Abstract: Techniques for inspection of articles having multiple features of one or more types are disclosed. Input data indicative of one or more selected features of interest is used for inspection by a given inspection system characterized by associated imaging configuration data. The input data is analyzed to extract information regarding one or more inspection tasks, and an inspection plan data is generated, to be used as a recipe data for operation of the given inspection system to provide measured data in accordance with the one or more inspection tasks. Selected inspection mode data corresponding to the inspection task data may be retrieved from a database system and utilized to generate the inspection plan data.