Patents Assigned to REFLECTIVITY, INC., a California corporation
  • Publication number: 20040233505
    Abstract: A MEMS device is disclosed comprising: a substrate; a movable micromechanical element movable relative to the substrate; a connector and a hinge for allowing movement of the micromechanical element, wherein the connector is made of a material different than the hinge. In another embodiment of the invention, the connector has a conductivity greater than the hinge. In a further embodiment of the invention, the hinge provides at least 90% of the restoring force to the MEMS device, and the connector provides 10% or less of the restoring force. In a further embodiment of the invention, the connector and the hinge have different spring constants. In a still further embodiment of the invention, the connector experiences a lower strain at maximum deflection of the micromechanical element than the hinge.
    Type: Application
    Filed: January 15, 2003
    Publication date: November 25, 2004
    Applicant: REFLECTIVITY, INC., a California corporation
    Inventors: Andrew G. Huibers, Satyadev R. Patel
  • Publication number: 20040100677
    Abstract: A projection system, a spatial light modulator, and a method for forming a micromirror array such as for a projection display are disclosed. The spatial light modulator can have two substrates bonded together with one of the substrates comprising a micro-mirror array. The two substrates can be bonded at the wafer level after depositing a getter material and/or solid or liquid lubricant on one or both of the wafers if desired. In one embodiment of the invention, one of the substrates is a light transmissive substrate and a light absorbing layer is provided on the light transmissive substrate to selectively block light from passing through the substrate. The light absorbing layer can form a pattern, such as a frame around an array of micro-mirrors.
    Type: Application
    Filed: November 26, 2002
    Publication date: May 27, 2004
    Applicant: REFLECTIVITY, INC., a California corporation
    Inventors: Andrew G. Huibers, Satyadev R. Patel
  • Publication number: 20040100594
    Abstract: A projection system, a spatial light modulator, and a method for forming micromirrors are disclosed. A substrate comprises circuitry and electrodes for electrostatically deflecting micromirror elements that are disposed within an array of such elements forming the spatial light modulator. In one embodiment, the substrate is a silicon substrate having circuitry and electrodes thereon for electrostatically actuating adjacent micromirror elements, and the substrate is fully or selectively covered with a light absorbing material.
    Type: Application
    Filed: November 26, 2002
    Publication date: May 27, 2004
    Applicant: REFLECTIVITY, INC., a California corporation
    Inventors: Andrew G. Huibers, Peter W. Richards
  • Publication number: 20040100680
    Abstract: A projection system, a spatial light modulator, and a method for forming micromirrors are disclosed. A substrate comprises circuitry and electrodes for electrostatically deflecting micromirror elements that are disposed within an array of such elements forming the spatial light modulator. In one embodiment, the substrate is a silicon substrate having circuitry and electrodes thereon for electrostatically actuating adjacent micromirror elements, and the substrate is fully or selectively covered with a light absorbing material.
    Type: Application
    Filed: November 26, 2002
    Publication date: May 27, 2004
    Applicant: REFLECTIVITY, INC., California corporation
    Inventors: Andrew G. Huibers, Satyadev R. Patel, Robert M. Duboc
  • Publication number: 20040069747
    Abstract: Processes for the removal of a layer or region from a workpiece material by contact with a process gas in the manufacture of a microstructure are enhanced by the ability to accurately determine the endpoint of the removal step. A vapor phase etchant is used to remove a material that has been deposited on a substrate, with or without other deposited structure thereon. By creating an impedance at the exit of an etching chamber (or downstream thereof), as the vapor phase etchant passes from the etching chamber, a gaseous product of the etching reaction is monitored, and the endpoint of the removal process can be determined.
    Type: Application
    Filed: October 11, 2002
    Publication date: April 15, 2004
    Applicant: REFLECTIVITY, INC., a California corporation
    Inventors: Satyadev R. Patel, Gregory P. Schaadt, Douglas B. MacDonald, Niles K. MacDonald, Hongqin Shi
  • Publication number: 20040012838
    Abstract: A projection system, a spatial light modulator, and a method for forming a MEMS device are disclosed. The spatial light modulator can have two substrates bonded together with one of the substrates comprising a micro-mirror array. The two substrates can be bonded at the wafer level after depositing a getter material and/or solid or liquid lubricant on one or both of the wafers if desired. In one embodiment of the invention, one of the substrates is a light transmissive substrate and a light blocking layer that is preferably a light absorbing layer is provided on the light transmissive substrate to selectively block light from passing through the substrate. The light blocking layer can be formed as a pattern, such as a grid or strips for blocking light from entering gaps between adjacent micro-mirrors.
    Type: Application
    Filed: November 26, 2002
    Publication date: January 22, 2004
    Applicant: REFLECTIVITY, INC., a California corporation
    Inventor: Andrew G. Huibers
  • Publication number: 20030137501
    Abstract: A voltage storage cell circuit includes an access transistor and a storage capacitor, wherein the source of said access transistor is connected to a bitline, the gate of said access transistor is connected to a wordline, and wherein the drain of said access transistor is connected to a first plate of said storage capacitor forming a storage node, and wherein the second plate of said storage capacitor is connected to a pump signal. This arrangement allows for a novel pixel circuit design with area requirements comparable to that of a 1T1C DRAM-like pixel cell, but with the advantage of an output voltage swing of the full range allowed by the breakdown voltage of the pass transistor. A spatial light modulator such as a micromirror array can comprise such a voltage storage cell.
    Type: Application
    Filed: January 10, 2003
    Publication date: July 24, 2003
    Applicant: REFLECTIVITY, INC., a California corporation
    Inventor: Peter W. Richards
  • Publication number: 20030134449
    Abstract: A method for making a MEMS device comprises forming a plurality of micromechanical elements on a first substrate; forming circuitry and electrodes on a second substrate, the first and second substrates extending in a plane in X and Y directions; aligning the first and second substrates in the X and Y directions and moving the substrates toward each other in a Z direction and bonding the first and second substrates with a gap therebetween in the Z direction to form an assembly; singulating the assembly into assembly portions; and altering the gap for each assembly portion. Another embodiment involves aligning the first and second substrates in the X and Y directions and moving the substrates toward each other in a Z direction and bonding the first and second substrates with a gap therebetween in the Z direction to form an assembly; actuating and testing the micromechanical elements of the assembly; and altering the gap for each assembly.
    Type: Application
    Filed: January 7, 2003
    Publication date: July 17, 2003
    Applicant: REFLECTIVITY, INC., a California Corporation
    Inventor: Andrew G. Huibers
  • Publication number: 20030073302
    Abstract: Processes are disclosed for forming integrated circuit devices where multilayered structures are formed having between layers a removable silicon material. The layers adjacent the removable silicon can be either conducting or insulating or both. After forming one or more layers with the removable silicon therebetween, the silicon is removed so as to provide for an air-gap dielectric. In one embodiment, adjacent layers are copper. Between the copper and removable silicon can be a barrier layer, such as a transition metal-silicon-nitride layer. In a preferred embodiment, the removable silicon is removed with a gas phase interhalogen or noble gas halide.
    Type: Application
    Filed: October 11, 2002
    Publication date: April 17, 2003
    Applicant: REFLECTIVITY, INC., a California corporation
    Inventor: Andrew G. Huibers
  • Publication number: 20030054588
    Abstract: A method for forming a MEMS device is disclosed, where a final release step is performed just prior to a wafer bonding step to protect the MEMS device from contamination, physical contact, or other deleterious external events. Without additional changes to the MEMS structure between release and wafer bonding and singulation, except for an optional stiction treatment, the MEMS device is best protected and overall process flow is improved. The method is applicable to the production of any MEMS device and is particularly beneficial in the making of fragile micromirrors.
    Type: Application
    Filed: December 3, 2001
    Publication date: March 20, 2003
    Applicant: REFLECTIVITY, INC., a California corporation
    Inventors: Satyadev R. Patel, Andrew G. Huibers, Steven S. Chiang
  • Publication number: 20030047533
    Abstract: A method comprises depositing an organic material on a substrate; depositing additional material different from the organic material after depositing the organic material; and removing the organic material with a compressed fluid. Also disclosed is a method comprising: providing an organic layer on a substrate; after providing the organic layer, providing one or more layers of a material different than the organic material of the organic layer; removing the organic layer with a compressed fluid; and providing an anti-stiction agent with a compressed fluid to material remaining after removal of the organic layer.
    Type: Application
    Filed: June 10, 2002
    Publication date: March 13, 2003
    Applicant: REFLECTIVITY, INC., a California corporation
    Inventors: Jason S. Reid, Nungavaram S. Viswanathan
  • Publication number: 20020109821
    Abstract: A projection system is disclosed that has a light source of multiple wavelengths, a spatial light modulator and projection optics for projecting an image to be viewed by a viewer or to be displayed on a target. Also provided are one or more color sequencing devices which filter the light multiple times. Whether a single or plural color sequencing elements are provided, a single light beam passes at least twice through a sequence of light filters. In one embodiment, two color wheels provide the ability to filter the light multiple times. By changing the physical position or phase of one series of filters relative to another, the brightness and color saturation of the image projected through the projection optics can be changed. The changes in brightness and color saturation can be performed manually by mechanically changing the phase (or position) of the color sequencing device(s) relative to the light beam. Such changes can be performed step-wise of gradually through a continuum of brightness vs.
    Type: Application
    Filed: January 16, 2002
    Publication date: August 15, 2002
    Applicant: REFLECTIVITY, INC., a California Corporation
    Inventors: Andrew G. Huibers, Peter W. Richards
  • Publication number: 20020105729
    Abstract: A color wheel is disclosed that has at least one segment that occupies, for a given radius, a percentage of the circumference of the wheel at that radius, which percentage varies continuously or in multiple steps from a radially inward point to a radially outer point on the wheel. In one embodiment, the color wheel has a plurality of filter segments adjacent each other around the circumference of the wheel, wherein at least one of the transitions from one filter segment to the next is curved or stepped.
    Type: Application
    Filed: January 11, 2002
    Publication date: August 8, 2002
    Applicant: REFLECTIVITY, INC., a California corporation
    Inventors: Peter W. Richards, Andrew G. Huibers, Gregory R. Muir