Abstract: A resonator sensor module is disclosed. The resonator sensor module includes one or more sensing resonators that includes binding sites for an analyte material; one or more reference resonators that lacks any binding sites for the analyte material; a module interface; and one or more switches each including a first position that operatively couples at least one of the one or more sensing resonators and the module interface and a second position that operatively couples at least one of the one or more reference resonators and the module interface.

Abstract: A fluidic device includes a base structure including at least one bulk acoustic wave (BAW) resonator structure having a fluidic passage containing at least one functionalized active region overlaid with functionalization material suitable to bind an analyte. One or more of a wall structure, a cover structure, or a portion of the base structure defining the fluidic passage includes additional functionalization material to form at least one absorber configured to bind at least one analyte. The dynamic measurement range of a BAW resonator structure is increased when the at least one absorber is placed upstream of the at least one functionalized active region.

Abstract: Systems and methods for growing hexagonal crystal structure piezoelectric material with a c-axis that is tilted (e.g., 25 to 50 degrees) relative to normal of a face of a substrate are provided. A deposition system includes a linear sputtering apparatus, a translatable multi-aperture collimator, and a translatable substrate table arranged to hold multiple substrates, with the substrate table and/or the collimator being electrically biased to a nonzero potential. An enclosure includes first and second deposition stations each including a linear sputtering apparatus, a collimator, and a deposition aperture.