Patents Assigned to QXONIX INC.
  • Patent number: 12255609
    Abstract: Techniques for improving acoustic wave device structures are disclosed, including filters and systems that may include such devices. An acoustic wave device may include a substrate. The acoustic wave device may include first and second layers of piezoelectric material acoustically coupled with one another, in which the first layer of piezoelectric material has a first piezoelectric axis orientation, and the second layer of piezoelectric material has a second piezoelectric axis orientation that substantially opposes the first piezoelectric axis orientation of the first layer of piezoelectric material. The acoustic wave device may include an interposer layer interposed between the first and second layers of piezoelectric material. The interposer may facilitate an enhancement of an electromechanical coupling coefficient of the acoustic wave device.
    Type: Grant
    Filed: December 29, 2021
    Date of Patent: March 18, 2025
    Assignee: QXONIX, INC.
    Inventors: Dariusz Burak, Kevin J. Grannen, Jack Lenell
  • Publication number: 20250088168
    Abstract: Techniques for improving acoustic wave device structures are disclosed, including at least filters and systems that may include such devices. An acoustic wave device may include at least a substrate. The acoustic wave device may include at least a first piezoelectric layer and a second piezoelectric layer and a third piezoelectric layer. The second piezoelectric layer may have a second piezoelectric axis orientation. The third piezoelectric layer may have a third piezoelectric axis orientation that substantially opposes the second piezoelectric axis orientation of the second piezoelectric layer. The acoustic wave device may include an interposer layer coupled between the second piezoelectric layer and the third piezoelectric layer.
    Type: Application
    Filed: November 4, 2024
    Publication date: March 13, 2025
    Applicant: QXONIX INC.
    Inventors: Dariusz Burak, Kevin J. Grannen, Jack Lenell
  • Patent number: 12126319
    Abstract: Techniques for improving Bulk Acoustic Wave (BAW) resonator structures are disclosed, including filters, oscillators and systems that may include such devices. A first layer of doped piezoelectric layer material and a second layer of piezoelectric material may be acoustically coupled with one another to have a piezoelectrically excitable resonance mode. The first layer of doped piezoelectric material may have a first piezoelectric axis orientation, and the second layer of piezoelectric material may have a second piezoelectric axis orientation that substantially opposes the first piezoelectric axis orientation of the first layer of piezoelectric material. An acoustic reflector including a first pair of metal electrode layers may be electrically and acoustically coupled with the first layer of doped piezoelectric material and the second layer of piezoelectric material to excite the piezoelectrically excitable main resonance mode at a resonant frequency.
    Type: Grant
    Filed: December 29, 2021
    Date of Patent: October 22, 2024
    Assignee: QXONIX INC.
    Inventors: Dariusz Burak, Kevin J. Grannen, Jack Lenell
  • Patent number: 12126320
    Abstract: Techniques for improving acoustic wave device structures are disclosed, including filters and systems that may include such devices. An apparatus may comprise a first electrical filter including an acoustic wave device. The first electrical may having a first filter band in a Super High Frequency (SHF) band or an Extremely High Frequency (EHF) band to facilitate compliance with a regulatory requirement or a standards setting organization specification. For example, the first electrical filter may comprise a notch filter having a notch band overlapping at least a portion of an Earth Exploration Satellite Service (EESS) band to facilitate compliance with a regulatory requirement or the standards setting organization specification for the Earth Exploration Satellite Service (EESS) band.
    Type: Grant
    Filed: December 29, 2021
    Date of Patent: October 22, 2024
    Assignee: QXONIX, INC.
    Inventors: Dariusz Burak, Kevin J. Grannen, Jack Lenell
  • Publication number: 20240243719
    Abstract: Techniques for improving acoustic wave devices are disclosed, including filters, oscillators and systems that may include such devices. A first piezoelectric layer having a piezoelectrically excitable resonance mode may be provided. A second piezoelectric layer may also be provided. The first piezoelectric layer and the second piezoelectric layer may have respective thicknesses so that the acoustic wave device has a resonant frequency. A temperature compensating layer may be included. A substrate may be provided.
    Type: Application
    Filed: March 30, 2024
    Publication date: July 18, 2024
    Applicant: QXONIX, INC.
    Inventors: DARIUSZ BURAK, KEVIN J. GRANNEN, JACK LENELL
  • Publication number: 20240146281
    Abstract: Techniques for improving Bulk Acoustic Wave (BAW) resonator structures are disclosed, including filters, oscillators and systems that may include such devices. First and second layers of piezoelectric material may be acoustically coupled with one another to have a piezoelectrically excitable resonance mode. The first layer of piezoelectric material may have a first piezoelectric axis orientation, and the second layer of piezoelectric material may have a second piezoelectric axis orientation that substantially opposes the first piezoelectric axis orientation of the first layer of piezoelectric material. An acoustic reflector electrode may include a first pair of top metal electrode layers electrically and acoustically coupled with the first and second layer of piezoelectric material to excite the piezoelectrically excitable resonance mode at a resonant frequency of the BAW resonator. The acoustic reflector may include a patterned layer.
    Type: Application
    Filed: December 3, 2023
    Publication date: May 2, 2024
    Applicant: Qxonix Inc.
    Inventors: DARIUSZ BURAK, KEVIN J. GRANNEN, JACK LENELL
  • Publication number: 20240136998
    Abstract: Techniques for improving Bulk Acoustic Wave (BAW) mass loading of resonator structures are disclosed, including filters, oscillators and systems that may include such devices. First and second layers of piezoelectric material may be acoustically coupled with one another to have a piezoelectrically excitable resonance mode. The first layer of piezoelectric material may have a first piezoelectric axis orientation, and the second layer of piezoelectric material may have a second piezoelectric axis orientation that substantially opposes the first piezoelectric axis orientation of the first layer of piezoelectric material. An acoustic reflector electrode may include a first pair of top metal electrode layers electrically and acoustically coupled with the first and second layer of piezoelectric material to excite the piezoelectrically excitable resonance mode at a resonant frequency of the BAW resonator.
    Type: Application
    Filed: December 3, 2023
    Publication date: April 25, 2024
    Applicant: Qxonix Inc.
    Inventors: Dariusz Burak, Kevin J. Grannen, Jack Lenell
  • Patent number: 11967940
    Abstract: Techniques for improving Bulk Acoustic Wave (BAW) resonator structures are disclosed, including filters, oscillators and systems that may include such devices. A first layer of piezoelectric material having a piezoelectrically excitable resonance mode may be provided. The first layer of piezoelectric material may have a thickness so that the bulk acoustic wave resonator has a resonant frequency. The first layer of piezoelectric material may include a first pair of sublayers of piezoelectric material, and a first layer of temperature compensating material. A substrate may be provided.
    Type: Grant
    Filed: December 29, 2021
    Date of Patent: April 23, 2024
    Assignee: Qxonix Inc.
    Inventors: Dariusz Burak, Kevin J. Grannen, Jack Lenell
  • Publication number: 20240106411
    Abstract: Techniques for improving acoustic wave device structures are disclosed, including filters, oscillators and systems that may include such devices. First and second layers of piezoelectric material may be acoustically coupled with one another to have a piezoelectrically excitable resonance mode. The first layer of piezoelectric material may have a first piezoelectric axis orientation, and the second layer of piezoelectric material may have a second piezoelectric axis orientation that substantially opposes the first piezoelectric axis orientation of the first layer of piezoelectric material. The first and second layers of piezoelectric material have respective thicknesses so that the acoustic wave device has a resonant frequency that is in a super high frequency band or an extremely high frequency band.
    Type: Application
    Filed: December 3, 2023
    Publication date: March 28, 2024
    Applicant: Qxonix Inc.
    Inventors: Dariusz Burak, Kevin J. Grannen, Jack Lenell
  • Publication number: 20240097644
    Abstract: Techniques for improving Bulk Acoustic Wave (BAW) resonator structures are disclosed, including fluidic systems, oscillators and systems that may include such devices. A bulk acoustic wave (BAW) resonator may comprise a substrate and a first layer of piezoelectric material. The bulk acoustic wave (BAW) resonator may comprise a top electrode. A sensing region may be acoustically coupled with the top electrode of the bulk acoustic wave (BAW) resonator.
    Type: Application
    Filed: December 3, 2023
    Publication date: March 21, 2024
    Applicant: Qxonix Inc.
    Inventors: Dariusz Burak, Kevin J. Grannen, Jack Lenell
  • Patent number: 11936360
    Abstract: Techniques for improving Bulk Acoustic Wave (BAW) mass loading of resonator structures are disclosed, including filters, oscillators and systems that may include such devices. First and second layers of piezoelectric material may be acoustically coupled with one another to have a piezoelectrically excitable resonance mode. The first layer of piezoelectric material may have a first piezoelectric axis orientation, and the second layer of piezoelectric material may have a second piezoelectric axis orientation that substantially opposes the first piezoelectric axis orientation of the first layer of piezoelectric material. An acoustic reflector electrode may include a first pair of top metal electrode layers electrically and acoustically coupled with the first and second layer of piezoelectric material to excite the piezoelectrically excitable resonance mode at a resonant frequency of the BAW resonator.
    Type: Grant
    Filed: December 29, 2021
    Date of Patent: March 19, 2024
    Assignee: Qxonix Inc.
    Inventors: Dariusz Burak, Kevin J. Grannen, Jack Lenell
  • Patent number: 11870416
    Abstract: Techniques for improving Bulk Acoustic Wave (BAW) resonator structures are disclosed, including filters, oscillators and systems that may include such devices. First and second layers of piezoelectric material may be acoustically coupled with one another to have a piezoelectrically excitable resonance mode. The first layer of piezoelectric material may have a first piezoelectric axis orientation, and the second layer of piezoelectric material may have a second piezoelectric axis orientation that substantially opposes the first piezoelectric axis orientation of the first layer of piezoelectric material. An acoustic reflector electrode may include a first pair of top metal electrode layers electrically and acoustically coupled with the first and second layer of piezoelectric material to excite the piezoelectrically excitable resonance mode at a resonant frequency of the BAW resonator. The acoustic reflector may include a patterned layer.
    Type: Grant
    Filed: December 29, 2021
    Date of Patent: January 9, 2024
    Assignee: Qxonix Inc.
    Inventors: Dariusz Burak, Kevin J. Grannen, Jack Lenell
  • Patent number: 11870415
    Abstract: Techniques for improving acoustic wave device structures are disclosed, including filters, oscillators and systems that may include such devices. First and second layers of piezoelectric material may be acoustically coupled with one another to have a piezoelectrically excitable resonance mode. The first layer of piezoelectric material may have a first piezoelectric axis orientation, and the second layer of piezoelectric material may have a second piezoelectric axis orientation that substantially opposes the first piezoelectric axis orientation of the first layer of piezoelectric material. The first and second layers of piezoelectric material have respective thicknesses so that the acoustic wave device has a resonant frequency that is in a super high frequency band or an extremely high frequency band.
    Type: Grant
    Filed: December 29, 2021
    Date of Patent: January 9, 2024
    Assignee: Qxonix Inc.
    Inventors: Dariusz Burak, Kevin J. Grannen, Jack Lenell
  • Patent number: 11863153
    Abstract: Techniques for improving Bulk Acoustic Wave (BAW) resonator structures are disclosed, including fluidic systems, oscillators and systems that may include such devices. A bulk acoustic wave (BAW) resonator may comprise a substrate and a first layer of piezoelectric material. The bulk acoustic wave (BAW) resonator may comprise a top electrode. A sensing region may be acoustically coupled with the top electrode of the bulk acoustic wave (BAW) resonator.
    Type: Grant
    Filed: July 20, 2021
    Date of Patent: January 2, 2024
    Assignee: Qxonix Inc.
    Inventors: Dariusz Burak, Kevin J. Grannen, Jack Lenell
  • Patent number: 11545956
    Abstract: Techniques for improving Bulk Acoustic Wave (BAW) resonator structures are disclosed, including filters, oscillators and systems that may include such devices. First and second layers of piezoelectric material may be acoustically coupled with one another to have a piezoelectrically excitable resonance mode. The first layer of piezoelectric material may have a first piezoelectric axis orientation, and the second layer of piezoelectric material may have a second piezoelectric axis orientation that opposes the first piezoelectric axis orientation of the first layer of piezoelectric material. A top acoustic reflector including a first pair of top metal electrode layers may be electrically and acoustically coupled with the first layer of piezoelectric material to excite the piezoelectrically excitable main resonance mode at a resonant frequency.
    Type: Grant
    Filed: December 29, 2021
    Date of Patent: January 3, 2023
    Assignee: QXONIX, INC.
    Inventors: Dariusz Burak, Kevin J. Grannen, Jack Lenell
  • Publication number: 20220140806
    Abstract: Techniques for improving Bulk Acoustic Wave (BAW) reflector and resonator structures are disclosed, including filters, oscillators and systems that may include such devices. A bulk acoustic wave (BAW) resonator may comprise a substrate and a first layer of piezoelectric material having a first piezoelectric axis orientation. The bulk acoustic wave (BAW) resonator may comprise a multi-layer acoustic reflector, e.g., a multi-layer metal top acoustic reflector electrode, including a first pair of top metal electrode layers. The first pair of top metal electrode layers may be electrically and acoustically coupled with the first layer of piezoelectric material to excite a piezoelectrically excitable resonance mode at a resonant frequency of the BAW resonator.
    Type: Application
    Filed: December 29, 2021
    Publication date: May 5, 2022
    Applicant: QXONIX, INC.
    Inventors: DARIUSZ BURAK, KEVIN J. GRANNEN, JACK LENELL
  • Patent number: 11101783
    Abstract: Techniques for improving Bulk Acoustic Wave (BAW) resonator structures are disclosed, including fluidic systems, oscillators and systems that may include such devices. A bulk acoustic wave (BAW) resonator may comprise a substrate and a first layer of piezoelectric material. The bulk acoustic wave (BAW) resonator may comprise a top electrode. A sensing region may be acoustically coupled with the top electrode of the bulk acoustic wave (BAW) resonator.
    Type: Grant
    Filed: July 27, 2020
    Date of Patent: August 24, 2021
    Assignee: QXONIX INC.
    Inventors: Dariusz Burak, Kevin J. Grannen, Jack Lenell