Patents Assigned to Ronal Systems Corp.
  • In situ chemical generator and method
    Patent number: 6579805
    Abstract: Chemical generator and method for generating a chemical species at a point of use such as the chamber of a reactor in which a workpiece such as a semiconductor wafer is to be processed. The species is generated by creating free radicals, and combining the free radicals to form the chemical species at the point of use.
    Type: Grant
    Filed: January 5, 1999
    Date of Patent: June 17, 2003
    Assignee: Ronal Systems Corp.
    Inventor: Ronny Bar-Gadda