Abstract: The present invention relates to a miniature microphone assembly comprising a capacitive microphone transducer comprising a microphone electrical contact or terminal, a microphone carrier comprising a carrier electrical contact or terminal formed on a first surface thereof, and an integrated circuit die comprising a die electrical terminal operatively coupled to signal amplification or signal conditioning circuitry of the integrated circuit die. The first surface of the microphone carrier comprises a first electrically conductive path surrounding the carrier electrical contact or terminal.
Type:
Application
Filed:
February 19, 2009
Publication date:
August 27, 2009
Applicant:
Pulse MEMS ApS.
Inventors:
Leif Steen Johansen, Per F. Høvesten, Gino Rocca
Abstract: The present invention relates to a surface mountable acoustic transducer system, comprising one or more transducers, a processing circuit electrically connected to the one or more transducers, and contact points arranged on an exterior surface part of the transducer system. The contact points are adapted to establish electrical connections between the transducer system and an external substrate, the contact points further being adapted to facilitate mounting of the transducer system on the external substrate by conventional surface mounting techniques.
Type:
Grant
Filed:
April 12, 2007
Date of Patent:
November 4, 2008
Assignee:
Pulse MEMS ApS
Inventors:
Matthias Mullenborn, Jochen F. Kuhmann, Peter Scheel
Abstract: A method of providing at least part of a diaphragm and at least a part of a back-plate of a condenser microphone with a hydrophobic layer so as to avoid stiction between said diaphragm and said back-plate. The layer is deposited via a number small of openings in the back-plate, the diaphragm and/or between the diaphragm and the back-plate. Provides a homogeneous and structured hydrophobic layer, even to small internal cavities of the microstructure. The layer may be deposited by a liquid phase or a vapor phase deposition method. The method may be applied naturally in continuation of the normal manufacturing process. Further, a MEMS condenser microphone is provided having such a hydrophobic layer. The static distance between the diaphragm and the back-plate of the microphone is smaller than 10 ?m.
Type:
Grant
Filed:
August 10, 2006
Date of Patent:
June 23, 2009
Assignee:
Pulse MEMS ApS
Inventors:
Ib Johannsen, Niels Bent Larsen, Matthias Mullenborn, Pirmin Hermann Otto Rombach