Abstract: Metal complexes containing one or more amidoimine ligands, methods of making such metal complexes, and methods of using such metal complexes to prepare metal-containing films are provided.
Type:
Application
Filed:
October 24, 2014
Publication date:
October 11, 2018
Applicant:
SAFC HITECH
Inventors:
Ravi KANJOLIA, Shaun GARRATT, David THOMPSON, Jeffrey ANTHIS