Abstract: A three-axis accelerometer to provide measurement of acceleration in three axes, comprising a substrate, a suspending mass block suspended in the substrate, a group of Y direction displacement sensors, a group of Z direction displacement sensors and a group of X direction displacement sensors; wherein the Y direction displacement sensors, the Z direction displacement sensors and the X direction displacement sensors are respectively arranged adjacent to the mass block; the mass block and the displacement sensors respectively comprise a plurality of metal layers and a dielectric layer between two metal layers. In the mass block, regions corresponding to the Y, Z and X direction displacement sensors respectively comprise at least two metal layers connected by a via. The Y, Z and X groups displacement sensors respectively comprise at least two metal layers connected by a via.

Abstract: A magnetic field sensor, comprising a suspending mass block, a group of Y direction displacement sensors, a group of Z direction displacement sensors and a power supply; wherein the mass block, the Y direction displacement sensors and the Z direction displacement sensors respectively comprise a plurality of metal layers and a dielectric layer between two metal layers. In the mass block, a region corresponding to the Y direction displacement sensors and a region corresponding to the Z direction displacement sensors respectively comprise at least two metal layers connected by a via. The Y direction displacement sensors include two electrodes, each comprising at least two metal layers connected by a via; the Z direction displacement sensor includes two electrodes, each comprising at least two metal layers connected by a via; and the power supply provides a current flowing through the mass block selectively in X or Y direction.

Abstract: Disclosed is a resonant magnetic field sensor, comprising a detector structure including a mass block and displacement detection electrodes; capacitance to voltage converter and amplifier to convert detection signals of the detection electrodes into voltage signals, as output signals of the magnetic field sensor; and a vibration driving circuit to provide the output signals to the mass block in the form of a current, to drive the mass block to vibrate. The vibration driving circuit may be a comparator.

Abstract: A micro-electromechanical apparatus having a signal attenuation-proof function, and a manufacturing method and a signal attenuation-proof method thereof are disclosed. The micro-electromechanical apparatus includes a substrate, an insulation layer, and a sensing unit. The substrate has a doped region in which a majority of conductive carriers have the same polarity as an electronic signal. The insulation layer is located on the substrate, and the sensing unit is located above the insulation layer and forms the electronic signal when sensing a force.

Abstract: Disclosed is a tubular light source device comprising a light tube and a light source assembly, wherein the light tube comprises a hollow cross-section, with a sector of the hollow cross-section being an inner flat portion as inner wall of the light tube. The light source assembly includes a substrate, a plurality of light emitting elements arranged on the substrate and conductive lines. The substrate is attached to the inner flat portion of the light tube, to form thermal contact with the inner wall. The light source device may further include necessary connector and controllers.

Abstract: The present invention relates to a liquid multilayer capacitive micro inclinometer, comprising at least two pairs of differential electrodes, each pair positioned in a same plane; at least one common electrode with a portion positioned in the plane of each pair of differential electrodes. The differential electrodes and the common electrode are provided in a sealed chamber, in which an immersing liquid is filled. The shape of the differential electrodes forms a sector of a circular plane. The inclinometer may further integrate a reading circuit. The present invention also discloses preparation method for the invented inclinometer.

Abstract: The present invention relates to a liquid capacitive micro inclinometer, comprising a pair of differential electrodes and a common electrode, all formed in the same plane in a sealed chamber. Immersing liquid is filled in the sealed chamber. The shape of the differential electrodes forms a sector of a circular plane. The inclinometer may further integrate a reading circuit. The present invention also discloses preparation method for the invented inclinometer.

Abstract: The present invention discloses an adhesive-free method for preparation of micro electro-mechanical structure, comprising forming a micro electro-mechanical structure on a first substrate, forming an enclosing space for immersing liquid on the first or second substrate, and applying pressure to fix the first and second substrate. Before applying the pressure, the assembly including the two substrates is flipped, to make the contact surface immersed by the immersing liquid.

Abstract: The present invention discloses an adhesive-free method for preparation of micro electro-mechanical structure, comprising forming a micro electro-mechanical structure on a first substrate, forming an enclosing space for immersing liquid on the first or second substrate, and applying pressure to fix the first and second substrate. Before applying the pressure, the assembly including the two substrates is flipped, to make the contact surface immersed by the immersing liquid.

Abstract: The present invention relates to a liquid multilayer capacitive micro inclinometer, comprising at least two pairs of differential electrodes, each pair positioned in a same plane; at least one common electrode with a portion positioned in the plane of each pair of differential electrodes. The differential electrodes and the common electrode are provided in a sealed chamber, in which an immersing liquid is filled. The shape of the differential electrodes forms a sector of a circular plane. The inclinometer may further integrate a reading circuit. The present invention also discloses preparation method for the invented inclinometer.

Abstract: The present invention relates to a liquid capacitive micro inclinometer, comprising a pair of differential electrodes and a common electrode, all formed in the same plane in a sealed chamber. Immersing liquid is filled in the sealed chamber. The shape of the differential electrodes forms a sector of a circular plane. The inclinometer may further integrate a reading circuit. The present invention also discloses preparation method for the invented inclinometer.

Abstract: The invented establishment and execution system for enterprise activity management system comprises an enterprise activity flow planning system and an enterprise activity flow execution system.