Abstract: The present invention provides an electrode pattern structure of a concentric-circular-structured electrostatic chuck, and is related to the field of semiconductor and material science. An electrode unit of an electrostatic chuck is divided into a plurality of size-reduced electrode arc-bands, and by means of arrangement of inter-ring connection openings of the size-reduced electrode arc-bands, the electrodes of the entire electrostatic chuck can be divided into any desired number of electrodes. In the electrode pattern structure of the concentric-circular-structured electrostatic chuck, the electrostatic chuck electrode of such a structure can, on the one hand, minimize division units to be advantageous for reduction of residual thermal stress, and on the other hand, avoid generation of isolated electrode during the process of dividing. This is an electrostatic chuck electrode that has excellent symmetry and has a uniform and simple structure.

Abstract: Disclosed are a multi-layer composite ceramic plate and a manufacturing method thereof. The composite ceramic plate includes at least one basic sandwich structure.

Abstract: The present invention provides an electrode pattern structure of a concentric-circular-structured electrostatic chuck, and is related to the field of semiconductor and material science. An electrode unit of an electrostatic chuck is divided into a plurality of size-reduced electrode arc-bands, and by means of arrangement of inter-ring connection openings of the size-reduced electrode arc-bands, the electrodes of the entire electrostatic chuck can be divided into any desired number of electrodes. In the electrode pattern structure of the concentric-circular-structured electrostatic chuck, the electrostatic chuck electrode of such a structure can, on the one hand, minimize division units to be advantageous for reduction of residual thermal stress, and on the other hand, avoid generation of isolated electrode during the process of dividing. This is an electrostatic chuck electrode that has excellent symmetry and has a uniform and simple structure.

Abstract: Disclosed are a multi-layer composite ceramic plate and a manufacturing method thereof. The composite ceramic plate includes at least one basic sandwich structure.