Patents Assigned to R3T Rapid Reactive Radicals Technology
  • Device to generate excited/ionized particles in a plasma
    Patent number: 6706141
    Abstract: A device to generate excited and/or ionized particles in plasma with a generator to generate an electromagnetic wave and at least one plasma zone, in which the excited and/or ionized particles are formed by the electromagnetic wave. The plasma zone is formed in an interior chamber of a conductor for the electromagnetic wave.
    Type: Grant
    Filed: July 21, 2000
    Date of Patent: March 16, 2004
    Assignee: R3T Rapid Reactive Radicals Technology
    Inventors: Heinz Steinhardt, Alexander Gschwandtner, Josef Mathuni