Patents Assigned to Research Corporation
  • Patent number: 8668835
    Abstract: A multi-step etch process wherein elliptical via openings and trench openings are formed in a dielectric layer includes supporting a multi-layer film stack on a temperature controlled electrostatic chuck in a plasma etch reactor. The multi-layer film stack has a dielectric layer and a patterned metal hard mask layer above the dielectric layer. An etchant gas is supplied to the plasma etch reactor. The etchant gas is energized into a plasma state, and via openings in a photo resist are transferred into a planarization layer and then into elliptical portions of the trench openings in a patterned hard mask layer while maintaining the chuck at a temperature of about 30 to 50° C. The elliptical openings are extended into a lower layer of the hard mask and into an underlying dielectric layer while maintaining the chuck at a temperature of 20° C. or below.
    Type: Grant
    Filed: January 23, 2013
    Date of Patent: March 11, 2014
    Assignee: Lam Research Corporation
    Inventors: Ananth Indrakanti, Bhaskar Nagabhirava
  • Patent number: 8667951
    Abstract: Aspects of the present invention relate to systems and method for converting ozone and fuel into mechanical energy and waste products. In some embodiments, a super-combustor may be used to provide a combustion engine with an improved ability to combust fuel. Certain embodiments of the invention may provide for an improved spark plug or modified engine having a super-combustor built in.
    Type: Grant
    Filed: August 19, 2010
    Date of Patent: March 11, 2014
    Assignee: Megaion Research Corporation
    Inventor: Carlos A. Plata
  • Patent number: 8668764
    Abstract: MOF nanocrystals having a narrow size distribution, as well as methods of making and using same are disclosed.
    Type: Grant
    Filed: February 17, 2012
    Date of Patent: March 11, 2014
    Assignee: Georgia Tech Research Corporation
    Inventors: Andrew Brown, Sankar Nair, David Sholl, Cantwell Carson
  • Publication number: 20140065557
    Abstract: A method for supplying a first gas and a second gas using a purge ring in a photonic processing system includes arranging a first layer and a second layer to define a first plenum and a first baffle, arranging the second layer and a third layer to define a second plenum and a second baffle, receiving a first gas at the first plenum that flows through the first plenum and the first baffle to an inner region, and receiving a second gas at the second plenum that flows through the second plenum and the second baffle to the inner region. The second baffle is one of less restrictive and more restrictive than the first baffle.
    Type: Application
    Filed: November 5, 2013
    Publication date: March 6, 2014
    Applicant: Lam Research Corporation
    Inventors: James Lee, Lisa Gytri
  • Publication number: 20140065835
    Abstract: A flexible polymer or elastomer coated RF return strap to be used in a plasma chamber to protect the RF strap from plasma generated radicals such as fluorine and oxygen radicals, and a method of processing a semiconductor substrate with reduced particle contamination in a plasma processing apparatus. The coated RF strap minimizes particle generation and exhibits lower erosion rates than an uncoated base component. Such a coated member having a flexible coating on a conductive flexible base component provides an RF ground return configured to allow movement of one or more electrodes in an adjustable gap capacitively coupled plasma reactor chamber.
    Type: Application
    Filed: July 30, 2013
    Publication date: March 6, 2014
    Applicant: Lam Research Corporation
    Inventors: Bobby Kadkhodayan, Jon McChesney, Eric Pape, Rajinder Dhindsa
  • Publication number: 20140068107
    Abstract: A system for event-based synchronized multimedia playback, comprising a media source device and a plurality of destination devices, each destination device comprising a local clock, and a synchronization module on one of the devices. The synchronization module transmits common events, En, each with a unique event number, to each of the plurality of destination devices. Each destination device records time Dxn when event En is received and transmits an acknowledgement message back to the synchronization module comprising time Dxn and event number n. The synchronization module determines phase and frequency differences between clocks of respective destination devices; computes a frequency adjustment to compensate for phase and rate differences; and directs each respective destination device to adjust its clock phase and frequency accordingly. Each destination device adjusts its local clock as directed or may perform a sample rate conversion on sample data in order to enable synchronized media playback.
    Type: Application
    Filed: November 18, 2013
    Publication date: March 6, 2014
    Applicant: Blackfire Research Corporation
    Inventor: Ravi Rajapakse
  • Publication number: 20140065827
    Abstract: A two piece ceramic showerhead includes upper and lower plates which deliver process gas to an inductively coupled plasma processing chamber. The upper plate overlies the lower plate and includes radially extending gas passages which extend inwardly from an outer periphery of the upper plate, axially extending gas passages in fluid communication with the radially extending gas passages and an annular recess forming a plenum between the upper and lower plates. The lower plate includes axially extending gas holes in fluid communication with the plenum. The two piece ceramic showerhead forms a dielectric window of the chamber through which radiofrequency energy generated by an antenna is coupled into the chamber. The gas delivery system is operable to supply an etching gas and a deposition gas into the processing chamber such that the etching gas in the plenum can be replaced with the deposition gas.
    Type: Application
    Filed: September 19, 2013
    Publication date: March 6, 2014
    Applicant: Lam Research Corporation
    Inventors: Michael Kang, Alex Paterson, Ian J. Kenworthy
  • Publication number: 20140059789
    Abstract: An apparatus for processing a substrate is provided. The apparatus includes a solid material having a support side and a contact side. The contact side has an outer surface, and the outer surface is configured to become softer relative to a remainder of the solid material when exposed to an activation solution. The apparatus includes a support structure configured to support the solid material from the support side of the solid material, such that the contact side of the solid material is oriented to face a surface of the substrate, when the substrate is present. Also provided is a gimbaled structure connected to the support structure. The gimbaled structure enabling the outer surface of the contact side to substantially align in a coplanar arrangement with the surface of the substrate, when the substrate is present. A force application structure is coupled to the gimbaled structure.
    Type: Application
    Filed: October 16, 2013
    Publication date: March 6, 2014
    Applicant: Lam Research Corporation
    Inventors: Erik M. Freer, John M. deLarios, Katrina Mikhaylichenko, Michael Ravkin, Mikhail Korolik, Fred C. Redeker
  • Publication number: 20140068623
    Abstract: An information processing apparatus submits jobs for execution on a server. Jobs are classified into a plurality of groups, and these groups are ranked in ascending order of workload that the groups of jobs impose on the server. A processor in the information processing apparatus counts ongoing jobs that are currently executed on the server and belong to a specified number of top-ranked groups. The processor designates pending jobs that belong to other groups than the specified number of top-ranked groups and suspends submission of processing requests of the designated pending jobs to the server, when the number of ongoing jobs is greater than or equal to a threshold and when there are one or more pending jobs that belong to the specified number of top-ranked groups.
    Type: Application
    Filed: August 29, 2012
    Publication date: March 6, 2014
    Applicants: The Georgia Tech Research Corporation, FUJITSU LIMITED
    Inventors: Yasuhiko KANEMASA, Motoyuki Kawaba, Calton Pu, Qingyang Wang
  • Patent number: 8664523
    Abstract: A solar cell employs an optical fiber and semiconductor nanowires grown around the fiber. A p-n junction based design, organic-inorganic heterojunction, or a dye-sensitized structure is built at the surfaces of the nanowires. Light entering the fiber from a tip propagates through the fiber until it enters a nanowire where it reaches a photovoltaic element. Light entering the fiber cannot escape until it interacts with a photovoltaic element, thereby increasing the solar conversion efficiency. The fiber can transmit light, while the nanowires around the fibers increase the surface area of light exposure.
    Type: Grant
    Filed: March 30, 2010
    Date of Patent: March 4, 2014
    Assignee: Georgia Tech Research Corporation
    Inventors: Zhong L. Wang, Benjamin Weintraub, Yaguang Wei
  • Patent number: 8664335
    Abstract: The various embodiments of the present disclosure relate generally to thermally crosslinked polymeric compositions and methods of making thermally crosslinked polymeric compositions. An embodiment of the present invention comprises a composition comprising: a first polymer comprising a first repeat unit, the first repeat unit comprising a carboxyl group, wherein the first polymer crosslinks to a second polymer formed from a second repeat unit, and wherein the first polymer crosslinks to the second polymer without formation of an ester group.
    Type: Grant
    Filed: June 16, 2009
    Date of Patent: March 4, 2014
    Assignee: Georgia Tech Research Corporation
    Inventors: William John Koros, Adam Michal Kratochvil
  • Patent number: 8662764
    Abstract: In a method of controlling a gaze direction of a camera, the camera is placed on a top surface of a substrate that is pivotally coupled to a frame, wherein a movement arm depends downwardly from the substrate. The movement arm is moved with two spaced apart amplified piezoelectric ceramic stack actuators that are affixed to the frame and coupled to the movement arm by deforming the amplified piezoelectric ceramic stack actuators as a result of applying a voltage thereto, thereby changing an angular orientation of the substrate.
    Type: Grant
    Filed: June 14, 2013
    Date of Patent: March 4, 2014
    Assignee: Georgia Tech Research Corporation
    Inventors: Joshua Andrew Schultz, Jun Ueda
  • Patent number: 8667380
    Abstract: A transmitter device (110T) for secure communication includes: an encoder (170) configured to apply a non-systematic error correcting code (NS ECC) to a message, thus producing encoded bits with no clear message bits; and a transceiver (720) configured to transmit the encoded bits over a main channel to a receiver. A method for secure communication includes: encoding a message with an NS ECC to produce an encoded message carrying no message bits in the clear; and transmitting the encoded message over a main channel (120). The NS ECC characteristics result in an eavesdropper channel error probability under a security threshold (320) and a main channel error probability over a reliability threshold (310), whenever an eavesdropper (140) listening on an eavesdropper channel (150) is more than distance Z (220) from the transmitter. Unreliable bits in the encoded bits render the eavesdropper unable to reliably decode messages on the main channel.
    Type: Grant
    Filed: October 8, 2009
    Date of Patent: March 4, 2014
    Assignees: Georgia Tech Research Corporation, Korea Advanced Institute of Science and Technology (KAIST)
    Inventors: Steven William McLaughlin, Demijan Klinc, Jeongseok Ha
  • Patent number: 8664560
    Abstract: An exemplary method and apparatus for abating reaction products from a vacuum processing chamber includes a reaction chamber in fluid communication with the vacuum processing chamber, a coil disposed about the reaction chamber, and a power source for supplying RF energy to the coil. The coil creates a plasma in the reaction chamber which effectively breaks down stable reaction products from the vacuum processing chamber such as perfluorocarbons (PFCs) and hydrofluorocarbons (HFCs) which significantly contribute to global warming. According to alternative embodiments, the plasma may be generated with grids or coils disposed in the reaction chamber perpendicular to the flow of reaction products from the vacuum processing chamber.
    Type: Grant
    Filed: December 22, 2004
    Date of Patent: March 4, 2014
    Assignee: Lam Research Corporation
    Inventors: Paul Kevin Shufflebotham, Michael Barnes
  • Patent number: 8663257
    Abstract: An apparatus and method for using an anastomosis device to repair severed tissues resulting from a surgical medical procedure such as a radical prostatectomy, ilio-orthotopic neobladder construction, cystoprostatectomy, cystectomy, urethral anastomosis, or ureteral anastomosis.
    Type: Grant
    Filed: September 26, 2012
    Date of Patent: March 4, 2014
    Assignee: AMS Research Corporation
    Inventors: Kory P. Hamel, Vincent G. Copa
  • Patent number: 8661905
    Abstract: Non-contact microelectronic device inspection systems and methods are discussed and provided. Some embodiments include a method of generating a virtual reference device (or chip). This approach uses a statistics to find devices in a sample set that are most similar and then averages their time domain signals to generate the virtual reference. Signals associated with the virtual reference can then be correlated with time domain signals obtained from the packages under inspection to obtain a quality signature. Defective and non-defective devices are separated by estimating a beta distribution that fits a quality signature histogram of inspected packages and determining a cutoff threshold for an acceptable quality signature. Other aspects, features, and embodiments are also claimed and described.
    Type: Grant
    Filed: November 9, 2010
    Date of Patent: March 4, 2014
    Assignee: Georgia Tech Research Corporation
    Inventors: Ifeanyi Charles Ume, Abel Valdes, Jie Gong, Razid Ahmad
  • Patent number: 8663971
    Abstract: The present invention provides genetically engineered strains of Pichia capable of producing proteins with reduced glycosylation. In particular, the genetically engineered strains of the present invention are capable of expressing either or both of an ?-1,2-mannosidase and glucosidase II. The genetically engineered strains of the present invention can be further modified such that the OCH1 gene is disrupted. Methods of producing glycoproteins with reduced glycosylation using such genetically engineered stains of Pichia are also provided.
    Type: Grant
    Filed: April 16, 2009
    Date of Patent: March 4, 2014
    Assignees: VIB, VZW, Research Corporation Technologies, Inc., Universiteit Gent
    Inventors: Roland Contreras, Nico L. M. Callewaert, Steven C. J. Geysens
  • Patent number: 8664105
    Abstract: A method for processing a wafer with a wafer bevel that surrounds a central region is provided. The wafer is placed in a bevel plasma processing chamber. A protective layer is deposited on the wafer bevel without depositing the protective layer over the central region. The wafer is removed from the bevel plasma processing chamber. The wafer is further processed.
    Type: Grant
    Filed: August 2, 2013
    Date of Patent: March 4, 2014
    Assignee: Lam Research Corporation
    Inventors: Andreas Fischer, William Scott Bass
  • Patent number: 8663374
    Abstract: An apparatus for concentrating aerosol particles can include: a sample air inlet; an enriched aerosol outlet; an aerosol lean outlet; a flow path connecting the air inlet and aerosol rich and aerosol lean outlets; and a plurality of alternately energized and grounded electrode pairs along the flow path. The aerosol rich outlet can be in fluid communication with an aerosol particle capture device. The apparatus can include a sheath air inlet providing a flow of aerosol free air over surfaces of the alternately energized and grounded electrode pairs. The apparatus can include an elongate focusing chamber having a cylindrical shape containing the alternately energized and grounded electrode pairs that are configured as circular rings. The apparatus can include one or more structures configured to impart tangential, spiral or helical flow to a stream entering through the sample air inlet.
    Type: Grant
    Filed: August 3, 2012
    Date of Patent: March 4, 2014
    Assignee: CFD Research Corporation
    Inventors: Kapil Pant, Shivshankar Sundaram, Yi Wang
  • Publication number: 20140054776
    Abstract: A method of making an electronic device which in one embodiment comprises providing a substrate, electrolessly depositing a barrier metal at least on portions of the substrate, and using wet chemistry such as electroless deposition to deposit a substantially gold-free wetting layer having solder wettability onto the barrier metal. An electronic device which in one embodiment comprises a metallization stack. The metallization stack comprises a barrier metal deposited electrolessly and a substantially gold-free wetting layer deposited on the barrier metal, and the wetting layer is wettable by solder.
    Type: Application
    Filed: August 22, 2013
    Publication date: February 27, 2014
    Applicant: Lam Research Corporation
    Inventors: Artur KOLICS, William T. LEE, Fritz REDEKER