Abstract: A displacement responsive device e.g. a measurement probe (110) is disclosed. Displacement of a stylus (130) causes resilient movement of a carriage (134) supported by planar springs (112) and (114). This movement is detected by a capacitance sensor (160), formed from two cylinders (164) and (166). The cylinders move in at least three degrees of freedom and changes in their capacitance during the said movement can be determined by a circuit (e.g. FIG. 5). Movement in x, y and z directions can be sensed.

Abstract: Apparatus which can be used to calibrate, or provide measurement data on, a machine. The apparatus comprises two structures each with three spherical supports spaced in a triangular array thereon. The supports may be balls or sockets. The structures are interconnected by six members and each support has the ends of two members connected to it. The members are passive extensible measuring bars and the structures are respectively connected to fixed and movable parts of a machine so that movement of the machine parts causes relative movement between the structures and varies the lengths of the measuring bars. From measurements of the lengths of the measuring bars the actual movement of the machine part can be determined. Calibration of the spherical supports is carried out using a measuring bar which is pre-calibrated in a Zerodur jig.

Abstract: An optical filter is provided in the form of a subtractive double monochromator. In each dispersive stage, a concave mirror focuses light between a diffraction grating and a transfer mirror between the stages. Light which misses the transfer mirror is rejected. To reduce aberrations over a wide bandwidth, the radius of curvature R of the mirror is centered on the grating and the transfer mirror has a radius of curvature R/2 and is located midway between the mirror and the grating. The mirror 34 thus coincides with the locus of the focus of the spectral image in both stages.

Abstract: Apparatus which can be used to calibrate, or provide measurement data on, a machine. The apparatus comprises two structures each with three spherical supports spaced in a triangular array thereon. The supports may be balls or sockets. The structures are interconnected by six members and each support has the ends of two members connected to it. The members are passive extensible measuring bars and the structures are respectively connected to fixed and movable parts of a machine so that movement of the machine parts causes relative movement between the structures and varies the lengths of the measuring bars. From measurements of the lengths of the measuring bars the actual movement of the machine part can be determined. Calibration of the spherical supports is carried out using a measuring bar which is pre-calibrated in a Zerodur jig.

Abstract: A programmable device which produces a plurality of outputs is connected to a controller having less input ports than there are outputs to be received by the controller. To overcome this problem the controller is programmed to send different signals to the device, one at a time, upon receipt of a particular one of which, the device sends back a corresponding one of its outputs. In the specific example described the signals are different sequences of timing pulses.

Abstract: The present invention teaches a method and apparatus for making measurement of an object on a machine, such as a machine tool, using an optical measuring apparatus which includes a light source for generating a beam of light which is incident on a detector. A detection signal is generated within the detector each time the beam is interrupted. The duration and/or frequency of the detection signals are evaluated and an output signal is emitted from the detection only if a further detection signal is present within the detector in a specified time interval from the generation of an earlier detection signal.

Abstract: An articulating probe head includes motors 12 and 18 for driving respective output shafts 14 and 20 about respective orthogonal axes z and x to move a stylus 22 over the surface of a workpiece under the control of a controller 26. At least one of the motors is inertia balanced by mounting the stator 32 of the motor on bearings 42 to allow it to rotate in opposition to the rotation of the rotor 34. Control of the speed of the spinning stator is achieved by connecting it to the winding assembly 46 of an additional “back-to-earth” motor 47 the magnet assembly 48 of which is connected to the housing. The motor 47 acts as a brake to prevent overspeeding of the rotatable stator, and can have power supplied to it to ensure that the stator does not slow down excessively when the main motor is running at constant angular velocity. Control of the power supply to the motors is achieved by the controller 26.

Abstract: A surface sensing device includes an articulating head adapted for attachment to the spindle of a measuring machine and having two relatively rotatable parts capable of rotation about two mutually perpendicular axes. The device additionally includes a stylus assembly having a relatively stiff hollow stylus carrier, and a relatively flexible hollow stylus. An optical transducer system is provided within the stylus assembly and comprises a fixed light source which directs a beam of light towards a stylus tip, and a retro-reflective component at the tip which reflects the beam back to a fixed detector. The arrangement is such that lateral displacement of the stylus tip when the tip is in contact with a surface can be measured directly.

Abstract: A scale and scale reader are disclosed which may be used to determine absolute position of the reader with respect to the scale in two directions. In an embodiment of the invention a chequered pattern is produced on a scale and block of the pattern may be imaged on a detector and decoded. The blocks contain bits of information which define an absolute position. The pattern may be used also for incremental measurement.

Abstract: A method of calibrating a scanning system comprising a machine and a measuring probe, includes the steps of error mapping the system statically and qualifying the stylus tip so that the system will provide accurate measurements, determining the positions of a number of datum points on the surface of an artefact with the probe stylus in contact with the workpiece and at zero deflection normal to the surface, scanning the surface through the datum points at a nominal stylus deflection and at the maximum speed which provides repeatable position measurements to make a second determination of the positions of the datum points, determining the errors attributable to the scanning process by subtracting the positions obtained in the first and second determinations, and storing the error values for correction of subsequent measurements of similar artefacts.

Abstract: Apparatus for producing and guiding a light beam, in particular for a laser interferometer, includes a laser having a laser tube (100) and an external cavity (112). Two laser beams (110A′ and 110B′) of orthogonal polarization states are directed from the cavity into polarization maintaining fibers (12, 14). The two beams are generated from a single beam (110) by a birefringent prism (120) in the cavity. Additional beam steering prisms (130A and 130B) are included to direct the beams from the birefringent prism to the fibers. The additional steering prisms compensate for temperature induced beam deviations in the birefringent prisms. Interferometric sensing heads (20, 22) receive the beams from the fibers and include a rotatable wedge prism and mechanical adjustment means for guiding the beams onto reflecting surfaces on an object for positioning the object. The ends of the fibers attached to the sensing heads are kinematically located in the head.

Abstract: A length of scale (1) which has a profile consisting of a sequence of troughs (18) and crests (16) is subjected to a process to make the shapes of the crests more regular, thus increasing and making more predictable the signal reflected from the crests on the scale. The process comprises passing a length of scale (1) between upper (20) and lower (22) cylindrical rollers. The lower roller (22) may be driven or the length of scale (1) may be pulled through. Reference marks or identification marks may be added to the scale by appropriately marking the upper roller (20). Alternatively, the marks may be added at an initial embossing step which imparts the troughs and crests profile to the scale or at a separate subsequent step.

Abstract: An analogue probe having a stylus with a spherical tip of radius (r) is calibrated using a sphere of known radius (R) mounted on a machine. The stylus tip is driven into the sphere from a plurality of directions (at least 9), each nominally normal to the sphere surface, until the stylus has deflected a predetermined amount. The machine movement is then reversed, and probe (a,b,c) deflection outputs are recorded simultaneously with machine (X,Y,Z) axis positions until the stylus tip leaves the surface. The readings are extrapolated to obtain the (X,Y,Z) readings when the probe radial deflection is zero. The value of (R+r) is determined from these readings along with the position of the sphere center giving a value with zero probe errors. Values of (R+r) are also determined using a pre-selected radial deflection for each of the directions, by converting probe (a,b,c) outputs at that deflection to incremental machine (X,Y,Z) axis values using a trial probe transformation matrix.

Abstract: A coordinate measuring machine (CMM) carries a probe and is controlled by a controller to drive the probe to take measurements on a workpiece. In order to reduce the effects of acceleration-induced deflections of the probe on the measurements made by the machine, accelerometers are provided to measure the accelerations of the probe and to produce signals indicative thereof. The acceleration signals (45) are passed to the controller (FIG. 2) where they are integrated (46) and filtered (48) before being passed as velocity signals (49) to a summing junction (50) from which they are fed to a velocity feedback control loop[ (34, 35, 36, 37) which reduces any changes in the velocity (and hence deflection) of the probe due to the accelerations.

Abstract: An electron microscope 10 is adapted to enable spectroscopic analysis of a sample 16. A parabolic mirror 18 has a central aperture 20 through which the electron beam can pass. The mirror 18 focuses laser illumination from a transverse optical path 24 onto the sample, and collects Raman and/or other scattered light, passing it back to an optical system 30. The mirror 18 is retractable (within the vacuum of the electron microscope) by a sliding arm assembly 22.

Abstract: A probe arm comprises a base member 10 securable to a surface of a machine tool, and a rotatable hub 12, carrying an arm member 16 with a tool-setting probe (18 FIG. 1). The hub has a portion 22 with three radial projections (26 FIG. 2) which rotates within an aperture 24 of the base which also has three inward radial projections 30. Together these projections form stops at the operative and non-operative positions of the probe. The aperture also has three axial raised areas 42 on an annular ledge 40 which support an annular should 44 on the hub. Thus there are six points of contact between the hub and base member in the operative and non-operative positions. A biasing arrangement comprises a detent plate 46 secured to the aperture and a planar spring 48 secured to the hub by its central region. Ball bearings 56 are loosely retained in two opposite lugs (54 FIG. 6) on the spring and run around the detent plate between two pairs of detent holes (58 FIG. 5).

Abstract: Apparatus which can be used to calibrate, or provide measurement data on, a machine. The apparatus comprises two structures each with three spherical supports spaced in a triangular array thereon. The supports may be balls or sockets. The structures are interconnected by six members and each support has the ends of two members connected to it. The members are passive extensible measuring bars and the structures are respectively connected to fixed and movable parts of a machine so that movement of the machine parts causes relative movement between the structures and varies the lengths of the measuring bars. From measurements of the lengths of the measuring bars the actual movement of the machine part can be determined. Calibration of the spherical supports is carried out using a measuring bar which is pre-calibrated in a Zerodur jig.

Abstract: An analogue probe having a stylus with a spherical tip of radius (r) is calibrated using a sphere of known radius (R) mounted on a machine. The stylus tip is driven into the sphere from a plurality of directions (at least 9), each nominally normal to the sphere surface, until the stylus has deflected a predetermined amount. The machine movement is then reversed, and probe (a,b,c) deflection outputs are recorded simultaneously with machine (X,Y,Z) axis positions until the stylus tip leaves the surface. The readings are extrapolated to obtain the (X,Y,Z) readings when the probe radial deflection is zero. The value of (R+r)is determined from these readings along with the position of the sphere centre giving a value with zero probe errors. Values of (R+r) are also determined using a pre-selected radial deflection for each of the directions, by converting probe (a,b,c) outputs at that deflection to incremental machine (X,Y,Z) axis values using a trial probe transformation matrix.

Abstract: Described is a device which enables toolsetting on a machine tool. The device includes a light emitting unit (10) and a light detecting unit (14). A light source (30) causes a light beam (12) to propagate from the emitting unit (10) to the detecting unit (14). A light detector (40) detects the presence or absence of the beam. A trigger signal is produced when occlusion occurs and so the position of an object can be determined by reference to the machine's coordinate readings. The beam (12) may be uncollimated and thus provide a device with an easier set-up and a greater resistance to vibration in use. The light detector (40) and/or light source may be protected from contamination by windows (34,44) or a protector having an aperture therein. The light emitting and detecting units each have an aperture for the light beam.

Abstract: There is disclosed: a measurement scale suitable for use with scale reader for determining displacement; various tracks all for holding the scale and all having a channel into which the scale is magnetically attracted; and a scale tensioner which in use tensions the scale in situ by release of a preload, prior to the scale being secured to a substrate, the tensioner being removable thereafter.