Abstract: Semiconductor devices having scalable two transistor memory cells, and methods of fabricating the same, are disclosed. The semiconductor devices include a semiconductor substrate having first, second and third isolation layers thereon. The first and second isolation layers are spaced apart to define a first active region therebetween, and the second and third isolation layers are likewise spaced apart to form a second active region therebetween. A cell gate is provided on each active region that includes a gate dielectric layer, a storage node, a multiple tunnel junction barrier and a source layer that are sequentially stacked. The device also includes first and second control lines that surround at least a portion of each sidewall of the cell gates. A dielectric layer may be interposed between the sidewalls of the cell gates and the control line that surrounds it. A data line connects to the cell gates.
Type:
Grant
Filed:
January 22, 2004
Date of Patent:
June 7, 2005
Assignee:
Samsung Electronics Cot. Ltd.
Inventors:
Su-Jin Ahn, Gwan-Hyeob Koh, Hyoung-Joon Kim