, a connecting cover connecting the sides of the insulator the first with a second insulator for closing the gap or chamber, a valve on one side of the connecting cover for gas injection into the gap or chamber, and a cathode on the outside of the second insulator which is the same length and/or width as the anode.