Patents Assigned to Robert S. Cole et al
  • HIGH PURITY COBALT SPUTTER TARGET AND PROCESS OF MANUFACTURING THE SAME
    Publication number: 20010001438
    Abstract: A high purity cobalt sputter target is disclosed which contains a face centered cubic (fcc) phase and a hexagonal close packed (hcp) phase, wherein the value of the ratio of X-ray diffraction peak intensity, Ifcc(200)/Ihcp(10 {overscore (1)}1), is smaller than the value of the same ratio in a high purity cobalt material obtained by cooling fcc cobalt to room temperature from the high temperature at which it is molten.
    Type: Application
    Filed: August 25, 1998
    Publication date: May 24, 2001
    Applicant: Robert S. Cole et al
    Inventors: ROBERT S. COLE, MATHEW S. COOPER, STEPHEN P. TURNER, YINSHI LIU, MICHAEL MCCARTY, RODNEY L. SCAGLINE