Abstract: A lithographic manufacturing system produces periodic structures with feature sizes less than 10 nm and a direction of periodicity (D). A beam of radiation (1904) having a range of wavelengths in the EUV spectrum (1-100 nm or 1-150 nm) is focused into a spot (S) of around 5 ?m diameter. Reflected radiation (1908) is broken into a spectrum (1910) which is captured (1913) to obtain a target spectrum signal (ST). A reference spectrum is detected (1914) to obtain a reference spectrum signal (SR). Optionally a detector (1950) is provided to obtain a further spectrum signal (SF) using radiation diffracted at first order by the grating structure of the target. The angle of incidence (?) and azimuthal angle (?) are adjustable. The signals (ST, SR, SF) obtained at one or more angles are used to calculate measured properties of the target, for example CD and overlay.

Abstract: An electro-optical modulator with two electrodes as part of a transmission line of a first phase modulator and two electrodes as part of a transmission line of a second phase modulator included in two arms of a Mach-Zehnder-interferometer. An electrical controller applies a first electrical high-frequency-modulated voltage signals between the first and second electrodes and applies a second electrical high-frequency-modulated signals between the fourth and third electrodes. The electrical controller applies signals such that voltages applied to the first and fourth electrodes have substantially a same high-frequency content, and voltages applied to the second and third electrodes have substantially the same high-frequency content. In such configuration, a constant voltage offset is produced by either the voltages applied to the first and fourth electrodes or, the second and third electrodes. Thereby, cross-talk between electrodes, electrical losses, device size and fabrication costs may be reduced.

Abstract: An electro-optical modulator with two electrodes as part of a transmission line of a first phase modulator and two electrodes as part of a transmission line of a second phase modulator included in two arms of a Mach-Zehnder-interferometer. An electrical controller applies a first electrical high-frequency-modulated voltage signals between the first and second electrodes and applies a second electrical high-frequency-modulated signals between the fourth and third electrodes. The electrical controller applies signals such that voltages applied to the first and fourth electrodes have substantially a same high-frequency content, and voltages applied to the second and third electrodes have substantially the same high-frequency content. In such configuration, a constant voltage offset is produced by either the voltages applied to the first and fourth electrodes or, the second and third electrodes. Thereby, cross-talk between electrodes, electrical losses, device size and fabrication costs may be reduced.

Abstract: A THz antenna array has a plurality of THz antennae, a THz antenna having a photoconductive region and a first electrode and a second electrode which are arranged interspaced from each other via a spacer region that extends laterally across at least a part of the photoconductive region. In order to simplify the structure and facilitate its production, a lateral region between adjacent THz antennae of the array is not photoconductive. It is especially free from photoconductive material.

Abstract: A THz antenna array has a plurality of THz antennae, a THz antenna having a photoconductive region and a first electrode and a second electrode which are arranged interspaced from each other via a spacer region that extends laterally across at least a part of the photoconductive region. In order to simplify the structure and facilitate its production, a lateral region between adjacent THz antennae of the array is not photoconductive. It is especially free from photoconductive material.