Abstract: This disclosure provides systems, methods and apparatus for combining devices deposited on a first substrate, with integrated circuits formed on a second substrate such as a semiconducting substrate or a glass substrate. The first substrate may be a glass substrate. The first substrate may include conductive vias. A power combiner circuit may be deposited on a first side of the first substrate. The power combiner circuit may include passive devices deposited on at least the first side of the first substrate. The integrated circuit may include a power amplifier circuit disposed on and configured for electrical connection with the power combiner circuit, to form a power amplification system. The conductive vias may include thermal vias configured for conducting heat from the power amplification system and/or interconnect vias configured for electrical connection between the power amplification system and a conductor on a second side of the first substrate.

Abstract: This disclosure provides systems, methods and apparatus related to an electromechanical display device. In one aspect, an analog interferometric modulator (AIMOD) includes a reflective display pixel having a movable reflective layer and a stationary absorber layer, the reflective layer and absorber layer defining a cavity therebetween. A color notch filter may be employed to produce an improved white state. In some implementations, the color notch filter is positioned on a side of the substrate opposite the absorber layer. In some other implementations, the color notch filter is positioned between the substrate and the movable reflective layer.

Abstract: Methods and apparatus are provided for controlling a depth of a cavity between two layers of a light modulating device. A method of making a light modulating device includes providing a substrate, forming a sacrificial layer over at least a portion of the substrate, forming a reflective layer over at least a portion of the sacrificial layer, and forming one or more flexure controllers over the substrate, the flexure controllers configured so as to operably support the reflective layer and to form cavities, upon removal of the sacrificial layer, of a depth measurably different than the thickness of the sacrificial layer, wherein the depth is measured perpendicular to the substrate.

Abstract: This disclosure provides systems, methods and apparatuses for pixel vias. In one aspect, a method of forming an electromechanical device having a plurality of pixels includes depositing an electrically conductive black mask on a substrate at each of four corners of each pixel, depositing a dielectric layer over the black mask, depositing an optical stack including a stationary electrode over the dielectric layer, depositing a mechanical layer over the optical stack, and anchoring the mechanical layer over the optical stack at each corner of each pixel. The method further includes providing a conductive via in a first pixel of the plurality of pixels, the via in the dielectric layer electrically connecting the stationary electrode to the black mask, the via disposed at a corner of the first pixel, offset from where the mechanical layer is anchored over the optical stack in an optically non-active area of the first pixel.

Abstract: This disclosure provides systems, methods and apparatus for a stacked via having a top via structure and a bottom via structure. In one aspect, the bottom via structure includes a bottom dielectric layer and a bottom via extending through the bottom dielectric layer. The bottom via includes a bottom metal formed on the bottom dielectric layer, where the bottom via is substantially filled by a dielectric material. The top via structure includes a top dielectric layer over the bottom metal and a top via extending to a top plane of the bottom via in the top dielectric layer. The top via includes a top metal formed on the top dielectric layer, where the top metal is in electrical contact with the bottom metal at a peripheral area of the bottom via structure.

Abstract: This disclosure provides systems, methods and apparatus, including computer programs encoded on computer storage media, for providing positive and negative voltages using a single inductor. In one aspect, the apparatus includes a single inductor having a first end and a second end. The first end is coupled to a first switch and configured to connect to either a power source or a negative output node depending on the state of the first switch. The second end is coupled to a second switch and is configured to connect to either a ground potential or a positive output node depending on the state of the second switch. The apparatus further includes a controller adapted to configure the switches into one of a plurality of configurations at a time.

Abstract: A particular device includes a coil and a discontinuous magnetic core. The discontinuous magnetic core includes a first elongated portion, a second elongated portion, and at least two curved portions, where the portions are coplanar and physically separated from each other. The discontinuous magnetic core is arranged to form a discontinuous loop. The discontinuous magnetic core is deposited as a first layer above a dielectric substrate. A first portion of the coil extends above a first surface of the magnetic core. A second portion of the coil extends below a second surface of the magnetic core. The second portion of the coil is electrically coupled to the first portion of the coil. The second surface of the magnetic core is opposite the first surface of the magnetic core.

Abstract: In various embodiments described herein, a display device comprising a light collection film and a photovoltaic device disposed on an edge of the collection film. The collection film has a plurality of light-turning features for redirecting light between the front and back surface of the collection film and the photovoltaic device. In some embodiments, a light source is also disposed on an edge of the collection film and emits light which is turned by the light-turning features toward the display.

Abstract: Improvements in an interferometric modulator that has a cavity defined by two walls.

Abstract: This disclosure provides systems, methods, and apparatuses for array illumination. In one aspect, an array of light engines is coupled to a support structure. Each light engine can be separately controlled to achieve a desired output beam. In another aspect, a support structure includes an array of LED emitters. The support structure is configured to removably receive a plurality of light guides over the array of LED emitters, thereby forming an array of light engines. The support structure can include an integrated heat sink in thermal communication with the array of LED emitters. Light from the LED emitters is distributed over the surface of the light guides to produce a desired output beam. The light engines can be configured to produce output beams of differing color, direction, shape and/or size.

Abstract: This disclosure provides systems, methods and apparatus for providing a desired illumination pattern within a given plane. In one aspect, a light wash system can be configured to provide substantially even illumination on a wall or floor. The light wash system can use light-shaping optics such as a stack of optical films to provide a light wash system which is smaller than conventional light wash systems which utilize parabolic reflectors. The light wash system may include an internal retroreflector to allow a wider range of throw distances for the light wash system.

Abstract: An optical accelerometer and method of determining an acceleration are disclosed. In one aspect, an accelerometer includes a light source, a substrate, a light guide attached to a first side of the substrate and configured to redirect light from the light source through the substrate. The accelerometer also includes a light detector, a proof mass attached to a second side of the substrate via one or more springs, wherein the second side is opposite the first side and wherein motion of the proof mass alters a characteristic of the light from the light source reaching the light detector, and a processor configured to determine an acceleration based on the characteristic of the light reaching the light detector.

Abstract: This disclosure provides systems, methods and apparatus for calibration of analog display elements such as analog interferometric modulators (IMODs). In one aspect, display devices include both a light-turning layer and integrated color sensor in order to provide feedback on the operation of the display. In particular, the integrated color sensors can be used to determine a relative shift in a color signal output by an analog display element.

Abstract: This disclosure provides systems, methods and apparatus related to an ultrasonic sensor for detecting ultrasonic energy. In some implementations, the ultrasonic sensor includes a piezoelectric receiver layer bonded with an adhesive to an array of pixel circuits disposed on a substrate, each pixel circuit in the array including at least one thin film transistor (TFT) element and having a pixel input electrode electrically coupled to the pixel circuit. Methods of forming ultrasonic sensors include bonding piezoelectric receiver layers to TFT arrays.

Abstract: This disclosure provides systems, methods and apparatus, including a display device that includes an overlying holographic film. In one aspect, the holographic film includes a hologram that is configured to turn light incident on the film. The light is turned towards the display device at desired angles. The display can be formed of interferometric modulators and the turned light can be reflected off the display, and towards a viewer, to form an image. For light that is incident on the film at angles outside of a view cone, the holographic film is provided with holographic light turning features that turn this light so that it is reflected off the display at angles within a view cone of the display.

Abstract: This disclosure provides systems, methods and apparatus for processing multiple substrates in a processing tool. An apparatus for processing substrates can include a process chamber, a common reactant source, and a common exhaust pump. The process chamber can be configured to process multiple substrates. The process chamber can include a plurality of stacked individual subchambers. Each subchamber can be configured to process one substrate. The common reactant source can be configured to provide reactant to each of the subchambers in parallel. The common exhaust pump can be connected to each of the subchambers.

Abstract: This disclosure provides systems, methods, and apparatus for metal-insulator-metal capacitors on glass substrates. In one aspect, an apparatus may include a glass substrate, with the glass substrate defining at least one via in the glass substrate. A first electrode layer may be disposed over surfaces of the glass substrate, including surfaces of the at least one via. A dielectric layer may be disposed on the first electrode layer. A second electrode layer may be disposed on the dielectric layer, with the dielectric layer electrically isolating the first electrode layer from the second electrode layer.

Abstract: This disclosure provides implementations of electromechanical systems (EMS) resonator structures, devices, apparatus, systems, and related processes. In one aspect, a device includes an evanescent-mode electromagnetic-wave cavity resonator. In some implementations, the cavity resonator includes a lower cavity portion and an upper cavity portion that together form a volume. The cavity resonator also includes an in-plane lithographically-defined resonator structure having a portion that is located at least partially within the volume to support one or more evanescent electromagnetic wave modes. In some implementations, an upper surface of the resonator structure is connected with the upper cavity portion while a lower mating surface is connected with the lower cavity portion.

Abstract: An ornamental display device having at least one interferometric modulator, a signal receiver configured to receive an external signal and a processor configured to control the display based on the external signal is disclosed. In one aspect, the external signal is emitted from a controller. In another aspect, the external signal is emitted from a computer.

Abstract: A system for driving an array of display elements includes a supply line, at least one capacitor, a plurality of drive lines and overdrive lines, a plurality of switches and a controller configured to activate and deactivate subsets of the switches in order to selectively couple the at least one capacitor to the drive lines and to the overdrive lines. A method for generating an overdrive voltage includes activating and deactivating a plurality of switches to couple a drive voltage line and/or an overdrive voltage line to at least one capacitor.