Patents Assigned to Saintech Pty Limited
  • Ion source
    Patent number: 6645301
    Abstract: An ion source for use in ion assisted deposition of films, has an ionization region, a gas supply supplying ionizable gas to the ionization region, a gas excitation system causing ionization of the gas, ion influencing means forming the ions into a current directed at a target, and an ion source controller controlling the ion source so as to intermittently produce the ion current.
    Type: Grant
    Filed: August 9, 2001
    Date of Patent: November 11, 2003
    Assignee: Saintech Pty Limited
    Inventor: Wayne G Sainty