Patents Assigned to Rodel Nitta Corporation
  • Perforated-transparent polishing pad
    Patent number: 6824447
    Abstract: The method forms a transparent polishing pad by first step forming a plurality of openings through a disk-shaped pad body. The plurality of openings is distributed about the disk-shaped pad body and a transparent window within a portion of the pad body and the transparent window. Then sealing the openings in the transparent window with a transparent material allows transport of polishing fluids through the openings in the disk-shaped pad body and prevents transport of the polishing fluids through the transparent window.
    Type: Grant
    Filed: December 27, 2002
    Date of Patent: November 30, 2004
    Assignee: Rodel Nitta Corporation
    Inventors: Shogo Takahashi, Hajime Shimizu