Abstract: A system and method receive the output signal from a capacitance diaphragm gauge (CDG) and generate a noise reduced output signal. An input signal processing circuit receives an input signal from a signal source that drives the CDG. The input signal processing circuit generates a segment of N normalized digital samples of the input signal. An output signal processing circuit receives the output signal from the CDG and generates M segments of N digital samples of the CDG output signal and averages the corresponding samples in the M segments to generate a signal segment of N averaged samples. Each of the N averaged samples is multiplied by a corresponding one of the N normalized samples to generate N products. The N products are averaged to generate an average product, which is multiplied by a constant to generate a system output signal with reduced noise.

Abstract: A system and method mitigate the effects of these external vibrations on a capacitance diaphragm gauge by sensing the motion of the diaphragm at the first natural frequency of the diaphragm of the CDG. The presence of the natural frequency signals superimposed on the pressure signal is determined by sensing variations in the output of a sensor at or near the known natural frequency of the diaphragm and filtering that known low frequency from the output. The filtered signal is used in a feedback circuit to impose electrostatic forces on the diaphragm. The imposed electrostatic forces oppose the motion created by the external vibration to suppress the effects of the vibration on the pressure measured by the CDG.

Abstract: A system and a method detect contamination of a diaphragm in a capacitance diaphragm gauge wherein a contaminated diaphragm deflects less in the presence of pressure than an uncontaminated diaphragm. The system and method measure a base pressure. A DC voltage is applied between the diaphragm and a fixed electrode to cause the diaphragm to deflect to simulate an effective pressure. The system and method measure a combined pressure caused by the base pressure and the effective pressure. The system and method subtract the base pressure to determine the effective pressure caused by the static diaphragm deflection. If the measured effective pressure is less than an acceptable effective pressure, the system and method determine that the diaphragm is contaminated.

Abstract: A system and method receive the output signal from a capacitance diaphragm gauge (CDG) and generate a noise reduced output signal. An input signal processing circuit receives an input signal from a signal source that drives the CDG. The input signal processing circuit generates a segment of N normalized digital samples of the input signal. An output signal processing circuit receives the output signal from the CDG and generates M segments of N digital samples of the CDG output signal and averages the corresponding samples in the M segments to generate a signal segment of N averaged samples. Each of the N averaged samples is multiplied by a corresponding one of the N normalized samples to generate N products. The N products are averaged to generate an average product, which is multiplied by a constant to generate a system output signal with reduced noise.