Abstract: An X-ray optical system provides selectively a linear X-ray beam and a point X-ray beam while using an X-ray source which generates an X-ray beam having a linear section. When the point X-ray beam is selected, an X-ray intensity per unit area becomes higher. The X-ray optical system has an X-ray source, a parabolic multilayer mirror to which an aperture slit plate is attached, an optical-path selection slit device, a polycapillary optics and an exit-width restriction slit. The polycapillary optics and the exit-width restriction slit are detachably inserted into a path of a parallel beam coming from the parabolic multilayer mirror, and thus they can be removed from the path and a Soller slit and a divergence slit can be inserted instead.

Abstract: An X-ray tube includes an electron gun in which a Wehnelt electrode is formed with an opening asymmetric about an electron emitter. The electron emitter is an elongate coil filament which is disposed inside the elongate opening of the Wehnelt electrode. The opening has two longer sides positioned asymmetrically about a center-of-width line of the filament. Each of the two longer sides is curved in the same direction as viewed in a direction normal to the front face of the Wehnelt electrode. The two longer sides have curvature radii R1 and R2 different from each other, so that an electron-beam-irradiation region on a target is not curved but becomes almost straight.