Abstract: An apparatus for in-line testing and surface analysis of a sample contains a base which stationarily supports a column and moveably supports an optical microscope, an interferometer, and at least test unit such as a scratch and abrasive wear tester that are moveable on the column in the Z-axis direction. A sample secured on a sample table, which is supported by a replaceable tribology drive unit on an X-stage that may position the sample under the microscope, interferometer, or test unit. Depending on the type of the test, the replaceable tribology unit may impart to the sample either a linear reciprocating movement or a rotating movement. The apparatus may operate in an automatic mode and is provided with a central processing unit that control movements of all moveable units through respective drivers via controllers connected to the central processing unit.
Type:
Grant
Filed:
July 20, 2016
Date of Patent:
July 17, 2018
Assignee:
RTEC-INSTRUMENTS, INC.
Inventors:
Vishal Khosla, Nick Doe, Jun Xiao, Ming Chan, Gautam Char