Abstract: A silica crucible and a fabricating method thereof are provided. The silica crucible includes a vitreous silica body having an inner surface and an outer surface, the inner surface of the vitreous silica body defining a cavity adapted for containing a molten material or a powder material; and a first coating layer formed on the inner surface of the vitreous silica body. The first coating layer is formed by pyrolysing a composite of aluminum, magnesium, calcium, titanium, zirconium, radium, chromium, selenium, barium, yttrium, cerium, hafnium, tantalum, tin or silicon under a predetermined temperature. The first coating layer substantially includes of a nonhomogeneous material, and an interface is defined by the homogeneous material and the nonhomogeneous material between the vitreous silica body and the coating layer. The first coating layer has strong adhesion capability and guarantees the coating layer will not be easily peeled off or removed.
Type:
Application
Filed:
May 25, 2011
Publication date:
September 26, 2013
Applicant:
SAINT-GOBAIN RESEARCH (SHANGHAI) CO., LTD.
Inventors:
Lu Wang, Leilei Sun, Laurent Molins, Paul Sargood
Abstract: A shot blasting material used for silicon substrate surface treatment and a method for preparing a silicon substrate. The shot blasting material includes silicon carbide particles, and the median particle diameter of the silicon carbide particles is 1 ?m to 30 ?m. Surface treatment can be performed on at least one surface of a silicon substrate in a bombarding manner through the shot blasting material. The particle diameter of the silicon carbide particles used for bombarding is small, and only a mechanical damage layer with a small thickness is formed on a first surface of the silicon substrate, so in the subsequent chemical treatment procedure, it is not required to add concentrated sulfuric acid to a chemical corrosive liquid, and a corrosion step and a cleaning step may be combined into one step, thereby reducing the process flow time, and decreasing the process cost; meanwhile, the method is environment friendly.