Abstract: A load port control unit performs an opening operation of a sealable container according to a first operation procedure when a sensor has detected a normal placement of the sealable container, and retries the opening operation according to a second operation procedure for being able to more reliably perform the opening operation of the sealable container, to prevent a transfer device from stopping, when the sensor has detected a placement abnormality of the sealable container.

Abstract: To perform subculture at an appropriate timing according to the actual state of cells, the subculture timing determination method includes an image-capturing step of photographing cells at a plurality of predetermined points of a culture vessel at a first photographing time point to obtain the cells as a cell image of each point of the plurality of predetermined points at the first photographing time point, a primary information obtaining step of obtaining primary information of the cells photographed in the cell image of each point at the first photographing time point, a statistical index value obtaining step of calculating a statistical index value of the primary information of the cells, and a determination step of performing determination that a photographing time point corresponding to a time point at which the statistical index value reaches a predetermined threshold value is a time point at which a subculture timing is reached.

Abstract: The purpose of the present invention is to provide, at low cost, a transport apparatus 2 which is capable of transporting a semiconductor wafer W between a FOUP 19 and a processing apparatus 3 without exposing a surface to be processed of the semiconductor wafer to an oxidizing atmosphere. This transport apparatus 2 includes a load port 20 that has atmosphere replacing function, a transport robot 2 that has an atmosphere replacing function, an aligner 40 that has an atmosphere replacing function, and a load lock chamber 12 that has an atmosphere replacing function. The surface being processed of the semiconductor wafer has the atmosphere replaced locally while the semiconductor wafer is being moved and is being subjected to processes such as positioning.

Abstract: Provided is a FOUP transfer device for transferring FOUPs between load ports and which is capable of reducing remodeling work on a pre-installed conveyance device as much as possible. FOUP transfer devices 1-1, 1-2 are installed in the vicinity of the load ports of the conveyance device, comprising one or more load ports 18-1, 18-2, and transfer FOUPs 3 between the load ports 18-1, 18-2. The FOUP transfer devices 1-1, 1-2 have first optical I/O communication devices 31-3, 31-4 and are configured such that second optical I/O communication devices 31-1, 31-2 provided for the load ports 18-1, 18-2 are connected thereto, and so as to carry out, in place of the load ports 18-1, 18-2, the optical I/O communication carried out between the load ports 18-1, 18-2 and an OHT cart 11.

Abstract: An object of the invention is to realize a high transfer throughput in a wafer transfer apparatus in which a wafer transfer robot transfers a wafer via an aligner. A wafer transfer apparatus includes a wafer transfer robot, and a separation dimension between a pair of wafer holding rods forming a finger of the wafer transfer robot is set to be larger than a dimension of a body portion of an aligner in a width direction provided in the wafer transfer apparatus. In addition, an elevating mechanism provided in the wafer transfer apparatus is configured to be able to move the finger to below the body portion of the aligner, thereby achieving the object of the invention.

Abstract: An aligner includes a driving pulley connected to a motor, a toothed belt hung with respect to a driven pulley connected to a spindle, and a pulley detection sensor detecting the rotation position of the driven pulley. Each time the driving pulley rotates the driven pulley once, the misalignment in the direction of rotation of the driven pulley is detected and a correction value of the rotational misalignment of the driven pulley is calculated based on the driving and driven pulleys having a known rotation ratio. In a case where the rotation angle information of the driving motor is lost, detection data for calibration is created so that a correction value corresponding to the current phases of the driven pulley and the toothed belt after origin search is searched for.

Abstract: A switching valve includes a rotor having a pair of rollers rotatably mounted on both ends thereof, a rotor drive unit rotationally driving the rotor, a pair of pressing members, each being provided at a position where each of the pair of pressing members cooperates with each of the pair of rollers outside a revolution orbit of each of the pair of rollers revolving by rotation of the rotor, and a pair of tubes, each being disposed between the revolution orbit of each of the pair of rollers and each of the pair of pressing members. A rotation center axis of the rotor is disposed on a straight line connecting centers of rotation of the pair of rollers, and each pressing member has the pair of pressing areas symmetrical with respect to a straight line passing through the center of rotation of the rotor and extending a vertical direction.

Abstract: A pod opener includes an elevating mechanism elevating the cassette in a vertical direction, a first hook member engaging with an engagement means of the cassette and supporting the cassette, a second hook member supported by the first hook member, a forward and backward movement mechanism moving the first hook member and the second hook member forward and backward with respect to the cassette, an urging member urging the second hook member upward, and an atmosphere maintaining device maintaining an internal space having the cassette disposed therein in a predetermined atmosphere and the second hook member is displaceable with respect to the first hook member.

Abstract: Since a drive unit is disposed in a body of a switching valve included in a suction-discharge device in the related art and a sample flows in the body of the switching valve, a treatment, such as autoclave sterilization, could not be performed. For this reason, a contamination cause, such as bacteria, could not be completely removed. Since a switching valve of the invention is formed of a mechanism for blocking tubes by pressing the tubes, in which a sample flows, from the outside, a contamination cause, such as bacteria, is not spread to the switching valve. Further, tubes and a syringe pump, which are installed on a suction-discharge device of the invention, form an assembly that can be easily replaced even though contamination is generated.

Abstract: Provided is a load port capable of loading and unloading a substrate by a transfer robot in a state where a purge gas atmosphere is maintained inside a substrate storage space. After the lid of the substrate storage container is opened, an opening portion of the substrate storage container is closed by a frame sealing a peripheral edge of the opening portion of the substrate storage container and a shutter portion where a plurality of shielding plates are disposed in a vertical direction at a third position which is further moved forward from a release position. The shutter portion can locally move all or a portion of the shielding plates to form a narrow opening portion (third opening portion), and transferring of the substrate in the state where an atmosphere of the substrate storage space is replaced is performed through the narrow opening portion (third opening portion).

Abstract: In order to enable the inside of a constant-temperature device to be sterilized using sterilization gas and prevent contamination during incubation, even when provided with an atmosphere measuring means having a CO2 sensor and an oxygen concentration sensor, a sensor unit (100) is arranged inside or close to an incubation chamber, and the internal atmosphere is measured by sucking-in the atmosphere of the incubation chamber (2) by means of an air-flow generation means (20). Furthermore, high-precision filters (23, 24) are arranged in the flow channel through which the atmosphere within the incubation chamber (2) is taken-in/discharged, preventing bacteria and/or cells from flowing in, and also preventing the diffusion of sterilization gas to the inside of a sensor unit (100) during sterilization.

Abstract: Provided is a wafer stocker that can prevent the inflow of an external atmosphere, maintain a wafer storage space at a desired atmosphere with a relatively small amount of gas, and prevent dust from being attached to a wafer surface. A shutter portion, including multiple shield plates having the same height as an interval between shelf plates disposed in a storage container, is disposed with a slight space from a body portion, and by supplying clean gas into the storage container, a clean atmosphere of a higher pressure than an external environment is maintained, and a shutter portion is opened and closed by moving up and down the shield plate independently from the shelf plate that supports a wafer.

Abstract: Provided is a constant-temperature device which comprises conveyance mechanism and which can operate stably over a long period of time even when installed in an atmosphere of a sterilization gas having strong oxidative properties, such as hydrogen peroxide gas, or a high temperature environment during dry-heat sterilization operations. A drive unit for a rotatably operated specimen table (10) on which a specimen is placed, in an incubation chamber, is arranged outside of the incubation chamber, and the drive-force from the drive unit is transmitted by means of magnetic coupling.

Abstract: Provided is a position detecting device that is capable of precisely detecting the coordinates of the center of a disc-shaped substrate from image data captured by one camera, calculating the amount of positional misalignment of the disc-shaped substrate on a support member as the disc-shaped substrate is being transported during processing, and correcting the position such that the substrate can be located at the precise loading position. Isosceles right triangles, each having the radius of the disc-shaped substrate as one side, are generated from the coordinates of two places on edge data extracted from the image data and the radius on the edge data, and the coordinates of the center position of the disc-shaped substrate are detected by using the Pythagorean theorem.

Abstract: A robot control apparatus and a control method for moving a tool along a synthesized trajectory where at least two operations are synthesized in the middle of a desired trajectory. Control positions for a preceding operation and those for a succeeding operation are calculated from initial to terminal values, respectively. With a requirement that initial values for the succeeding operation be matched to terminal values for preceding operation, target control positions at a predetermined time for an actuator in a section where a tool is moved along the synthesized trajectory are calculated on the basis of values obtained by adding values of a difference between the predetermined time and a previous time for the preceding operation to values of a difference between the predetermined time and the previous time for the succeeding operation, and the actuator is controlled such that calculated target control positions are attained.

Abstract: Provided is constant-temperature equipment wherein maintenance is facilitated with the least failure, and highly reliable culturing and testing can be carried out. Mechanical and electrical structures are eliminated from the inside of a temperature-controlled chamber (15) by using a non-contact magnetic arrangement as a drive transmission for a sample table (5) and a sample table drive (6), thus reducing failure and enhancing maintainability. In addition, a conveyor (11) is provided with a pass box to minimize change in atmosphere during conveying. The sample table drive (6) and the conveyor (11) can be attached removably to the temperature-controlled chamber (15) to permit sterilization at high temperature.

Abstract: Constant-temperature equipment wherein mechanical and electrical structures are eliminated from the inside of a temperature-controlled chamber (15) by using a non-contact magnetic arrangement as a drive transmission for a sample table (5) and a sample table drive mechanism (6), thus reducing failure and enhancing maintainability. In addition, a conveyance mechanism (11) is provided with a pass box adjacent which sliding shielding plates (9) are stacked vertically, and the shielding plates (9) are linked with the conveyance mechanism (11) by an engaging mechanism provided in the conveyance mechanism (11) to allow the plates to be opened and closed by a travel mechanism (12), thus simplifying the structure and minimizing change in atmosphere during conveying. The sample table drive mechanism (6) and the conveyance mechanism (11) can be attached removably to the temperature-controlled chamber (15) to permit sterilization at high temperature.

Abstract: Disclosed are a transport apparatus that holds and transports an object on a predetermined transport track using a transport portion provided at the leading end of an arm and is capable of acquiring the teaching information of a transport position using a normal transport operation, a position teaching method, and a sensor jig. A transmissive sensor (32) is provided in a sensor jig (30) such that the projection segments of an optical axis (41) and an optical axis (42) on a projection plane intersect with each other and neither the project segment of the optical axis (41) nor the projection segment of the optical axis (42) is aligned with the X-direction and the Y-direction. During a position teaching operation, the sensor jig (30) is provided so as to be held by a wafer transport portion (24), thereby detecting target members (51, 52).

Abstract: First and second parallel link mechanisms 36, 38 are connected via a short link 35 arranged on a rotational angle transmission mechanism 29 so that a rotation applied to the first parallel link mechanism 36 is transmitted to the second parallel link mechanism 38 via the rotational angle transmission mechanism 29. The rotational angle transmission mechanism 29, the second parallel link mechanism 38 and the driven side link of the first parallel link mechanism 36 are horizontally supported by the drive side link 30 of the first parallel link mechanism 36. The rotational angle transmission mechanism 29 transmits the rotational angle applied to the drive side link 30 of the first parallel link mechanism 36 to the drive side link 32 of the second parallel link mechanism 38 supported by the drive side link 30 via the guide means that is parallel to the short link 35.

Abstract: A robot control apparatus and a control method which, in moving a tool along a synthesized trajectory where at least two operations are synthesized in middle of a desired trajectory, eliminates the need for arithmetic processing for determining synthesized trajectory, thereby drastically shortening processing time required for preprocessing for robot control. Control values for preceding operation and those for succeeding operation are calculated from initial to terminal values, respectively.