Patents Assigned to Qingdao Research Institute of Beihang Univerity
  • Patent number: 11297441
    Abstract: The present disclosure discloses a microphone, comprising: a first substrate, the first substrate having an inner cavity open at one end, wherein the microphone further comprises a vibration diaphragm and at least one cantilever which are provided to the first substrate and suspended above the inner cavity. The cantilever is separated from the vibration diaphragm by a spacing portion, and the vibration diaphragm and the inner cavity of the first substrate define an acoustically sealed cavity; and a detection structure is provided to the vibration diaphragm and the cantilever. The structural design of the cantilever is adopted, so that the space between the vibration diaphragm and the cantilever is open, the airflow can smoothly pass by the cantilever, and further the signal-to-noise ratio of the microphone can be greatly improved.
    Type: Grant
    Filed: September 6, 2018
    Date of Patent: April 5, 2022
    Assignees: Goertek, Inc., Qingdao Research Institute of Beihang Univerity
    Inventors: Quanbo Zou, Qunwen Leng, Zhe Wang