Patents Assigned to REC Silicon Inc.
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Patent number: 11117112Abstract: A method of controlling particle additions to a fluidized bed reactor includes measuring pressure fluctuations inside the fluidized bed reactor over a selected time period, determining a pressure parameter indicative of amplitudes of the pressure fluctuations, comparing the pressure parameter to a specified threshold, and controlling particle additions to the fluidized bed reactor when the pressure parameter deviates from the specified threshold.Type: GrantFiled: March 27, 2020Date of Patent: September 14, 2021Assignee: REC Silicon IncInventors: Kahl Brown, Matthew J. Miller, Benjamin Center, Gerald A. Zeininger, Stein Julsrud
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Publication number: 20200240013Abstract: An apparatus for producing particles or material-coated particles by decomposition of precursor gas in a stirred or mixed particle bed comprises a reactor vessel, an actuator assembly comprising a shaft disposed at least partially within the reactor vessel, and an actuator element coupled to the shaft and rotatable therewith. The apparatus further comprises a precursor gas supply in fluid communication with the actuator assembly. The actuator assembly is configured to circulate seed particles of a seed particle bed in the reactor vessel with the actuator element, and to introduce precursor gas from the gas supply to the seed particle bed, when seed particles are received in the reactor vessel.Type: ApplicationFiled: January 16, 2020Publication date: July 30, 2020Applicant: REC Silicon IncInventor: Robert J. Geertsen
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Publication number: 20200048007Abstract: A feeder operable to convey a divided solids material comprises a conduit and an actuator. The conduit has a hollow body with a length, a first end, a second end opposite the first end and a displaceable body segment defined along at least a portion of the length. The displaceable body segment has at least a first fixable location positionable at a first fixed location. The actuator is positioned to apply force to the conduit and is controllable to cause selected flow of divided solids material in a feed direction extending generally from the first end to the second end. Methods are also disclosed.Type: ApplicationFiled: October 19, 2017Publication date: February 13, 2020Applicant: REC Silicon IncInventor: Robert J. Geertsen
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Patent number: 10407310Abstract: This disclosure concerns embodiments of an annealing device and a method for annealing flowable, finely divided solids, such as annealing granular silicon to reduce a hydrogen content of the granular silicon. The annealing device comprises at least one tube through which flowable, finely divided solids are flowed downwardly. The tube includes a heating zone and (i) a residence zone below the heating zone, (ii) a cooling zone below the heating zone, or (iii) a residence zone below the heating zone and a cooling zone below the residence zone. An inert gas is flowed upwardly through the tube. The tube may be constructed from two or more tube segments. The annealing device may include a plurality of tubes arranged and housed within a shell. The annealing device and method are suitable for a continuous process.Type: GrantFiled: January 26, 2017Date of Patent: September 10, 2019Assignee: REC Silicon IncInventors: Robert J. Geertsen, Matthew J. Miller, Justin Johnston, Stein Julsrud, Sefa Yilmaz
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Publication number: 20190145004Abstract: Embodiments of a reflective surface and a reflector comprising a reflective surface for use in a thermal decomposition reactor are disclosed. Methods for using the reflective surface, or reflector comprising the reflective surface, to manage a temperature profile in a silicon rod grown in the thermal decomposition reactor are also disclosed. The reflective surface is configured to receive radiant heat energy emitted from an energy emitting region of an elongated polysilicon body grown during chemical vapor deposition onto a silicon filament and reflect at least a portion of the received radiant heat energy to a reflected energy receiving region of the elongated polysilicon body or to a reflected energy receiving region of a second elongated polysilicon body, to thereby add radiant heat energy to the reflected energy receiving region.Type: ApplicationFiled: January 14, 2019Publication date: May 16, 2019Applicant: REC Silicon IncInventors: Timothy Troutman, Bryan J. Loushin, Joe Ruschetti
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Patent number: 10287171Abstract: Methods and apparatus for separating polysilicon powder from a mixture of granular polysilicon and polysilicon powder are disclosed. The method includes tumbling the polysilicon material in a tumbling device while flowing humidified sweep gas through the tumbling device. Also disclosed are compositions including granulate polysilicon or polycrystalline silicon, in some examples, including a coating layer consisting essentially of water.Type: GrantFiled: May 5, 2016Date of Patent: May 14, 2019Assignee: REC Silicon IncInventor: Robert J. Geertsen
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Patent number: 10208381Abstract: Embodiments of a reflective surface and a reflector comprising a reflective surface for use in a thermal decomposition reactor are disclosed. Methods for using the reflective surface, or reflector comprising the reflective surface, to manage a temperature profile in a silicon rod grown in the thermal decomposition reactor are also disclosed. The reflective surface is configured to receive radiant heat energy emitted from an energy emitting region of an elongated polysilicon body grown during chemical vapor deposition onto a silicon filament and reflect at least a portion of the received radiant heat energy to a reflected energy receiving region of the elongated polysilicon body or to a reflected energy receiving region of a second elongated polysilicon body, to thereby add radiant heat energy to the reflected energy receiving region.Type: GrantFiled: December 28, 2015Date of Patent: February 19, 2019Assignee: REC Silicon IncInventors: Timothy Troutman, Bryan J. Loushin, Joe Ruschetti
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Patent number: 10040637Abstract: An oscillatory feeder operable to convey a flowable solid material has a tubular body and a displaceable body segment. The tubular body has at least one first end, at least one second end opposite the first end and a displaceable body segment between the first and second ends. The displaceable body segment has a first fixable location positionable at a first fixed location and a second fixable location positionable at a second fixed location. The actuator is attached to the displaceable body segment and controllable to cause selected displacement of the body segment and attached actuator and corresponding selected flow of solid material within the displaceable body segment in a feed direction extending generally from the first end to the second end.Type: GrantFiled: October 25, 2016Date of Patent: August 7, 2018Assignee: REC Silicon IncInventor: Robert J. Geertsen
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Publication number: 20180208470Abstract: This disclosure concerns embodiments of an annealing device and a method for annealing flowable, finely divided solids, such as annealing granular silicon to reduce a hydrogen content of the granular silicon. The annealing device comprises at least one tube through which flowable, finely divided solids are flowed downwardly. The tube includes a heating zone and (i) a residence zone below the heating zone, (ii) a cooling zone below the heating zone, or (iii) a residence zone below the heating zone and a cooling zone below the residence zone. An inert gas is flowed upwardly through the tube. The tube may be constructed from two or more tube segments. The annealing device may include a plurality of tubes arranged and housed within a shell. The annealing device and method are suitable for a continuous process.Type: ApplicationFiled: January 26, 2017Publication date: July 26, 2018Applicant: REC Silicon IncInventors: Matthew J. Miller, Robert J. Geertsen, Justin Johnston, Stein Julsrud, Sefa Yilmaz
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Publication number: 20180213603Abstract: This disclosure concerns embodiments of an annealing device and a method for annealing granular silicon to reduce a hydrogen content of the granular silicon. The annealing device comprises at least one tube through which granular silicon is flowed downwardly. The tube includes a heating zone and (i) a residence zone below the heating zone, (ii) a cooling zone below the heating zone, or (iii) a residence zone below the heating zone and a cooling zone below the residence zone. An inert gas is flowed upwardly through the tube. The tube may be constructed from two or more tube segments. The annealing device may include a plurality of tubes arranged in parallel and housed within a shell. The annealing device and method are suitable for a continuous process.Type: ApplicationFiled: January 26, 2017Publication date: July 26, 2018Applicant: REC Silicon IncInventors: Matthew J. Miller, Robert J. Geertsen, Stein Julsrud, Sefa Yilmaz, Raymond Desbordes
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Publication number: 20180208472Abstract: This disclosure concerns embodiments of an annealing device and a method for annealing granular silicon to reduce a hydrogen content of the granular silicon. The annealing device comprises at least one tube through which granular silicon is flowed downwardly. The tube includes a heating zone and (i) a residence zone below the heating zone, (ii) a cooling zone below the heating zone, or (iii) a residence zone below the heating zone and a cooling zone below the residence zone. An inert gas is flowed upwardly through the tube. The tube may be constructed from two or more tube segments. The annealing device may include a plurality of tubes arranged in parallel and housed within a shell. The annealing device and method are suitable for a continuous process.Type: ApplicationFiled: January 26, 2017Publication date: July 26, 2018Applicant: REC Silicon IncInventors: Robert J. Geertsen, Matthew J. Miller, Justin Johnston, Sefa Yilmaz, Stein Julsrud
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Publication number: 20180208471Abstract: This disclosure concerns embodiments of an annealing device and a method for annealing flowable, finely divided solids, such as annealing granular silicon to reduce a hydrogen content of the granular silicon. The annealing device comprises at least one tube through which flowable, finely divided solids are flowed downwardly. The tube includes a heating zone and (i) a residence zone below the heating zone, (ii) a cooling zone below the heating zone, or (iii) a residence zone below the heating zone and a cooling zone below the residence zone. An inert gas is flowed upwardly through the tube. The tube may be constructed from two or more tube segments. The annealing device may include a plurality of tubes arranged and housed within a shell. The annealing device and method are suitable for a continuous process.Type: ApplicationFiled: January 26, 2017Publication date: July 26, 2018Applicant: REC Silicon IncInventors: Robert J. Geertsen, Matthew J. Miller, Justin Johnston, Stein Julsrud, Sefa Yilmaz
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Publication number: 20180126352Abstract: Reaction chamber liners for use in a fluidized bed reactor for production of polysilicon-coated granulate material are disclosed. The liners include an aperture and a cavity configured to receive a reactor component, such as a probe, a sensor, a nozzle, a feed line, a sampling line, a heating/cooling component, or the like. In some embodiments, the liner is a segmented liner comprised of vertically stacked or laterally joined segments, wherein at least one segment includes an aperture and a cavity configured to receive a reactor component.Type: ApplicationFiled: November 9, 2016Publication date: May 10, 2018Applicant: REC Silicon IncInventor: Matthew J. Miller
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Patent number: 9962672Abstract: Reaction chamber liners for use in a fluidized bed reactor for production of polysilicon-coated granulate material are disclosed. The liners include an aperture and a cavity configured to receive a reactor component, such as a probe, a sensor, a nozzle, a feed line, a sampling line, a heating/cooling component, or the like. In some embodiments, the liner is a segmented liner comprised of vertically stacked or laterally joined segments, wherein at least one segment includes an aperture and a cavity configured to receive a reactor component.Type: GrantFiled: November 9, 2016Date of Patent: May 8, 2018Assignee: REC Silicon IncInventor: Matthew J. Miller
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Publication number: 20180111764Abstract: An oscillatory feeder operable to convey a flowable solid material has a tubular body and a displaceable body segment. The tubular body has at least one first end, at least one second end opposite the first end and a displaceable body segment between the first and second ends. The displaceable body segment has a first fixable location positionable at a first fixed location and a second fixable location positionable at a second fixed location. The actuator is attached to the displaceable body segment and controllable to cause selected displacement of the body segment and attached actuator and corresponding selected flow of solid material within the displaceable body segment in a feed direction extending generally from the first end to the second end.Type: ApplicationFiled: October 25, 2016Publication date: April 26, 2018Applicant: REC Silicon IncInventor: Robert J. Geertsen
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Patent number: 9695052Abstract: Methods of recovering hydrohalosilanes from reaction residues are disclosed. An inorganic halosilane slurry comprising (i) tetrahalosilane, trihalosilane, dihalosilane, or any combination thereof, (ii) silicon particles, and (iii) heavies is passed through a thin-film dryer to remove halosilanes and form a solid residue comprising silicon particles. Heavies also may be removed as the slurry passes through the thin-film dryer.Type: GrantFiled: July 1, 2014Date of Patent: July 4, 2017Assignee: REC Silicon IncInventors: Pei Yoong Koh, Anthony D. Thompson
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Patent number: 9682404Abstract: Fine particulate material is separated from a mixture of coarse particulate material and fine particulate material by passing sweep gas through the chamber of a rotating tumbler drum that contains an introduced material that is a mixture of coarse particulate material and fine particulate material. In particular, polysilicon powder may be separated from granular polysilicon. Seals are present, at locations where gas-conveying parts of the apparatus move relative to one another, to block the escape of sweep gas to the atmosphere surrounding the apparatus. A downstream seal extends between a stationary exhaust duct and an exhaust tube that rotates with the tumbler drum. The seal is protected by a flow of clean flush gas that is delivered to a gap between the exhaust duct and the exhaust tube.Type: GrantFiled: May 5, 2016Date of Patent: June 20, 2017Assignee: REC Silicon IncInventor: Robert J. Geertsen
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Patent number: 9662628Abstract: Segmented silicon carbide liners for use in a fluidized bed reactor for production of polysilicon-coated granulate material are disclosed, as well as methods of making and using the segmented silicon carbide liners. Non-contaminating bonding materials for joining silicon carbide segments also are disclosed. One or more of the silicon carbide segments may be constructed of reaction-bonded silicon carbide.Type: GrantFiled: August 15, 2014Date of Patent: May 30, 2017Assignee: REC SILICON INCInventors: Sefa Yilmaz, Matthew J. Miller, Michael V. Spangler, Barry Wemp, Stein Julsrud
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Patent number: 9587993Abstract: Embodiments of a probe assembly for a fluid bed reactor are disclosed. The probe assembly includes a fluid bed reactor (FBR) member, and a pressure tap comprising a wall defining a passageway within which the FBR member is located. Exemplary FBR members include, but are not limited to, a thermocouple, a seed pipe, a particle sampling line, a gas sampling line, a gas feed line, a heater, a second pressure tap, or a combination thereof. Disclosed embodiments of the probe assembly reduce or eliminate the need for support rods and rings within the fluid bed reactor, reduce component fouling within the reactor, and/or reduce product contamination.Type: GrantFiled: November 6, 2012Date of Patent: March 7, 2017Assignee: REC Silicon IncInventors: Matthew Miller, Michael V. Spangler, Barry Wemp, E. Wayne Osborne
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Patent number: 9580327Abstract: Apparatus and methods for consolidating granular silicon and determining trace elements content of the consolidated silicon are disclosed. Silicon granules are placed in a vessel, and a silicon slug of known purity is embedded at least partially in the granules. The slug is preheated to a temperature sufficient to couple with an induction heater. As the silicon slug melts, silicon granules adjacent the molten silicon also melt. The vessel passes through an induction coil to successively inductively heat and melt regions of the silicon granules from the leading end to the trailing end with each region solidifying as the molten silicon exits the induction coil to provide a multicrystalline silicon ingot. The multicrystalline silicon ingot is sliced into wafers, which are analyzed by low-temperature Fourier transform infrared spectroscopy to determine levels of trace elements in the ingot.Type: GrantFiled: February 11, 2014Date of Patent: February 28, 2017Assignee: REC Silicon IncInventors: Sefa Yilmaz, Theodore F. Ciszek, Matthew J. Miller, Stein Julsrud