Abstract: The present invention provides new process for preparing inorganic fine particles, which suppresses agglomeration and adhesion of particles due to heat when preparing powder from a raw material liquid such as a slurry of zirconia hydrate fine particles in order to obtain inorganic raw material powder having sharp particle size distribution. Furthermore, the present invention provides a new process for preparing inorganic fine particles, which can make the chemical structure homogenous among the produced particles and inside the particles even in a multi-component system. The present invention provides a process for preparing inorganic fine particles, which comprises heating and applying impulse waves to a raw material liquid.