Patents Assigned to Ratoc Systems Engineering Co., LTD
  • Patent number: 6124926
    Abstract: A defect detecting method and a defect detecting device are provided. An image is formed by scattered light and emitted light from a specimen when a laser beam enters the specimen, and the image is then divided into a plurality of images of different wavelength bands, so that defects can be detected from the plurality of picked up images. Also, scattered light and emitted light incident upon a single objective lens system are divided into a plurality of different wavelength bands and picked up as a plurality of images. The plurality of images of the plurality of different wavelength bands are then combined and displayed in different colors.
    Type: Grant
    Filed: January 26, 1999
    Date of Patent: September 26, 2000
    Assignees: Ratoc Systems Engineering Co., LTD, Japan Science and Technology Corporation
    Inventors: Tomoya Ogawa, Nobuhito Nango