Abstract: A method for initially positioning the scanning probe of a scanning probe microscope includes the steps of initially using fine position control to reduce the distance between probe and sample and, if the sample surface is not encountered, reversing the direction of the fine position control to an intermediate position and then using a coarse control in predetermined increments to narrow the distance between the probe and the sample. The fine control is again used and if the sample surface is not encountered, the steps are repeated until the surface is encountered so that the scanning operation can commence.

Abstract: Scanned-probe microscope systems (20, 140) are disclosed with analog control loops (24, 144) that can be electronically programmed to select from a plurality of transfer functions. The amplitude of the control loop reference signal (64) can also be electronically programmed. A controller (26) enables an operator to quickly program these operational characteristics. The controller preferably includes a visual display (33) and a recording device (32) to facilitate the programming and to display and store the scanning data obtained with the selected characteristics.

Abstract: A scanning probe microscope is provided with a piezo-ceramic tube to carry the sensitive probe at its free end to translationally move the probe in the X and Y directions. Large stationary surfaces can then be scanned by probe tip motion. The tube is also capable of movement in the Z direction so that the tip can follow the contours of the surface. Optical detection means track the motion of the probe tip and generate signals corresponding to and representative of surface contours. In one mode of operation, the signals are used in a feed back loop to keep constant the spacing between the tip and the surface, in which case the error or control signals represent the contours.

Abstract: A scanning force microscope is provided with apparatus to modify the light source with a modulation scheme. Information relative to scanning tip motion is included in a modulated light beam which is then demodulated and filtered to recover the information in the form of a signal which corresponds to and is representative of a chosen parameter of tip motion.

Abstract: A scanning probe microscope is provided with a piezo-ceramic tube to carry the sensitive probe at its free end to translationally move the probe in the X and Y directions. Large stationary surfaces can then be scanned by probe tip motion. The tube is also capable of movement in the Z direction so that the tip can follow the contours of the surface. Optical detection means track the motion of the probe tip and generate signals corresponding to and representative of surface contours. In one mode of operation, the signals are used in a feed back loop to keep constant the spacing between the tip and the surface, in which case the error or control signals represent the contours.