Patents Assigned to Saint-Goban Ceramics & Plastics, Inc.
  • Method for treating semiconductor processing components and components formed thereby
    Patent number: 6825123
    Abstract: A method for treating a semiconductor processing component, including: exposing the component to a halogen gas at an elevated temperature, oxidizing the component to form an oxide layer, and removing the oxide layer.
    Type: Grant
    Filed: April 15, 2003
    Date of Patent: November 30, 2004
    Assignee: Saint-Goban Ceramics & Plastics, Inc.
    Inventors: Andrew G. Haerle, Richard F. Buckley, Richard R. Hengst