Patents Assigned to QCEPT TECHNOLOGIES
  • Wafer inspection system
    Publication number: 20040241890
    Abstract: A method and system for identifying a defect or contamination on a surface of a material. The method and system involves providing a material, such as a semiconductor wafer, using a non-vibrating contact potential difference sensor to scan the wafer, generate contact potential difference data and processing that data to identify a pattern characteristic of the defect or contamination.
    Type: Application
    Filed: February 3, 2004
    Publication date: December 2, 2004
    Applicant: QCEPT TECHNOLOGIES, INC.
    Inventors: M. Brandon Steele, Jeffrey Alan Hawthorne, Chunho Kim, David C. Sowell
  • Semiconductor wafer inspection system
    Publication number: 20040152250
    Abstract: A method and system for identifying a defect or contamination on a surface of a material. The method and system involves providing a material, such as a semiconductor wafer, using a non-vibrating contact potential difference sensor to scan the wafer, generate contact potential difference data and processing that data to identify a pattern characteristic of the defect or contamination.
    Type: Application
    Filed: July 29, 2003
    Publication date: August 5, 2004
    Applicant: QCEPT TECHNOLOGIES
    Inventors: M. Brandon Steele, Jeffrey Alan Hawthorne