Abstract: A gas sensor (22) for detecting the presence of a selected component in a gas (41) includes a substrate (28) exhibiting a low thermal resistance. A heater element (34) is disposed substantially over a surface area of a first surface (30) of the substrate (28). Sensor and reference elements (36, 38), formed from a single metal trace (54), are disposed on a second surface (32) of the substrate (28). The electrical resistivity of the sensor element (36) changes as the sensor element (36) adsorbs molecules of the selected component. During a regeneration process, the heater element (34) is activated to provide substantially even heating over the surface area of the first surface (30). Heat from the heater element (34) conducts through the substrate (28) to heat the sensor element (36) and the reference element (38) to a regeneration temperature sufficient to cause the adsorbed molecules of the selected component to be liberated.