Abstract: A support structure within an interferometric modulator device may contact various other structures within the device. Increased bond strengths between the support structure and the other structures may be achieved in various ways, such as by providing roughened surfaces and/or adhesive materials at the interfaces between the support structures and the other structures. In an embodiment, increased adhesion is achieved between a support structure and a substrate layer. In another embodiment, increased adhesion is achieved between a support structure and a moveable layer. Increased adhesion may reduce undesirable slippage between the support structures and the other structures to which they are attached within the interferometric modulator.
Type:
Grant
Filed:
December 4, 2009
Date of Patent:
April 12, 2011
Assignee:
QUALCOMM MEMS Technologies, Inc.
Inventors:
Ming-Hau Tung, Brian W. Arbuckle, Philip Don Floyd, William Cummings
Abstract: An Interferometric Modulator (IMod) is a microelectromechanical device for modulating light using interference. The colors of these devices may be determined in a spatial fashion, and their inherent color shift may be compensated for using several optical compensation mechanisms. Brightness, addressing, and driving of IMods may be accomplished in a variety of ways with appropriate packaging, and peripheral electronics which can be attached and/or fabricated using one of many techniques. The devices may be used in both embedded and directly perceived applications, the latter providing multiple viewing modes as well as a multitude of product concepts ranging in size from microscopic to architectural in scope.
Abstract: Methods of writing display data to MEMS display elements are configured to minimize charge buildup and differential aging. Simultaneous to writing rows of image data, a pre-write operation is performed on a next row. The pre-write operation writes either image data or the inverse of the image data to the next row. In some embodiments, the selection between writing image data and writing inverse image data is performed in a random or pseudo-random manner.
Type:
Grant
Filed:
April 28, 2006
Date of Patent:
April 5, 2011
Assignee:
QUALCOMM MEMS Technologies, Inc.
Inventors:
Richard A. Stewart, Clarence Chui, Robert S. Hastings
Abstract: In certain embodiments, a microelectromechanical (MEMS) device comprises a substrate having a top surface, a movable element over the substrate, and an actuation electrode disposed laterally from the reflective surface. The movable element comprises a deformable layer and a reflective element mechanically coupled to the deformable layer. The reflective element includes a reflective surface. The movable element is responsive to a voltage difference applied between the actuation electrode and the movable element by moving in a direction generally perpendicular to the top surface of the substrate.
Abstract: Methods and systems are disclosed for providing video data and display signals. In one embodiment, a system is configured to display video data on an array of bi-stable display elements, where the system includes a processor, a display comprising an array of bi-stable display elements, a driver controller connected to the processor and configured to receive video data from the processor, and an array driver configured to receive video data from the driver controller and display signals from the processor, and to display the video data on the array of bi-stable display elements using the display signals.
Type:
Grant
Filed:
April 1, 2005
Date of Patent:
April 5, 2011
Assignee:
QUALCOMM MEMS Technologies, Inc.
Inventors:
Jeffrey B. Sampsell, Karen Tyger, Mithran Mathew
Abstract: A microelectromechanical system (MEMS) device is provided. In one embodiment, the MEMS device includes a transparent substrate, and a plurality of interferometric modulators. The plurality of interferometric modulators includes an optical stack coupled to the transparent substrate, in which the optical stack includes a first light absorbing area. The plurality of interferometric modulators further includes a reflective layer over the optical stack, and one or more posts to support the reflective layer. Each of the one or more posts includes a second light absorbing area integrated in the post.
Abstract: A displaying apparatus that includes a plurality of electromechanical system elements arranged in rows. The electromechanical system elements of each of the rows are further arranged in subrows. The subrows of each row are electrically connected. Certain of the electromechanical system elements have a hysteresis stability window that is nested with another hysteresis stability window of certain others of the electromechanical system elements. A method of manufacturing a displaying apparatus that includes forming a plurality of electromechanical system elements arranged in rows. The electromechanical system elements of each of the rows are further arranged in subrows. The subrows of each row are electrically connected. Certain of the electromechanical system elements have a hysteresis stability window that is nested with another hysteresis stability window of certain others of the electromechanical system elements.
Type:
Application
Filed:
December 7, 2010
Publication date:
March 31, 2011
Applicant:
QUALCOMM MEMS Technologies, Inc.
Inventors:
Clarence Chui, Mithran C. Mathew, Marc Mignard
Abstract: Interferometric modulators and methods of making the same are disclosed. In one embodiment, an interferometric modulator includes an interferometric reflector having a first reflective surface, a second reflective surface, and an optical resonant layer defined by the first reflective surface and the second reflective surface. The interferometric reflector can be configured to transmit a certain spectrum of light at a transmission peak wavelength such that the interferometric modulator has a diminished reflectance of light at the transmission peak wavelength.
Type:
Application
Filed:
September 28, 2009
Publication date:
March 31, 2011
Applicant:
QUALCOMM MEMS Technologies, Inc.
Inventors:
Marek Mienko, Jonathan Charles Griffiths
Abstract: An interferometric modulator array is formed with connectors and/or an encapsulation layer with electrical connections. The encapsulation layer hermetically seals the array. Circuitry may also be formed over the array.
Abstract: A microelectromechanical system (MEMS) is provided. In one embodiment, the MEMS includes a transparent substrate, and a plurality of interferometric modulators. The plurality of interferometric modulators includes an optical stack coupled to the transparent substrate, in which the optical stack includes a first light absorbing area. The plurality of interferometric modulators further includes a reflective layer over the optical stack, and one or more posts to support the reflective layer. Each of the one or more posts includes a second light absorbing area integrated in the post.
Abstract: Systems and methods of displaying an end-of-life image on an electronic display are disclosed. An end-of-life image is displayed on a MEMS display device in the presence of sufficient water vapor and without continued activation of the display. The image can he displayed in response to user input, in response to detection of a predefined level of water vapor within the display package, according to a prestored lifetime of the device, or according to the natural expiration of the lifetime of the display device and packaging.
Abstract: A device to measure pressure is disclosed. In one embodiment, the device includes at least one element with two layers separated by a space which changes over a variable time period in response to a voltage applied across the two layers. The time period may be measured and is indicative of the ambient pressure about the device.
Abstract: In certain embodiments, a device is provided that utilizes both interferometrically reflected light and transmitted light. Light incident on the device is interferometrically reflected from a plurality of layers of the device to emit light in a first direction, the interferometrically reflected light having a first color. Light from a light source is transmitted through the plurality of layers of the device to emit from the device in the first direction, the transmitted light having a second color.
Type:
Application
Filed:
November 22, 2010
Publication date:
March 24, 2011
Applicant:
QUALCOMM MEMS Technologies, Inc.
Inventors:
Manish Kothari, Gaurav Sethi, Jonathan Charles Griffiths, Kasra Khazeni
Abstract: Embodiments include methods and devices for controlling the spectral profile and color gamut of light produced by an interferometric display. Such devices include illuminating a display with selected wavelengths of light. Embodiments also include a display comprising separate sections that output different predetermined colors of light. Other embodiments include methods of making the aforementioned devices.
Abstract: A MEMS device is electrically actuated with a voltage placed across a first electrode and a moveable material. The device may be maintained in an actuated state by latch electrodes that are separate from the first electrode.
Abstract: In certain embodiments, a device is provided including a substrate and a plurality of supports over the substrate. The device may further include a mechanical layer having a movable portion and a stationary portion. The stationary portion may disposed over the supports. In certain embodiments, the device further includes a reflective surface positioned over the substrate and mechanically coupled to the movable portion. The device of certain embodiments further includes at least one movable stop element displaced from and mechanically coupled to the movable portion. In certain embodiments, the at least a portion of the stop element may be positioned over the stationary portion.
Type:
Application
Filed:
September 17, 2009
Publication date:
March 17, 2011
Applicant:
QUALCOMM MEMS Technologies, Inc.
Inventors:
Manish Kothari, Sauri Gudlavalleti, Stephen Zee
Abstract: Embodiments of the present disclosure include a method of fabricating interferometric devices using lift-off processing techniques. Use of lift-off processing in the fabrication of various layers of interferometric modulators, such as an optical stack or a flex layer, advantageously avoids individualized chemistries associated with the plurality of materials associated with each layer thereof. Moreover, use of lift-off processing allows much greater selection in both materials and facilities available for fabrication of interferometric modulators.
Abstract: An interferometric modulator (Imod) cavity has a reflector and an induced absorber. A direct view reflective flat panel display may include an array of the modulators. Adjacent spacers of different thicknesses are fabricated on a substrate by a lift-off technique used to pattern the spacers which are deposited separately, each deposition providing a different thickness of spacer. Or a patterned photoresist may be used to allow for an etching process to selectively etch back the thickness of a spacer which was deposited in a single deposition. A full-color static graphical image may be formed of combined patterns of interferometric modulator cavities. Each cavity includes a reflector, and an induced absorber, the induced absorber including a spacer having a thickness that defines a color associated with the cavity.
Abstract: Certain MEMS devices include layers patterned to have tapered edges. One method for forming layers having tapered edges includes the use of an etch leading layer. Another method for forming layers having tapered edges includes the deposition of a layer in which the upper portion is etchable at a faster rate than the lower portion. Another method for forming layers having tapered edges includes the use of multiple iterative etches. Another method for forming layers having tapered edges includes the use of a liftoff mask layer having an aperture including a negative angle, such that a layer can be deposited over the liftoff mask layer and the mask layer removed, leaving a structure having tapered edges.
Abstract: A method and apparatus for displaying data on bi-stable and non-bi-stable displays is provided. The apparatus includes a controller chip capable of being connected to a non-bi-stable display through a first interface channel and also capable of being connected to a bi-stable display via the first interface channel and an additional second interface channel. When connected the non-bi-stable display, the second interface channel is not connected. The second interface channel may carry mode information bits to the bi-stable display module to allow the bi-stable display to utilize power-saving features.