Patents Assigned to Resonant Inc.
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Patent number: 11146238Abstract: Methods of fabricating acoustic resonators are disclosed. A back surface of a piezoelectric plate is bonded to a surface of a substrate. Thickness measurements are made at a plurality of positions on the piezoelectric plate. Excess material is removed from the front surface of the piezoelectric plate in accordance with the thickness measurements to improve a thickness uniformity of the piezoelectric plate. A conductor pattern is formed on the front surface, the conductor pattern including a plurality of interdigital transducers (IDTs) of a plurality of resonators. Cavities are formed in the substrate such that portions of the single-crystal piezoelectric plate form a plurality of diaphragms spanning respective cavities, wherein interleaved fingers of each IDT of the plurality of IDTs are disposed on a respective one of the plurality of diaphragms.Type: GrantFiled: August 7, 2020Date of Patent: October 12, 2021Assignee: Resonant Inc.Inventors: Robert B. Hammond, Patrick Turner, Ventsislav Yantchev
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Patent number: 11146232Abstract: Acoustic filters, resonators and methods are disclosed. An acoustic resonator device includes a substrate having a surface. A back surface of a single-crystal piezoelectric plate is attached to the surface of the substrate except for a portion of the piezoelectric plate forming a diaphragm that spans a cavity in the substrate. A conductor pattern is formed on the front surface of the piezoelectric plate, the conductor pattern including an interdigital transducer (IDTs), interleaved fingers of the IDT disposed on the diaphragm. A pitch of the interleaved fingers and a mark of the interleaved fingers are set in combination such that a resonance frequency of the acoustic resonator is equal to a predetermined target frequency.Type: GrantFiled: September 23, 2020Date of Patent: October 12, 2021Assignee: Resonant Inc.Inventors: Soumya Yandrapalli, Viktor Plesski, Julius Koskela, Ventsislav Yantchev, Patrick Turner
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Patent number: 11146231Abstract: Acoustic resonator devices, filters, and methods are disclosed. An acoustic resonator includes a substrate, a piezoelectric plate having front and back surfaces, and an acoustic Bragg reflector between a surface of the substrate and the back surface of the piezoelectric plate. An interdigital transducer (IDT) is formed on the front surface of the piezoelectric plate. The IDT is configured to excite a shear primary acoustic mode in the piezoelectric plate in response to a radio frequency signal applied to the IDT. At least one finger of the IDT is disposed in a groove in the piezoelectric plate.Type: GrantFiled: August 17, 2020Date of Patent: October 12, 2021Assignee: Resonant Inc.Inventor: Viktor Plesski
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Patent number: 11139794Abstract: Acoustic resonator devices and filters are disclosed. An acoustic resonator includes a substrate having a surface and a single-crystal piezoelectric plate having parallel front and back surfaces, the back surface attached to the surface of the substrate except for a portion of the piezoelectric plate forming a diaphragm that spans a cavity in the substrate. An interdigital transducer (IDT) is formed on the front surface of the single-crystal piezoelectric plate such that interleaved fingers of the IDT are disposed on the diaphragm. The IDT is configured to excite a primary acoustic mode in the diaphragm in response to a radio frequency signal applied to the IDT. A direction of acoustic energy flow of the primary acoustic mode is substantially orthogonal to the front and back surfaces of the diaphragm. The diaphragm is contiguous with the piezoelectric plate around at least 50% of a periphery of the diaphragm.Type: GrantFiled: July 2, 2020Date of Patent: October 5, 2021Assignee: Resonant Inc.Inventors: Viktor Plesski, Soumya Yandrapalli, Robert B. Hammond, Bryant Garcia, Patrick Turner, Jesson John, Ventsislav Yantchev
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Patent number: 11114996Abstract: There is disclosed acoustic resonators and filter devices. An acoustic resonator includes a single-crystal piezoelectric plate having front and back surfaces, a portion of the piezoelectric plate forming a diaphragm. A thickness of the piezoelectric plate is greater than or equal to 300 nm and less than or equal to 500 nm. An interdigital transducer (IDT) is formed on the front surface of the single-crystal piezoelectric plate such that interleaved fingers of the IDT are disposed on the diaphragm. The piezoelectric plate and the IDT are configured such that a radio frequency signal applied to the IDT excites a primary shear acoustic mode in the diaphragm. The interleaved fingers of the IDT are substantially molybdenum. The diaphragm is contiguous with the piezoelectric plate around at least 50% of the IDT.Type: GrantFiled: July 31, 2020Date of Patent: September 7, 2021Assignee: Resonant Inc.Inventors: Viktor Plesski, Bryant Garcia, Julius Koskela, Patrick Turner
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Patent number: 11114998Abstract: There is disclosed acoustic resonators and filter devices. An acoustic resonator includes a substrate having a surface and a Z-cut piezoelectric plate having parallel front and back surfaces, the back surface attached to the surface of the substrate except for a portion of the piezoelectric plate forming a diaphragm that spans a cavity in the substrate. An interdigital transducer (IDT) is formed on the front surface of the single-crystal piezoelectric plate such that interleaved fingers of the IDT are disposed on the diaphragm. The IDT is configured to excite a primary acoustic mode in the diaphragm in response to a radio frequency signal applied to the IDT. A thickness of the interleaved fingers of the IDT is greater than or equal to 0.85 times a thickness of the diaphragm.Type: GrantFiled: September 7, 2020Date of Patent: September 7, 2021Assignee: Resonant Inc.Inventors: Bryant Garcia, Robert Hammond, Patrick Turner, Neal Fenzi, Viktor Plesski, Ventsislav Yantchev
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Patent number: 11108379Abstract: A duplexer includes a surface acoustic wave (SAW) device comprising a transmit filter and a receive filter formed on a piezoelectric substrate. The transmit filter includes a first transmit shunt resonator connected to a first transmit-filter ground terminal. The receive filter includes a first receive shunt resonator connected to a first receive-filter ground terminal. A ground coupling capacitor is connected between the first transmit-filter ground terminal and the first receive-filter ground terminal.Type: GrantFiled: February 20, 2019Date of Patent: August 31, 2021Assignee: Resonant Inc.Inventor: John Mazotta
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Patent number: 11038489Abstract: A band-pass filter (BPF) having first and second ports includes an acoustic wave filter (AWF) having first and second ports, the first port of the AWF coupled to the first port of the BPF. An impedance matching network consisting of a first inductor in parallel with a series combination of a second inductor and a capacitor is connected across the first port of the BPF.Type: GrantFiled: August 23, 2019Date of Patent: June 15, 2021Assignee: Resonant Inc.Inventor: Yu-Ting Huang
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Patent number: 11003971Abstract: There is disclosed a surface acoustic wave sensor. An interdigital transducer (IDT) and a first reflector are formed on a surface of a piezoelectric substrate. The first reflector is displaced from the IDT in a direction of acoustic wave propagation. The first reflector includes a plurality of elongate reflective elements including a first reflective element and N additional reflective elements, where N is a positive integer. A long axis of each of the reflective elements is perpendicular to the direction of acoustic wave propagation, and a distance between adjacent reflective elements along the direction of acoustic wave propagation is a linear function of distance from the first reflective element along the direction of acoustic wave propagation.Type: GrantFiled: May 1, 2020Date of Patent: May 11, 2021Assignee: Resonant Inc.Inventor: Viktor Plesski
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Patent number: 10998877Abstract: Methods of fabricating acoustic resonators are disclosed. A back surface of a single-crystal piezoelectric plate is bonded to a surface of a substrate. A conductor pattern is formed on the front surface of the piezoelectric plate, the conductor pattern including a plurality of interdigital transducers (IDTs) of a plurality of resonators. A dielectric passivation/tuning layer is formed over the conductor pattern and the front surface of the piezoelectric plate. Electrical measurements are made on at least some of the plurality of resonators. Material is selectively removed from the dielectric passivation/tuning layer in accordance with the electrical measurements.Type: GrantFiled: August 7, 2020Date of Patent: May 4, 2021Assignee: Resonant Inc.Inventors: Patrick Turner, Ventsislav Yantchev, Robert B. Hammond
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Patent number: 10998882Abstract: Acoustic resonator devices, filter devices, and methods of fabrication are disclosed. An acoustic resonator includes a substrate having a surface and a single-crystal piezoelectric plate having front and back surfaces. The back surface is attached to the surface of the substrate except for a portion of the piezoelectric plate forming a diaphragm that spans a cavity in the substrate, the diaphragm having an edge about a perimeter of the cavity. An interdigital transducer (IDT) is formed on the front surface of the single-crystal piezoelectric plate such that interleaved fingers of the IDT are disposed on the diaphragm. The IDT is configured to excite a primary acoustic mode in the diaphragm in response to a radio frequency signal applied to the IDT. At least a portion of the edge of the diaphragm is at an oblique angle to the fingers and to an X crystalline axis of the piezoelectric plate.Type: GrantFiled: April 2, 2020Date of Patent: May 4, 2021Assignee: Resonant Inc.Inventors: Ventsislav Yantchev, Patrick Turner, Viktor Plesski, Julius Koskela, Robert B. Hammond
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Patent number: 10992283Abstract: There is disclosed acoustic resonators and filter devices. An acoustic resonator includes a substrate having a surface and a rotated Z-cut lithium niobate piezoelectric plate having parallel front and back surfaces, the back surface attached to the surface of the substrate except for a portion of the piezoelectric plate forming a diaphragm that spans a cavity in the substrate. An interdigital transducer (IDT) is formed on the front surface of the single-crystal piezoelectric plate such that interleaved fingers of the IDT are disposed on the diaphragm. The IDT is configured to excite a primary acoustic mode in the diaphragm in response to a radio frequency signal applied to the IDT. A thickness of the interleaved fingers of the IDT is greater than or equal to 0.85 times a thickness of the piezoelectric plate and less than or equal to 2.5 times the thickness of the piezoelectric plate.Type: GrantFiled: September 25, 2020Date of Patent: April 27, 2021Assignee: Resonant Inc.Inventors: Viktor Plesski, Bryant Garcia, Robert Hammond, Patrick Turner, Neal Fenzi, Ventsislav Yantchev
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Patent number: 10992284Abstract: Acoustic filters and methods are disclosed. A single-crystal piezoelectric is attached to a substrate, portions of the piezoelectric plate forming one or more diaphragms spanning respective cavities in the substrate. A conductor pattern is formed on the piezoelectric plate, the conductor pattern including a plurality of interdigital transducers (IDTs) of a plurality of resonators, interleaved fingers of each of the plurality of IDTs disposed on a respective diaphragm of the one or more diaphragms. A first frequency setting dielectric layer having a first thickness is disposed over the fingers of the IDTs of a first subset of the plurality of resonators. A second frequency setting dielectric layer having a second thickness greater than the first thickness is disposed over the fingers of the IDTs of a second subset of the plurality of resonators, wherein the first subset and the second subset are not identical.Type: GrantFiled: July 8, 2020Date of Patent: April 27, 2021Assignee: Resonant Inc.Inventor: Ventsislav Yantchev
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Patent number: 10992282Abstract: There is disclosed acoustic resonators and filter devices. An acoustic resonator includes a substrate having a surface and a single-crystal piezoelectric plate having front and back surfaces, the back surface attached to the surface of the substrate except for a portion of the piezoelectric plate forming a diaphragm that spans a cavity in the substrate. An interdigital transducer (IDT) is formed on the front surface of the single-crystal piezoelectric plate such that interleaved fingers of the IDT are disposed on the diaphragm. The interleaved fingers include a first layer having a rectangular shape adjacent the diaphragm and a second layer over the first layer opposite the diaphragm, and wherein a width of the second layer varies along a length of each finger.Type: GrantFiled: November 10, 2020Date of Patent: April 27, 2021Assignee: Resonant Inc.Inventors: Viktor Plesski, Julius Koskela
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Patent number: 10985730Abstract: There is disclosed acoustic resonators and filter devices. An acoustic resonator includes a substrate having a surface and a Z-cut piezoelectric plate having parallel front and back surfaces, the back surface attached to the surface of the substrate except for a portion of the piezoelectric plate forming a diaphragm that spans a cavity in the substrate. An interdigital transducer (IDT) is formed on the front surface of the single-crystal piezoelectric plate such that interleaved fingers of the IDT are disposed on the diaphragm. The IDT is configured to excite a primary acoustic mode in the diaphragm in response to a radio frequency signal applied to the IDT. A thickness of the interleaved fingers of the IDT is greater than or equal to 0.85 times a thickness of the diaphragm.Type: GrantFiled: August 18, 2020Date of Patent: April 20, 2021Assignee: Resonant Inc.Inventors: Bryant Garcia, Robert Hammond, Patrick Turner, Neal Fenzi, Viktor Plesski, Ventsislav Yantchev
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Patent number: 10985728Abstract: Acoustic filters, resonators and methods are disclosed. An acoustic filter device includes a substrate having a surface and a single-crystal piezoelectric plate having front and back surfaces and a thickness ts, the back surface attached to the surface of the substrate except for portions of the piezoelectric plate forming a plurality of diaphragms that span respective cavities in the substrate. A conductor pattern is formed on the front surface of the piezoelectric plate, the conductor pattern comprising a plurality of interdigital transducers (IDTs) of a plurality of acoustic resonators, interleaved fingers of each IDT of the plurality of IDTs disposed on a respective diaphragm of the plurality of diaphragms. Zero or more dielectric layers are deposited over all of the IDTs and the diaphragms, wherein a total thickness of the zero or more dielectric layers is the same for all of the plurality of acoustic resonators.Type: GrantFiled: September 23, 2020Date of Patent: April 20, 2021Assignee: Resonant Inc.Inventors: Viktor Plesski, Jesson John, Bryant Garcia
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Patent number: 10985726Abstract: Acoustic resonator devices, filters, and methods are disclosed. An acoustic resonator includes a substrate and a piezoelectric plate having front and back surfaces, the back surface attached to a surface of the substrate except for a portion of the piezoelectric plate forming a diaphragm that spans a cavity in the substrate. An interdigital transducer (IDT) is formed on the front surface of the piezoelectric plate such that interleaved fingers of the IDT are disposed on the diaphragm. The IDT is configured to excite a primary acoustic mode in the diaphragm in response to a radio frequency signal applied to the IDT. At least one finger of the IDT is disposed in a groove in the diaphragm. A depth of the groove is equal to a thickness of the at least one finger.Type: GrantFiled: August 14, 2020Date of Patent: April 20, 2021Assignee: Resonant Inc.Inventor: Viktor Plesski
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Publication number: 20210080493Abstract: A method of designing a filter to meet a set of specifications. The set of specifications is received, and a filter design is established. Analysis of the filter design is performed by: determining a part admittance matrix; determining a circuit admittance matrix based on the part admittance matrices; reducing interior nodes of the circuit admittance matrix; reducing algebraic nodes to transform the circuit admittance matrix into a Green's Function; evaluating the Green's Function to determine a circuit exterior node admittance matrix; and transforming the circuit exterior node admittance matrix to a circuit scattering matrix. The circuit scattering matrix is compared to the set of specifications to determine whether the filter design is satisfactory. When a determination is made that the design is not satisfactory, the filter design is modified and the process is repeated. When a determination is made that the design is satisfactory, a filter design description is output.Type: ApplicationFiled: November 30, 2020Publication date: March 18, 2021Applicant: Resonant, Inc.Inventor: Richard Silver
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Patent number: 10944380Abstract: Acoustic resonator devices, filter devices, and methods of fabrication are disclosed. A resonator device includes a single-crystal piezoelectric plate having a front surface and a back surface opposite the front surface, wherein the back surface is coupled to a surface of a substrate. A floating back-side conductor pattern is formed on a portion of the back surface. A front-side conductor pattern including two electrodes is formed on a portion of the front surface opposite the back-side conductor. A portion of the piezoelectric plate forms a diaphragm spanning a cavity in the substrate and the front-side conductor pattern is on the diaphragm.Type: GrantFiled: November 5, 2020Date of Patent: March 9, 2021Assignee: Resonant Inc.Inventors: Viktor Plesski, Julius Koskela
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Patent number: 10917070Abstract: Filter devices and methods of fabrication are disclosed. A filter device includes a piezoelectric plate attached to a substrate, portions of the piezoelectric plate forming diaphragms spanning respective cavities in the substrate. A conductor pattern formed on a surface of the piezoelectric plate includes a plurality of interdigital transducers (IDTs) of a respective plurality of acoustic resonators including a shunt resonator and a series resonator, interleaved fingers of each of the plurality of IDTs disposed on one of the diaphragms. Radio frequency signals applied to the IDTs excite respective primary shear acoustic modes in the respective diaphragms. A thickness of a first dielectric layer disposed on the front surface between the fingers of the IDT of the shunt resonator is greater than a thickness of a second dielectric layer disposed on the front surface between the fingers of the IDT of the series resonator.Type: GrantFiled: November 20, 2019Date of Patent: February 9, 2021Assignee: Resonant Inc.Inventors: Viktor Plesski, Soumya Yandrapalli, Robert B. Hammond, Bryant Garcia, Patrick Turner, Jesson John, Ventsislav Yantchev