Abstract: A reticle assembly includes a reticle with a reticle plate. A radio frequency device is positioned on the reticle for providing information regarding the reticle to a reader by radio frequency.

Abstract: An extendable arm for placing and moving items includes a base and an arm unit movably mounted to the base. The arm unit is configured for linear movement in a first direction relative to the arm unit for extending beyond the base in the first direction and for linear movement in a second direction relative to the arm unit which is opposite to the first direction for extending beyond the base in the second direction.

Abstract: A reticle assembly includes a reticle with a reticle plate. A radio frequency device is positioned on the reticle for providing information regarding the reticle to a reader by radio frequency.

Abstract: A reticle storage system includes a reticle rack having a series of lateral slots, each for storing a reticle. Access to the reticles is provided on a lateral side of the rack. The enclosure has a series of doors for providing access to the reticles in the slots. An air circulation system flows filtered air past the reticles in the rack to prevent contaminants from accumulating on the reticles. The air circulation system is capable of providing positive air pressure within the enclosure with one door open, thereby preventing contaminants from entering the enclosure through the open door.

Abstract: A reticle storage system includes a reticle rack having a series of lateral slots, each for storing a reticle. Access to the reticles is provided on a lateral side of the rack. The enclosure has a series of doors for providing access to the reticles in the slots. An air circulation system flows filtered air past the reticles in the rack to prevent contaminants from accumulating on the reticles. The air circulation system is capable of providing positive air pressure within the enclosure with one door open, thereby preventing contaminants from entering the enclosure through the open door.

Abstract: A reticle storage system includes a reticle rack having a series of lateral slots, each for storing a reticle. Access to the reticles is provided on a lateral side of the rack. The enclosure has a series of doors for providing access to the reticles in the slots. An air circulation system flows filtered air past the reticles in the rack to prevent contaminants from accumulating on the reticles. The air circulation system is capable of providing positive air pressure within the enclosure with one door open, thereby preventing contaminants from entering the enclosure through the open door.