Abstract: An ultraviolet ozone oxidation system combines ultraviolet radiation, ozone, and heat to gently and effectively remove organic materials from a variety of substrates. The UV-ozone oxidation system includes a source of ozone which flows into a reaction chamber of the ultraviolet ozone oxidation system. The reaction chamber includes a UV lamp positioned above a heated sample stage. The heated sample stage is movably mounted such that a distance between the work piece or sample and the UV lamp can be adjusted to a minimum possible distance to improve process time. In addition, the heated sample stage is provided with a radiant heater which will provide adequate heating of the sample stage while the distance between the heater and the sample stage may be varied. The reaction chamber is also provided with a membrane diffuser which is positioned between the ozone source and the sample stage for uniformly distributing ozone to the sample on the sample stage.

Abstract: A calorimetric test device for monitoring the effectiveness of an ozone-ultraviolet light apparatus for cleaning-stripping work pieces is disclosed. This device relies upon the ability of ozone to bring about a color change, typically a bleaching of the color, in various organic dyes. A kit fore carrying out the test of an ozone-ultraviolet cleaning-stripping apparatus is also disclosed. This kit includes the test device just described in a premoistened form enclosed in an openable moisture-impermeable container. Test methods using the test device and kit are disclosed.

Abstract: System for and a method of fixing chlorofluorocarbons or other halogenated hydrocarbons, for example, CHF.sub.3 or CCl.sub.2 F.sub.2 recirculated and collected or discharged from a dry etching apparatus, so as to make the chlorofluorocarbon or halogenated hydrocarbon harmless against the earth's ozone layer. A gaseous hydrocarbon like ethane, ethylene or acetylene gas is mixed with a chlorofluorocarbon or other halogenated hydrocarbon gas in a reaction tube 61. The mixed gas is then excited to a plasma state for plasma copolymerization. A solid copolymer of the halogenated hydrocarbon and the hydrocarbon generated by the plasma copolymerization is deposited and accumulated onto the inner wall of the reaction tube 61 or on a fixation member 14.