Patents Assigned to Quintel Corporation
  • Locking mechanism for use in a chuck for an optical alignment and exposure apparatus
    Patent number: 4278348
    Abstract: A locking device for use in the chuck of an optical alignment and exposure apparatus is disclosed. The locking device comprises a plurality of flat, flexible blades fastened in pairs to a chuck plate in the chuck. Between each pair of blades there is a stationary element fastened to a base member in the chuck. Vacuum cups are fastened to the blades so that the blades are clamped tightly against the stationary element when the vacuum cups are evacuated.
    Type: Grant
    Filed: November 26, 1979
    Date of Patent: July 14, 1981
    Assignee: Quintel Corporation
    Inventors: Ernest J. Funk, Thomas Wing, Jack C. Lane, Edward S. Westbrook, IV