Patents Assigned to Rodney T. Hodgson
  • GAS DRIVEN ROTATING SUSCEPTOR FOR RAPID THERMAL PROCESSING (RTP) SYSTEM
    Publication number: 20010002948
    Abstract: An apparatus for preventing warping of a rotatable base for supporting an object being processed in a Rapid Thermal Processing (RTP) system due to non uniform heating of the base by radiation from the object being processed is disclosed.
    Type: Application
    Filed: December 11, 1998
    Publication date: June 7, 2001
    Applicant: Rodney T. Hodgson
    Inventors: HELMUT ASCHNER, ANDREAS HAUKE, KARSTEN WEBER, DIETER ZERNICKEL