Abstract: Methods and systems for precisely removing selected layers of materials from a multi-layer work piece using laser ablation are disclosed. Precise removal of one or more selected layers of materials of a work piece may be performed by irradiating at least one location on a multi-layer work piece with a laser beam, ablating material at the at least one location, detecting one or more characteristics of the material ablated at the at least one location and analyzing the one or more characteristics to identify a change in at least one of the one or more characteristics that indicates a change in the type of material being ablated. Related systems are also described.
Type:
Grant
Filed:
May 20, 2011
Date of Patent:
July 8, 2014
Assignee:
Resonetics, LLC
Inventors:
Sergey V. Broude, Chen-Hsiung Cheng, Pascal Miller, Glenn Ogura, David L. Wall
Abstract: Embodiments of the present invention are directed to methods and systems for laser micro-machining, which may include dividing a long line illumination field into a plurality of individual fields, wherein each of the plurality of fields includes an aspect ratio of about 4:1 or greater, directing the plurality of individual fields onto at least one mask, wherein each individual field illuminates a corresponding area on the mask and translating the mask and/or workpiece relative to one another along a scan axis.
Type:
Grant
Filed:
May 27, 2005
Date of Patent:
October 2, 2012
Assignee:
Resonetics, LLC
Inventors:
Brian Hall, David S. Holbrook, David L. Wall
Abstract: Methods and systems for precisely removing selected layers of materials from a multi-layer work piece using laser ablation are disclosed. Precise removal of one or more selected layers of materials of a work piece may be performed by irradiating at least one location on a multi-layer work piece with a laser beam, ablating material at the at least one location, detecting one or more characteristics of the material ablated at the at least one location and analyzing the one or more characteristics to identify a change in at least one of the one or more characteristics that indicates a change in the type of material being ablated. Related systems are also described.
Type:
Application
Filed:
May 20, 2011
Publication date:
January 5, 2012
Applicant:
Resonetics, LLC
Inventors:
Sergey V. Broude, Chen-Hsiung Cheng, Pascal Miller, Glenn Ogura, David L. Wall