Abstract: A raw material supply system for supplying a fixed amount of raw material necessary for ingot growth is disclosed. The system includes a support unit, an enclosure, a fixed amount supply unit, a hopper for supplying raw material to the fixed amount supply unit, a dopant supply unit for supplying a predetermined amount of dopant into the enclosure, a supply pipe for supplying a fixed amount of raw material and dopant to a crucible, a lifting mechanism for moving the supply pipe upward and downward, a moving mechanism for protruding an inclined chute to an upper part of the supply pipe, and a load cell mounted between the support unit and the enclosure for sensing the weight of the supplied raw material and inputting the sensed weight of the raw material to a controller.
Abstract: An ingot growing apparatus. A main chamber includes a crucible accommodating a source material therein and a heater melting the source material by heating the crucible. A dome chamber is disposed on top of the crucible. A pull chamber is disposed on top of the dome chamber. An ingot grown in the crucible moves via a seed cable within the dome chamber and the pull chamber. A weight-measuring unit is disposed on top of the pull chamber. The weight-measuring unit includes a housing disposed on top of the pull chamber, with the interior thereof being maintained in a vacuum state, a support roller disposed within the housing to support the seed cable, and a load cell disposed outside of the housing to measure a weight of the ingot supported by the support roller.
Type:
Grant
Filed:
April 30, 2015
Date of Patent:
August 9, 2016
Assignee:
S-TECH CO., LTD.
Inventors:
Jin Sub Park, Jin No Kim, Hyuck Cheol Kwon