Abstract: The digital laser image recorder includes a data manipulation and control system which may provide digital data to a digital light source for conversion to an analog modulated light beam. A scanner may also be provided to direct the light beam toward a writing surface which may be disposed on the interior of a rotatable cylinder. A film handling device operable to deliver sheet film to the writing surface may also deliver sheet film from the writing surface to an associated output tray after writing. In another embodiment, beam shaping optics may be provided to convert the analog modulated light beams to collimated beams of a predetermined size and circular distribution. The beam shaping optics may also incorporate a power control filter to control the intensity of the collimated beams. In yet another embodiment, a shutter may be provided.

Abstract: A method for vacuum packaging MEMS or similar devices during device fabrication comprises forming a plurality of MEMS devices (12), or similar devices, on a device wafer (10). A device sealing ring (16) is formed between the MEMS devices (12) and bonding pads (14) connected to a MEMS device. A solder adhesion layer (24) forms part of the device sealing ring (16) surrounding each MEMS or similar device (12). A lid wafer (30) is formed having a plurality of lid sealing rings (32) corresponding in number and location to the device sealing rings (16). Each lid sealing ring (32) surrounds a cavity (34). The device wafer (30) is aligned with the lid wafer (10) to align each device sealing ring (16) with the corresponding lid sealing ring (32), leaving a gap between the lid wafer (30) and the device wafer (10). The resulting assembly (50) is placed in a vacuum furnace.