Abstract: This disclosure provides systems, methods and apparatus, including computer programs encoded on computer storage media, for making and using gyroscopes. Such gyroscopes may include a central anchor, a sense frame disposed around the central anchor, a plurality of sense beams configured for connecting the sense frame to the central anchor and a drive frame disposed around and coupled to the sense frame. The gyroscope may include pairs of drive beams disposed on opposing sides of the sense frame. The gyroscope may include a drive frame suspension for substantially restricting a drive motion of the drive frame to that of a substantially linear displacement along the first axis. The sense frame may be substantially decoupled from drive motions of the drive frame. Such devices may be included in a mobile device, such as a mobile display device.

Abstract: This disclosure provides systems, methods and apparatus which involve selectively removing a sacrificial portion of molybdenum (Mo) relative to other structural materials in a self-limiting manner. The Mo is only partially removed, leaving behind a remaining portion of molybdenum. The self-limiting etch can form an internal cavity by removing only a portion of a Mo layer between electromechanical systems electrodes. The remaining Mo can serve as a support structure between the electrodes.

Abstract: This disclosure provides systems and methods for thin film switching devices, such as thin film transistors and thin film diodes, which are integrated in a display apparatus. In one aspect, a thin film switching device is positioned on a rear side of an electromechanical systems (EMS) display element formed over a substrate and is in electrical communication with the EMS display element. In another aspect, the thin film switching device is positioned between the EMS display element and the substrate. A planar layer is disposed between the EMS display element and the thin film switching device, with the planar layer having a planar surface.

Abstract: This disclosure provides systems, methods and apparatus for purge gas delivery in an atomic layer deposition (ALD) processing apparatus. The ALD processing apparatus can include a processing chamber including a lid and a chamber wall. One or more process gas lines for delivering process gases are coupled to one or more process gas delivery sources in the processing chamber. An o-ring can be positioned proximate an outer edge of the processing chamber to provide a seal with the chamber wall and the lid. The lid is configured to open for removal of the substrate and close to process the substrate. A purge line for delivering purge gas is coupled to one or more purge gas delivery line sources in the processing chamber, and the purge gas delivery line sources are disposed between the o-ring and the one or more process gas delivery sources.

Abstract: This disclosure provides systems, methods and apparatus related to an electromechanical display device. In one aspect, an analog interferometric modulator (AIMOD) includes a reflective display pixel having a movable element disposed between first and second electrodes. The movable element includes a third electrode embedded within a deformable layer and a reflector. The movable element is moved to different positions between first and second electrodes, with different positions corresponding to different reflected colors from the AIMOD. In another aspect, the reflector is coupled to, but spaced apart from, the deformable layer, thereby decoupling the mechanical and optical properties of the movable element. In another aspect, the need for a bending region in the reflector is eliminated, providing for increased fill factor. In another aspect, the reflector may include a dielectric layer having substantially identical metal layers above and below, so as to provide increased rigidity to the reflector.

Abstract: This disclosure provides systems, methods and apparatus for improving brightness, contrast, and viewable angle of a reflective display. In one aspect, a display includes a diffuser including a topographical pattern that is different in different areas of the display and a planarization layer over the diffuser. The diffuser is configured to scatter incident light to a different range of angles for different areas of the display.

Abstract: Systems, methods, and apparatuses for improving brightness, contrast, and/or viewable angle of a reflective display. A display includes a diffuser including particles and a binder over a substrate. At least some of the particles protrude from a planar or substantially planar upper surface of the binder, which provides a topographical pattern for the diffuser. The display includes a planarization layer on the diffuser. The planarization layer provides a planar or substantially planar surface for the formation of display elements over the planarization layer.

Abstract: This disclosure provides methods and apparatus for calibrating display arrays. In one aspect, a method of calibrating a display array includes determining a particular drive response characteristic and updating a particular drive scheme voltage between updates of image data on the display array. The drive response characteristic may be determined by applying a ramped voltage to a line of the array and detecting a current pulse due to a capacitance change on the line. The drive response characteristic can be determined based on data representing a width of a current pulse in the waveform or a weighted or unweighted area of a current pulse in the waveform.

Abstract: This disclosure provides systems, methods and apparatus for driving a display array with a waveform having a plurality of voltage levels, wherein a first subset of the plurality of voltages is different from a second subset of the plurality of voltages by a defined amount. In one aspect, a display driver circuit comprises a power supply configured to generate the first subset of said plurality of voltages, and a charge pump having the first subset of the plurality of voltages as inputs and the second subset of the plurality of voltages as outputs. The charge pump may not include a switch between each output voltage and a corresponding capacitor.

Abstract: This disclosure provides systems, methods and apparatus including a light collector having a plurality of micro-lens and a plurality of multi-cone light redirecting structure that is optically coupled to one or more photovoltaic cells. In one aspect, the light collector includes a micro-lens array having a plurality of micro-lens that focus incident light onto a light guide including a plurality of multi-cone light redirecting structure. Each of the plurality of multi-cone light redirecting structure is configured to divert the focused light towards one or more photovoltaic cells disposed along the edge of the light guide. Each multi-cone light redirecting structure includes a central cone shaped structure surrounded by several secondary cone-shaped structures.

Abstract: This disclosure provides systems, methods and apparatus including a light collector having a plurality of micro-lens and a plurality of multi-cone light redirecting structure that is optically coupled to one or more photovoltaic cells. In one aspect, the plurality of micro-lens is provided in an organic glass panel that is attached to an inorganic glass substrate. The inorganic glass substrate includes a material that is substantially opaque to radiation in the ultraviolet spectral range. During use, the light collector is disposed such that the inorganic glass substrate is exposed to the exterior to prevent a portion of the ultraviolet radiation incident on the light collector from being transmitted to the organic glass panel.

Abstract: This disclosure provides systems, methods, and apparatus related to a the design of arrays of electrodes in a device which includes a light-guiding layer in optical contact with the electrodes. In one aspect, a device includes an array of electrodes, the electrodes include at least one edge having a non-linear shape. Specific design constraints may be placed on the shape of the non-linear edge of the electrodes.

Abstract: This disclosure provides methods and apparatus for calibrating display arrays. In one aspect, a method of calibrating a display array includes determining a particular drive response characteristic and updating a particular drive scheme voltage between updates of image data on the display array. The drive response characteristic may be determined by applying a ramp voltage to a line of the array and detecting a current pulse due to a capacitance change on the line. The ramp voltage generator can include a capacitor and a digitally controlled current source.

Abstract: This disclosure provides systems, methods and apparatus for optical touch detection systems. In one aspect, the optical touch detection systems include a light detector and a light guide including a plurality of angled slots. The angled slots can be configured to reflect light towards the light detector. A processor can be utilized to correlate the light, or the change in light, detected by the light detector with the touch event or a gesture.

Abstract: This disclosure relates to an interactive display, having a front surface including a viewing area, and providing an input/output interface for a user of an electronic device. A planar light guide (PLG) disposed substantially parallel to the front surface, has a periphery at least coextensive with the viewing area. A light-emitting source (LES), disposed outside the periphery of the PLG, is optically coupled with a PLG input. The PLG outputs reflected light, in a direction substantially orthogonal to the front surface, by reflecting light received from the LES. A light collecting device (LCD) collects scattered light that results from interaction of the reflected light with a user-controlled object. The LCD redirects the collected scattered light toward one or more light sensors. A processor recognizes, from outputs of the light sensors, an instance of a user gesture, and controls the interactive display and/or electronic device, responsive to the user gesture.

Abstract: Techniques are disclosed for updating an array of display elements of an electronic display. The electronic display, which may be an interferometric modulator (IMOD) display, includes an array of display elements that is updated, at a frame update rate, on a frame by frame basis. Each frame includes data to be written to a plurality of pixel rows, each pixel row including at least a respective first display element line (DEL) of a first color and a respective second DEL of a second color. A processor compares display data for each pixel row in a first frame with display data for a corresponding pixel row in a comparison frame, and updates only selected DEL's based on the comparison. A polarity of a bias voltage of a subset of DEL's in the display, is periodically inverted, the subset of DEL's being substantially fewer than all of the DEL's.

Abstract: This disclosure provides systems, methods and apparatus for mitigating or reducing stiction in electromechanical systems devices. The systems and methods described herein include a piezo-electric layer disposed over at least a portion of the deformable region of the electromechanical systems devices. To reduce or mitigate stiction, a restorative mechanical force is generated by reverse piezo-electric effect to return the deformable region of the electromechanical systems devices to the un-deformed state.

Abstract: This disclosure provides systems, methods and apparatus, including computer programs encoded on computer storage media, for making and using gyroscopes. Some gyroscopes include a drive frame, a central anchor and a plurality of drive beams disposed on opposing sides of the central anchor. The drive beams may connect the drive frame to the central anchor. The drive beams may include a piezoelectric layer and may be configured to cause the drive frame to oscillate torsionally in a plane of the drive beams. The gyroscope may also include a proof mass and a plurality of piezoelectric sense beams. At least some components may be formed from plated metal. The drive frame may be disposed within the proof mass. The drive beams may constrain the drive frame to rotate substantially in the plane of the drive beams. Such devices may be included in a mobile device, such as a mobile display device.

Abstract: This disclosure provides systems, methods, and apparatus related to inductors. In one aspect, a planar inductor may include a substrate with a spacer in the shape of a planar spiral coil on a surface of the substrate. Disposed on the spacer may be a line of metal formed as a planar inductor in the shape of the planar spiral coil. The spacer may be between the line of metal and the surface of the substrate. The spacer may elevate the line of metal above the surface of the substrate.

Abstract: Interferometric modulators may include a movable layer including both permanently anchored and programmable hinges. Unactuated programmable hinges may exert little or no force on the movable layer. When actuated, programmable hinges may exert a mechanical force on the movable layer in a direction approximately opposite to the direction of force exerted by the permanently anchored hinges. By increasing a voltage between the programmable hinges and an electrode, a progressive number of programmable hinges may be engaged. The mechanical force exerted on the movable layer by these hinges may change the relative position of the movable layer within an IMOD device.