Patents Assigned to SAL, Inc.
  • Method of improving x-ray lithography in the sub 100nm range to create high quality semiconductor devices
    Patent number: 6845145
    Abstract: The present invention is directed to the production of high quality semi-conductor devices created at speeds and in sizes that far exceed current x-ray lithography capabilities.
    Type: Grant
    Filed: June 7, 2001
    Date of Patent: January 18, 2005
    Assignee: SAL, Inc.
    Inventors: Robert Allen Selzer, Franz Ludwig Rauch, Heinz Siegert, Klaus Simon, William Rudolf Friml, Joe Baker Gagnon, Robert Harrison Macklin
  • Vertical stepper stage apparatus
    Patent number: D451937
    Type: Grant
    Filed: May 18, 1999
    Date of Patent: December 11, 2001
    Assignee: SAL, Inc.
    Inventors: Robert A. Selzer, Franz Rauch