Abstract: A multifinger carbon nanotube field-effect transistor (CNT FET) is provided in which a plurality of nanotube top gated FETs are combined in a finger geometry along the length of a single carbon nanotube, an aligned array of nanotubes, or a random array of nanotubes. Each of the individual FETs are arranged such that there is no geometrical overlap between the gate and drain finger electrodes over the single carbon nanotube so as to minimize the Miller capacitance (Cgd) between the gate and drain finger electrodes. A low-K dielectric may be used to separate the source and gate electrodes in the multifinger CNT FET so as to further minimize the Miller capacitance between the source and gate electrodes.
Type:
Grant
Filed:
January 28, 2008
Date of Patent:
October 18, 2011
Assignee:
RF Nano Corporation
Inventors:
Peter J. Burke, Steffen McKernan, Dawei Wang, Zhen Yu
Abstract: A method is provided of integrating the formation of nanotube devices on the same substrate or wafer as CMOS devices in a standard CMOS process. During a CMOS formation process, a region of the substrate containing CMOS devices is protected from certain nanotube fabrication processes while fabricating nanotube devices on the substrate. After fabrication of the nanotube devices, the region of the substrate containing the fabricated nanotube devices is then protected from certain CMOS fabrication processes while fabricating CMOS devices on a different region of the same substrate. Through this formation method, a nanotube device based RF/analog system-on-chip (SoC) application can be formed having the superior RF/analog properties of nanotube electronic circuitry and the superior digital properties of silicon CMOS circuitry on the same wafer or substrate.
Abstract: A method is provided for forming a self-aligned carbon nanotube (CNT) field effect transistor (FET). According to one feature, a self-aligned source-gate-drain (S-G-D) structure is formed that allows for the shrinking of the gate length to arbitrarily small values, thereby enabling ultra-high performance CNT FETs. In accordance with another feature, an improved design of the gate to possess a âTâ-shape, referred to as the âT-Gate,â thereby enabling a reduction in gate resistance and further providing an increased power gain. The self-aligned T-gate CNT FET is formed using simple fabrication steps to ensure a low cost, high yield process.
Abstract: A method is provided for determining the anisotropy of alignment of a random array of 1-D conductive elements (e.g., carbon nanotube or silicon nanowire) formed on a substrate. A pattern of a plurality of electrodes are arranged on the substrate containing the 1-D conductive elements and a plurality of electrical property measurements are performed in a plurality of different directions between the plurality of electrodes. The plurality of measurements are combined together to generate a total measurement sum of electrical property measurements between the various electrodes. The measured electrical property is determined between a selected pair of the plurality of electrodes along a selected direction extending between the selected pair of electrodes. The anisotropy of alignment of the 1-D conductive elements on the substrate along the selected direction is determined based on a ratio of the measured electrical property between the selected pair of electrodes versus the total measurement sum.
Abstract: A method and device are provided for determining, without contact, the physical and electrical properties of nanotube materials. The device includes a scanning probe configured to generate a signal of certain frequency onto the nanotube material and measure a reflected signal from the nanotube material, and a processor coupled to the scanning probe and configured to determine the physical and electrical properties of the nanotube material from the measured reflected signal. The method includes positioning a scanning probe relative to the nanotube material, generating a signal of certain frequency onto the nanotube material, and measuring a reflected signal from the nanotube material.