Patents Assigned to S.O.I.Tec Silicon on Insulator Technolgoies
  • Method of fabricating heteroepitaxial microstructures
    Patent number: 7288430
    Abstract: An efficient method of fabricating a high-quality heteroepitaxial microstructure having a smooth surface. The method includes detaching a layer from a base structure to provide a carrier substrate having a detached surface, and then forming a heteroepitaxial microstructure on the detached surface of the carrier substrate by depositing an epitaxial layer on the detached surface of a carrier substrate. Also included is a heteroepitaxial microstructure fabricated from such method.
    Type: Grant
    Filed: June 24, 2005
    Date of Patent: October 30, 2007
    Assignee: S.O.I.Tec Silicon on Insulator Technolgoies
    Inventors: Bruce Faure, Fabrice Letertre, Bruno Ghyselen