Abstract: Provided is a FOUP transfer device for transferring FOUPs between load ports and which is capable of reducing remodeling work on a pre-installed conveyance device as much as possible. FOUP transfer devices 1-1, 1-2 are installed in the vicinity of the load ports of the conveyance device, comprising one or more load ports 18-1, 18-2, and transfer FOUPs 3 between the load ports 18-1, 18-2. The FOUP transfer devices 1-1, 1-2 have first optical I/O communication devices 31-3, 31-4 and are configured such that second optical I/O communication devices 31-1, 31-2 provided for the load ports 18-1, 18-2 are connected thereto, and so as to carry out, in place of the load ports 18-1, 18-2, the optical I/O communication carried out between the load ports 18-1, 18-2 and an OHT cart 11.

Abstract: Provided is a constant-temperature device which comprises conveyance mechanism and which can operate stably over a long period of time even when installed in an atmosphere of a sterilization gas having strong oxidative properties, such as hydrogen peroxide gas, or a high temperature environment during dry-heat sterilization operations. A drive unit for a rotatably operated specimen table (10) on which a specimen is placed, in an incubation chamber, is arranged outside of the incubation chamber, and the drive-force from the drive unit is transmitted by means of magnetic coupling.

Abstract: Provided is a position detecting device that is capable of precisely detecting the coordinates of the center of a disc-shaped substrate from image data captured by one camera, calculating the amount of positional misalignment of the disc-shaped substrate on a support member as the disc-shaped substrate is being transported during processing, and correcting the position such that the substrate can be located at the precise loading position. Isosceles right triangles, each having the radius of the disc-shaped substrate as one side, are generated from the coordinates of two places on edge data extracted from the image data and the radius on the edge data, and the coordinates of the center position of the disc-shaped substrate are detected by using the Pythagorean theorem.

Abstract: Provided is constant-temperature equipment wherein maintenance is facilitated with the least failure, and highly reliable culturing and testing can be carried out. Mechanical and electrical structures are eliminated from the inside of a temperature-controlled chamber (15) by using a non-contact magnetic arrangement as a drive transmission for a sample table (5) and a sample table drive (6), thus reducing failure and enhancing maintainability. In addition, a conveyor (11) is provided with a pass box to minimize change in atmosphere during conveying. The sample table drive (6) and the conveyor (11) can be attached removably to the temperature-controlled chamber (15) to permit sterilization at high temperature.

Abstract: Constant-temperature equipment wherein mechanical and electrical structures are eliminated from the inside of a temperature-controlled chamber (15) by using a non-contact magnetic arrangement as a drive transmission for a sample table (5) and a sample table drive mechanism (6), thus reducing failure and enhancing maintainability. In addition, a conveyance mechanism (11) is provided with a pass box adjacent which sliding shielding plates (9) are stacked vertically, and the shielding plates (9) are linked with the conveyance mechanism (11) by an engaging mechanism provided in the conveyance mechanism (11) to allow the plates to be opened and closed by a travel mechanism (12), thus simplifying the structure and minimizing change in atmosphere during conveying. The sample table drive mechanism (6) and the conveyance mechanism (11) can be attached removably to the temperature-controlled chamber (15) to permit sterilization at high temperature.

Abstract: Disclosed are a transport apparatus that holds and transports an object on a predetermined transport track using a transport portion provided at the leading end of an arm and is capable of acquiring the teaching information of a transport position using a normal transport operation, a position teaching method, and a sensor jig. A transmissive sensor (32) is provided in a sensor jig (30) such that the projection segments of an optical axis (41) and an optical axis (42) on a projection plane intersect with each other and neither the project segment of the optical axis (41) nor the projection segment of the optical axis (42) is aligned with the X-direction and the Y-direction. During a position teaching operation, the sensor jig (30) is provided so as to be held by a wafer transport portion (24), thereby detecting target members (51, 52).

Abstract: First and second parallel link mechanisms 36, 38 are connected via a short link 35 arranged on a rotational angle transmission mechanism 29 so that a rotation applied to the first parallel link mechanism 36 is transmitted to the second parallel link mechanism 38 via the rotational angle transmission mechanism 29. The rotational angle transmission mechanism 29, the second parallel link mechanism 38 and the driven side link of the first parallel link mechanism 36 are horizontally supported by the drive side link 30 of the first parallel link mechanism 36. The rotational angle transmission mechanism 29 transmits the rotational angle applied to the drive side link 30 of the first parallel link mechanism 36 to the drive side link 32 of the second parallel link mechanism 38 supported by the drive side link 30 via the guide means that is parallel to the short link 35.

Abstract: A loader is provided, which is disposed in a low cleanliness room along a border between the low cleanliness room and a high cleanliness room, for transporting a dust free article between an inside of a container receiving the dust free article and the high cleanliness room, comprising a movable stage for mounting the container; an opening portion through which the dust free article is transported between the container and the high cleanliness room; a door for opening and closing the opening portion; a unifying means for unifying a cover of the container and the door when the container approaches the door; and a driving apparatus for moving the cover and the door unified within the loader to open and close the opening portion and the container.

Abstract: While a fine porous diamond particle film has been known as a high heat resistant and low dielectric constant film and also has high mechanical strength and heat conductivity, and is expected as an insulating film for multi-layered wirings in semiconductor integrated circuit devices, it is insufficient in current-voltage characteristic and has not yet been put into practical use. According to the invention, by treating the fine porous diamond particle film with an aqueous solution of a salt of a metal such as barium and calcium, the carbonate or sulfate of which is insoluble or less soluble, and a hydrophobic agent such as hexamethyl disilazane or trimethyl monochlolo silane, as well as a reinforcing agent containing one of dichlorotetramethyl disiloxane or dimethoxytetramethyl disiloxane, thereby capable of putting the dielectric breakdown voltage and the leak current within a specified range of a practical standard.

Abstract: A shuttle-type conveying system to convey an article. The system includes a feeding and collecting device capable of setting a cassette in which articles to be conveyed are stacked as they are on a rotating and feeding table, a pickup device taking out the article and placing it on a receiving/delivery table, and a conveying device feeding the article on the receiving/delivery table to another receiving/delivery table by a shuttle conveying portion traveling on conveying paths below the receiving/delivery table. After the article is lifted up by the shuttle conveying portion and moved to outside the receiving/delivery table, the article is lowered below the receiving/delivery table and made to travel under the receiving/delivery table to another receiving/delivery table.

Abstract: A shuttle-type conveying system to convey an article. The system includes a feeding and collecting device capable of setting a cassette in which articles to be conveyed are stacked as they are on a rotating and feeding table, a pickup device taking out the article and placing it on a receiving/delivery table, and a conveying device feeding the article on the receiving/delivery table to another receiving/delivery table by a shuttle conveying portion traveling on conveying paths below the receiving/delivery table. After the article is lifted up by the shuttle conveying portion and moved to outside the receiving/delivery table, the article is lowered below the receiving/delivery table and made to travel under the receiving/delivery table to another receiving/delivery table.

Abstract: In order to automate the positioning at respective ports at the start-up of an equipment in a semiconductor manufacturing equipment equipped with a positioning device and a carrying robot and enhance productivity, 2 points W1 and W2 at which the circumference of a disc-like object 47 such as a wafer and the locus 43 of a detection means cross are detected, and the center position A of a disc-like object is calculated using the specific point O on the perpendicular bisector 42 of the section of a line combining 2 points with these and the radius r of the disc-like object. Thereby, the carrying robot could carry out the positioning work and not only the correction of a carrying route but also the reference position teaching at the start-up of equipment could be automated using the result.

Abstract: While a fine porous diamond particle film has been known as a high heat resistant and low dielectric constant film and also has high mechanical strength and heat conductivity, and is expected as an insulating film for multi-layered wirings in semiconductor integrated circuit devices, it is insufficient in current-voltage characteristic and has not yet been put into practical use. According to the invention, by treating the fine porous diamond particle film with an aqueous solution of a salt of a metal such as barium and calcium, the carbonate or sulfate of which is insoluble or less soluble, and a hydrophobic agent such as hexamethyl disilazane or triethyl monochloro silane, as well as a reinforcing agent containing one of dichlorotetramethyl disiloxane or dimethoxytetramethyl disiloxane, thereby capable of putting the dielectric breakdown voltage and the leak current within a specified range of a practical standard.

Abstract: The invention includes a base member attached to a casing. The inside of the casing can be a vacuum atmosphere. A partition wall is provided on the base member, the base member separating an air atmosphere and the vacuum atmosphere. A rotating member (a rotating portion of a driving source) is provided on the base member at a position different from the rotating member. An armature, which is a dust source, is provided on the air atmosphere side of the partition wall, thereby maintaining high cleanliness on the vacuum atmosphere side. Providing the partition wall and the rotating member at different positions eliminates the necessity of consideration on the rigidity of the partition wall for supporting the rotating member, thereby reducing the thickness of the partition wall.

Abstract: A device for temporarily loading, storing and unloading a container without deforming the container and affecting its contents. An enclosure (2) having struts (3) at both its left and right sides is provided. A support beam (4) of a transporter (10) that is provided with a pair of horizontal retaining fingers (13, 13) is attached in a vertically movable manner between the struts on the rear-surface side of the enclosure (2), and a plurality of horizontal shelves (20) is arranged between the struts on the rear-surface side of the enclosure with spaces (H) in a height direction of the container (19), the spaces being larger than the height dimension (h) of the container (19). Further, the retaining fingers (13, 13) of the transporter (10) are made to protrude toward the shelves (20) and the distance (L) between the pair of retaining fingers (13, 13) is made to be suitable for lifting the container.

Abstract: When a first floor (11) which is formed of a punching plate or the like and through which air passes is provided immediately below an arm (17) at a middle height part of a conveying robot (10) in a casing (2a) of a clean transfer device (2) and a degree of opening of a casing bottom part frame (2b), which supports a base part of the conveying robot (10), with respect to the outside is restricted, a class 1 can be maintained. Here, when a second floor (13) formed of a punching plate or the like is used on the casing bottom part frame (2b), a class 0 state can be realized under specific conditions, thereby enabling production of a semiconductor having a wire width of 0.1 ?m. As a result, the device can cope with the unexpectedly high degree of cleanliness of 0.1 ?m particle class 1, which cannot be realized in the prior art, requested also for the transfer device according to a reduction in wire width on a highly integrated semiconductor wafer.

Abstract: Diamond fine particles having porous structure known in a high thermal resistance and low dielectric constant film has a high thermal conductivity and is expected as an insulating film for multiplayer wirings of a semiconductor integrated circuit device. A liquid composition of diamond fine particles, which are raw material of the film, is unstable as colloid, resulting in low reproducibility and yield in the production of films. It becomes possible to impart a very low viscosity and improved stability to the colloid liquid composition of diamond fine particles by containing a small amount of amine. If necessary, a thickener may be used to adjust the viscosity appropriately, so that various kinds of application systems can be used. A low dielectric constant film having a relative dielectric constant of about 2.5 can be thus obtained. Further, the liquid composition may be utilized as an abrasive for finishing.

Abstract: A robot simulation device is provided. It includes a virtual robot working environment in which a virtual robot has a task of transferring a virtual object from a start point to a goal point, the simulation device determining the path of travel. A task simulation is executed in response to the virtual robot working environment and the path of travel. The task simulation determines a robot activity region where the virtual robot can operate and an interference region where the virtual robot encounters obstacles. Thereafter the device creates a desired executed simulation in which the virtual robot can operate without encountering obstacles.

Abstract: A stator portion of a linear motor includes a U-phase coil portion (10U), a V-phase coil portion (10V), and a W-phase coil portion (10W) through which currents with phases different by 120 degrees from one another flow. Each coil portion has pairs of a first coil wound clockwise and a second coil wound counterclockwise. The pairs of coils adjoin to each other in the moving direction and are connected in series and arrayed in the moving direction. When the extension length from the first coil to the second coil is 360 degrees, the V-phase coil portion overlaps with and is shifted from the U-phase coil portion by 120 degrees, and the W-phase coil portion overlaps with and is shifted from the V-phase coil portion by 120 degrees with respect to the moving direction. A magnet portion (30) is movably combined with the U-phase, V-phase, and W-phase coil portions. The length of the magnet portion in the moving direction is less than a half of the wavelength of the magnetic flux generated with the coils.

Abstract: A cylinder which can precisely feed a piston rod 3 into three different positions. The cylinder includes a spring receiving member 14 which is placed coaxially with the piston rod in a piston room. Movement of the piston 4 is limited by one end of the piston room and a stopper 8 formed on the piston rod which prevents the piston from moving in the opposite direction. A first spring member 15 is disposed in the cylinder tube 2 to separate the spring receiving member from the piston. A hollow 9 is formed on the periphery of the piston rod at a further position from the piston than the stopper and a stop pin 11 in the cylinder tube 2 which is biased in the direction of the hollow by a second spring member 12 engages with the hollow. A load port utilizes the cylinder for a production system.